• Journal of the Semiconductor & Display Technology
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• v.2 no.1
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• pp.15-19
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• 2003

Spin etcher can process frontside and backside on the wafer, which is used for etching, stripping, cleaning and wafer reclamation. A new generation of spin etchers has been designed to meet 300mm wafer processing. The larger header and higher spin speed make vibration problem a severe problem in developing equipments. This study shows schematic process of solving practical vibration problems, where it is required to analyze the principal ca uses of vibration problem and find out the method of vibration reduction in spin etcher. The vibration under normal operation is measured in time domain and is analyzed in frequency domain. And modal parameters are obtained through modal test. Using the modal parameters from experiments, the model of finite element method is formulated. From diagnosis using many measurements and analyses, it can be shown that main cause of vibration is unbalance of head.

• Structural Monitoring and Maintenance
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• v.2 no.1
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• pp.1-18
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• 2015

Traditionally, it is not easy to carry out tests to identify modal parameters from existing railway bridges because of the testing conditions and complicated nature of civil structures. A six year (2007-2012) research program was conducted to monitor a group of 25 railway bridges. One of the tasks was to devise guidelines for identifying their modal parameters. This paper presents the experience acquired from such identification. The modal analysis of four representative bridges of this group is reported, which include B5, B15, B20 and B58A, crossing the Caraj$\acute{a}$s railway in northern Brazil using three different excitations sources: drop weight, free vibration after train passage, and ambient conditions. To extract the dynamic parameters from the recorded data, Stochastic Subspace Identification and Frequency Domain Decomposition methods were used. Finite-element models were constructed to facilitate the dynamic measurements. The results show good agreement between the measured and computed natural frequencies and mode shapes. The findings provide some guidelines on methods of excitation, record length of time, methods of modal analysis including the use of projected channel and harmonic detection, helping researchers and maintenance teams obtain good dynamic characteristics from measurement data.

• Journal of the Society of Naval Architects of Korea
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• v.53 no.5
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• pp.380-387
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• 2016

Present research target to develop the procedure of long-term fatigue analysis of the structural details near the upper rolling chock of IMO type B tank by using the time domain modal analysis technique where both the contact and friction behavior can be accurately simulated. In order to perform the time domain analysis focused on the contact and friction, the entire model of the hull and tank was condensed with DOF reduction technique, which is obtained by transforming the global finite element model into its quasi-static modal coordinate. Modal analysis using the quasi-static deformation modes is chosen as a cost effective time domain simulation method and this is based on the fact that the structural response of the tank is quasi-static. Based on the developed cost effective time domain simulation method, the long-term fatigue analysis procedure for the structural details near the rolling chock and key of independent type tank is targeted to be established. The developed fatigue assessment procedure takes into account, wave induced stress and both contact and friction induced stress without loss of accuracy.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.188-188
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• 2004

Modal testing and analysis is a primary tool for obtaining reliable models to represent the dynamics of structures. When a structure is tested in order to collect measured data in modal testing, we usually use attached accelerometers to pick up the response data. Change in modal parameters due to the mass of transducers in modal testing is a well-known problem. The disadvantages are the shift of measured modal frequencies and the change of modal shapes, which can cause inaccurate results in further analysis. Modal analysis methods in frequency domain are based on a set of measured frequency response functions(FRF).(omitted)

• Proceedings of the Computational Structural Engineering Institute Conference
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• 1989.04a
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• pp.66-70
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• 1989

Methods for identification of modal properties of linear structures are presented. The extended Kalman filtering technique is empolyed. The state equation is formulated by two different ways, namely by the time domain and frequency domain approaches. Verifications are carried out by using simulated records of ground acceleration and structural response. Then the techniques are applied to the estimation of modal parameters of a scaled model for a 3-story building which is installed on a shaking table.

• Computers and Concrete
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• v.10 no.3
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• pp.277-294
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• 2012

The aim of the study is to determine the modal parameters of a prototype damaged arch dam by operational modal analysis (OMA) method for some damage scenarios. For this purpose, a prototype arch dam-reservoir-foundation model is constructed under laboratory conditions. Ambient vibration tests on the arch dam model are performed to identify the modal parameters such as natural frequency, mode shape and damping ratio. The tests are conducted for four test-case scenarios: an undamaged dam with empty reservoir, two different damaged dams with empty reservoirs, and a damaged dam with full reservoir. Loading simulating random impact effects is applied on the dam to crack. Cracks and fractures occurred at the middle of the upper part of the dams and distributed through the abutments. Sensitivity accelerometers are placed on the dams' crests to collect signals for measurements. Operational modal analysis software processes the signals collected from the ambient vibration tests, and enhanced frequency domain decomposition and stochastic subspace identification techniques are used to estimate modal parameters of the dams. The modal parameters are obtained to establish a basis for comparison of the results of two techniques for each damage case. Results show that approximately 35-40% difference exists between the natural frequencies obtained from Case 1 and Case 4. The natural frequencies of the dam considerably decrease with increasing cracks. However, observation shows that the filled reservoir slightly affected modal parameters of the dam after severe cracking. The mode shapes obtained are symmetrical and anti-symmetrical. Apparently, mode shapes in Case 1 represent the probable responses of arch dams more accurately. Also, damping ratio show an increase when cracking increases.

• Wind and Structures
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• v.9 no.4
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• pp.255-270
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• 2006

Several analytical procedures available in literature, for the evaluation of wind induced fatigue damage of structures, either assume the wide band random stress variations as narrow band random process or use correction factors along with narrow band assumption. This paper compares the correction factors obtained using the Rainflow Cycle (RFC) counting of the measured stress time histories on a lamp mast and a lattice tower, with those evaluated using different frequency domain methods available in literature. A Bi-modal spectral method has been formulated by idealising the single spectral moment method into two modes of background and resonant components, as considered in the gust response factor, for the evaluation of fatigue of slender structures subjected to "along-wind vibrations". A closed form approximation for the effective frequency of the background component has been developed. The simplicity and the accuracy of the new method have been illustrated through a case study by simulating stress time histories at the base of an urban light pole for different mean wind speeds. The correction factors obtained by the Bi-modal spectral method have been compared with those obtained from the simulated stress time histories using RFC counting method. The developed Bi-modal method is observed to be a simple and easy to use alternative to detailed time and frequency domain fatigue analyses without considerable computational and experimental efforts.

• Journal of KSNVE
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• v.9 no.2
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• pp.377-386
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• 1999

This paper is a study on model method for estimating system inputs from vibration responses, which is one of indirect input identification methods in frequency domain. The method has advantages over direct inverse method especially when points of operational inputs are inaccessible so that artificial excitation forces cannot be applied to obtain frequency response functions of the complete system. Procedures of extended modal model method are proposed and checked by numerical experiment. Mechanisms of error propagation, i.e., how errors in modal parameters such as poles nad mode shape vectors affect estimation of the input forces, are illustrated. Then, in order to counteract the error propagation, discrete modal filter approach is taken in this paper to compute the inversion of modal matrix in which the most serious errors seem to be generated. Further, a Reduced form of Modified Reciprocal Modal Vector(RMRMV) is proposed for estimating multiple inputs. It is shown to have smaller orthogonality error than MRMV.

• Steel and Composite Structures
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• v.7 no.6
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• pp.487-502
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• 2007

In recent decades there has been a trend towards improved mechanical characteristics of materials used in footbridge construction. It has enabled engineers to design lighter, slender and more aesthetic structures. As a result of these construction trends, many footbridges have become more susceptible to vibrations when subjected to dynamic loads. In addition to this, some inherit modelling uncertainties related to a lack of information on the as-built structure, such as boundary conditions, material properties, and the effects of non-structural elements make difficult to evaluate modal properties of footbridges, analytically. For these purposes, modal testing of footbridges is used to rectify these problems after construction. This paper describes an arch type steel footbridge, its analytical modelling, modal testing and finite element model calibration. A modern steel footbridge which has arch type structural system and located on the Karadeniz coast road in Trabzon, Turkey is selected as an application. An analytical modal analysis is performed on the developed 3D finite element model of footbridge to provide the analytical frequencies and mode shapes. The field ambient vibration tests on the footbridge deck under natural excitation such as human walking and traffic loads are conducted. The output-only modal parameter identification is carried out by using the peak picking of the average normalized power spectral densities in the frequency domain and stochastic subspace identification in the time domain, and dynamic characteristics such as natural frequencies mode shapes and damping ratios are determined. The finite element model of footbridge is calibrated to minimize the differences between analytically and experimentally estimated modal properties by changing some uncertain modelling parameters such as material properties. At the end of the study, maximum differences in the natural frequencies are reduced from 22% to only %5 and good agreement is found between analytical and experimental dynamic characteristics such as natural frequencies, mode shapes by model calibration.

• Structural Engineering and Mechanics
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• v.14 no.4
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• pp.417-434
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• 2002

This paper explores the possibility of using a combination of the empirical mode decomposition (EMD) and the Hilbert transform (HT), termed the Hilbert-Huang transform (HHT) method, to identify the modal damping ratios of the structure with closely spaced modal frequencies. The principle of the HHT method and the procedure of using the HHT method for modal damping ratio identification are briefly introduced first. The dynamic response of a two-degrees-of-freedom (2DOF) system under an impact load is then computed for a wide range of dynamic properties from well-separated modal frequencies to very closely spaced modal frequencies. The natural frequencies and modal damping ratios identified by the HHT method are compared with the theoretical values and those identified using the fast Fourier transform (FFT) method. The results show that the HHT method is superior to the FFT method in the identification of modal damping ratios of the structure with closely spaced modes of vibration. Finally, a 36-storey shear building with a 4-storey light appendage, having closely spaced modal frequencies and subjected to an ambient ground motion, is analyzed. The modal damping ratios identified by the HHT method in conjunction with the random decrement technique (RDT) are much better than those obtained by the FFT method. The HHT method performing in the frequency-time domain seems to be a promising tool for system identification of civil engineering structures.