• Title/Summary/Keyword: Mixture Gases

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Analysis of Electron Transport Coefficients in Binary Mixtures of TEOS Gas with Kr, Xe, He and Ne Gases for Using in Plasma Assisted Thin-film Deposition

  • Tuan, Do Anh
    • Journal of Electrical Engineering and Technology
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    • v.11 no.2
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    • pp.455-462
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    • 2016
  • The electron transport coefficients in not only pure atoms and molecules but also in the binary gas mixtures are necessary, especially on understanding quantitatively plasma phenomena and ionized gases. Electron transport coefficients (electron drift velocity, density-normalized longitudinal diffusion coefficient, and density-normalized effective ionization coefficient) in binary mixtures of TEOS gas with buffer gases such as Kr, Xe, He, and Ne gases, therefore, was analyzed and calculated by a two-term approximation of the Boltzmann equation in the E/N range (ratio of the electric field E to the neutral number density N) of 0.1 - 1000 Td (1 Td = 10−17 V.cm2). These binary gas mixtures can be considered to use as the silicon sources in many industrial applications depending on mixture ratio and particular application of gas, especially on plasma assisted thin-film deposition.

Study on Regrouping of Gray Gases in spectral WSGGM for Arbitrary Mixtures of CO2 and H2O Gases (이산화탄소-수증기 혼합가스에 대한 파장별 회색가스가중합법에서 회색가스재조합에 대한 연구)

  • Park, Won-Hee;Kim, Tae-Kuk
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.27 no.2
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    • pp.227-235
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    • 2003
  • The WSGG-based narrow band model was employed to solve the radiative transfer equations along isothermal and non-isothermal paths through $CO_2-H_2O-N_2$ gas mixtures at 1 atm. When the WSGGM is applied for arbitrary gas mixtures by considering the multiplication property of transmissivity in overlapping bands, the number of gray gases is significantly increased. To reduce the computation time, three different regrouping methods for the gray gases are tested in obtaining the mean absorption coefficient for each gray gas group. Among them, the regrouping method by minimizing the regrouping error shows the best results. For the isothermal media, 10 gray gases show fairly good agreement with the results by statistical narrow band(SNB) model which are regarded as reference solutions. For non-isothermal media, 20 gray gases show good agreement with reference solutions.

A Study on Characteristics of The $CF_3I$-Xe Mixtures gases in a Plasma Discharge Simulation (플라즈마 방전 시뮬레이션에 의한 $CF_3I$-Xe 혼합 가스에서의 물성 특성 연구)

  • Shim, Eung-Won;Tuan, Do Anh;Jeon, Byung-Hoon
    • Proceedings of the KIEE Conference
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    • 2011.07a
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    • pp.1582-1583
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    • 2011
  • Recently, it has been found that trifluoroiodomethane ( $CF_3I$) gas can replace $SF_6$ gas as a prospective substitute gas. For quantitative understanding of gas discharge phenomena, we should know electron collision cross sections and electron transport coefficients. Using electron collision cross sections of $CF_3I$ and Xe, we calculated elecron drift velocity, longitudinal coefficient, effective ionization coefficient in $CF_3I$-Xe mixtures using a two-term approximation of the Boltzmann equation. We also compared the electron transport coefficients in pure gas and those of 10%, 20%, 50%, and 70% $CF_3I$-Xe mixture gases. The present data may be showed appropriate ratios of $CF_3I$-Xe mixture gas for replacing the $SF_6$ gas.

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Hydrogen Separation from Multi-Component Mixture Gases by Pressure Swing Adsorption Process (PSA 공정을 이용한 다성분 혼합가스의 수소 분리)

  • Yang, Se-Il;Ahn, Eui-Sub;Jang, Seong-Cheol;Choi, Do-Young;Choi, Dae-Ki
    • 한국신재생에너지학회:학술대회논문집
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    • 2006.11a
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    • pp.447-450
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    • 2006
  • Hydrogen separation from multi-component mixture gases by the four-bed PSA process was studied experimentally and theoretically using layered bed of activated carbon and zeolited 5A. Effects of the adsorption time, the linear velocity on the process performance were investigated. The adsorption time and linear velocity affected the purity and recovery of the product $H_2$ purity is increases according as the adsorption time and linear velocity decrease; however, $H_2$ recovery shows an opposite phenomena to the purity. PSA process simulation studied to find optimum operation condition. In the results, 50sec adsorption time, 3cm/s linear velocity might be optimal values to obtain more than 99.999% purity and 65% recovery hydrogen.

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On-line drift compensation of a tin oxide gas sensor for identification of gas mixtures (혼합가스 식별을 위한 반도체식 가스센서의 온라인 드리프트 보상)

  • Shin, Jung-Yeop;Cho, Jeong-Hwan;Jeon, Gi-Joon
    • Proceedings of the KIEE Conference
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    • 2005.10b
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    • pp.130-132
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    • 2005
  • This paper presents two ART-based neural networks for the identification of gas mixtures subject to the drift. A fuzzy ARTMAP neural network is used for classifying $H_2S$, $NH_3$ and their mixture gases including a reference gas. The other fuzzy ART neural network is utilized to detect the drift of a tin oxide gas sensor by tracking a cluster center of the reference gas. After detecting the drift, the previous cluster center of each gas is updated as much as the drift of the reference gas. By the simulations, the proposed method is shown to compensate the drift on-line without making many categories of target gases compared with the previous studies.

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Re-determination of inelastic collision cross sections for $C_{3}F_{8}$ molecular gas in $C_{3}F_{8}-Ar$ mixture gases ($C_{3}F_{8}-Ar$혼합가스 상에서 $C_{3}F_{8}$분자가스의 비탄성단면적의 재결정)

  • Jeon, Byoung-Hoon
    • Proceedings of the KIEE Conference
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    • 2005.11a
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    • pp.21-23
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    • 2005
  • The electron transport coefficients, the electron drift velocity W, the longitudinal diffusion coefficient $ND_L$ in $C_{3}F_{8}-Ar$ mixture gases were measured by Double shutter drift tube and calculated by multi-term approximation of the Boltzmann equation over the wide E/N range from 0.03 to 100 Td. And an inelastic collision cross sections for $C_{3}F_{8}$ molecular gas were redetermined for quantitative characteristic analysis.

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Output Characteristics of KrF Excimer Laser Pumped $H_2/D_2$ Raman Laser (KrF 엑시머 레이저 펌핑 $H_2/D_2$ 라만레이저의 출력 특성)

  • 이용우
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2003.10a
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    • pp.423-427
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    • 2003
  • In this paper, we have investigated the output characteristics of the Stokes Raman laser in hydrogen, deuterium, and their mixed gases as a function of the incident pump energy and gas pressure using KrF excimer laser as pumping source for generating the differential absorption lidar (DIAL) wavelengths suitable in measuring the ozone concentration of the troposphere. The optimization results of compact excimer-Raman laser transmitter in DIAL system for the tropospheric ozone sounding at the 292 nm/319 m and 292 nm/313 nm wavelength pairs are presented. for the ozone sounding in the 4-12 km range, it has been demonstrated that the design of transmitter for DIAL lidar may be significantly simplified by the use of 292 nm/319 nm wavelength pair. The investigations of Raman scattering in the mixture of hydrogen and deuterium gases have shown that such mixture may be efficiently used for developing the multi- wavelength light sources for DIAL systems.

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Electron Transport Characteristic in $SF_6-N_2$ Mixture Gases by MCS-BEq Simulation (시뮬레이션에 의한 $SF_6-N_2$ 혼합기체의 전자수송특성)

  • Kim, Sang-Nam
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.507-508
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    • 2006
  • $SF_6$ gas is widely used in industrial of insulation field. In this paper, $N_2$ is mixed to improve pure $SF_6$ gas characteristics. Electron transport coefficients in $SF_6-N_2$ mixture gases are simulated in range of E/N values from 70 to 400 [Td] at 300K and 1 Torr by using Boltzmann equation method. The results have been obtained by using the electron collision cross sections by TOF, PT, SST sampling, compared with the experimental data determined by the other author. It also proved the reliability of the electron collision cross sections and shows the practical values of computer simulation. The result of Boltzmann equation and Monte Carlo Simulation has been compared with experimental data by Ohmori, Lucas and Carter. The swarm parameter from the swarm study are expected to sever as a critical test of current theories of low energy scattering by atoms and molecules.

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Emission Properties of Electrodeless Sulfur Lamp by Additives (화합물 첨가에 따른 무전극 황램프의 발광특성)

  • Lee, Jong-Chan;Kim, Kwang-Soo;Park, Dae-Hee;Hwang, Myung-Keun;Park, Cheol-Soon
    • Proceedings of the KIEE Conference
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    • 2002.07c
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    • pp.1890-1892
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    • 2002
  • The technology of sulfur lamps that has physical and electrical characteristics comparable to current HID source has been reported. The fundamental principles of the operation of microwave discharges that are used to convert microwave energy to broad spectrum visual light are known. In this paper, emission dependance of microwave discharges in mixture content of sulfur with noble gases was studied. It is shown that the excitation of this gaseous mixture is carried out in two phases: (l) ionization of noble gas atoms by a microwave field and (2) the consequent maintenance of slightly ionized nonequilibrium plasma by the field. These two processes have essentially various thresholds for the microwave pump. The purpose of this work is to investigate spectral properties of the high frequency discharges in a mixture sulfur vapors with noble gases.

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Miniature J-T cryocooler using argon and nitrous oxide mixture

  • Hwang, Gyu-Wan;Jeong, Sang-Kwon
    • Progress in Superconductivity and Cryogenics
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    • v.10 no.4
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    • pp.38-42
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    • 2008
  • Miniature J-T cryocooler using nitrogen or argon has been widely adopted in cooling infrared sensor for space/military application and cryosurgery. Argon or nitrogen, however, has relatively low specific cooling power compared to nitrous oxide, but the ultimate operating temperature is much lower than nitrous oxide. On the other hand, nitrous oxide has large specific cooling power, but the operating temperature is limited to its boiling point (>183K). To compromise the different characteristics of these gases, the performance of miniature J-T cryocooler using argon and nitrous oxide mixture is investigated in this paper. Three different compositions of mixture (25/75, 50/50, and 75/25 molar fraction) are blended and tested. The results are compared with the experiments of pure argon and pure nitrous oxide. The experimental results show some encouraging potentiality of mixed refrigerant J-T cryocooler. The critical clogging problem, however, was observed with argon and nitrous oxide mixture, and the lowest achievable temperature with this mixture was limited to the freezing point of nitrous oxide. The paper discusses detailed clogging process of the mixture and suggests an alternative.