• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 1997.04a
• /
• pp.970-976
• /
• 1997

The ultra-precision machining is widely used for final machining process of precision parts, so in this study, mirror surface finishing systems using the micro abrasive film, one of ultra-precision machining method, have to examine mirror surface characteristics of the cylindrical workpiece(SM45) such as surface roughness, workpiece removal and evaluated under the condition varing film feed rate, applied pressure, grinding speed after fixing other condition. It was found that varrious machining condition have significant influences on workpiece removal, surface roughness.

• Transactions of the Korean Society of Mechanical Engineers
• /
• v.14 no.6
• /
• pp.1515-1522
• /
• 1990

Ultra precision cutting should be satisfied with two conditions of Mirror Like and shape grade, and especially Mirror Like depends on surface roughness. In this study, in order to develop Mirror Cutting for Al alloy, this was done with edge form of single crystal diamond tool divided into R type and S type. Surface roughness machined by S type tool is more satisfactory than by R type tool, being the lowest value of 13.8nm. In addition, Mirror surface can reach above 90% of reflection rate by both R type and S type tool, but machined surface by R type tool has much more fine fracture portions rather than by S type tool. Even though feed rate decreases from 5.mu.m to 1.mu.m, surface roughness doesn't show improvement.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.33 no.2
• /
• pp.154-159
• /
• 2013

In this paper, the effect of bolt clamping force and form accuray of contact surface between mirror and mount on mirror surface was studied. Normally, mirror used in reflecting optical system was assembled with mount by bolts or adhesive. In this case, the tension caused by bolt clamping force or adhesive force may distort the mirror surface. Also, form accuracy error of the contact surface have a negative impact on wrenched mirror surface which assembled by bolts or adhesive. In this study, stress and distorted displacements on mirror surface were analyzed according to the different contact surface form accuracies and bolt clamping forces by using the finite element analysis method.

• Journal of Astronomy and Space Sciences
• /
• v.31 no.4
• /
• pp.341-346
• /
• 2014

A prototype of the GMT FSM has been developed to acquire and to enhance the key technology - mirror fabrication and tip-tilt actuation. The ellipsoidal off-axis mirror has been designed, analyzed, and fabricated from light-weighting to grinding, polishing, and figuring of the mirror surface. The mirror was tested by using an interferometer together with CGHs, which revealed the surface error of 13.7 nm rms in the diameter of 1030 mm. The SCOTS test was employed to independently validate the test results. It measured the surface error to be 17.4 nm rms in the diameter of 1010 mm. Both tests show the optical surface of the FSMP mirror within the required value of 20 nm rms surface error.

• Journal of the Korean Ceramic Society
• /
• v.47 no.4
• /
• pp.290-295
• /
• 2010

This study has been focused on properties of mirror surface grinding technology by ELID(Electrolytic In-process Dressing) for structural ceramics using in high precision structural parts as like semi-conductor manufacturing processes. The experimental studies have been carried out to get mirror surface for grinding of structural ceramics, SiC, $Al_2O_3$ and AlN. Grinding process of the ceramics is carried out with varying mesh type, depth of cut and feed rate using diamond wheel. The machining result of the surface roughness and condition of ground surface, have been analyzed by use of surface roughness tester, SEM, AFM and three dimensional surface profiler measurement system.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.11 no.5
• /
• pp.58-64
• /
• 2002

Mirror surface finish of Si-wafers has been achieved by rotary in-feed machining with cup-type wheels in ELID grinding. But the diameter of the workpiece is limited with the diameter of the grinding wheel in the in-feed machining method. In this study, some finding experiments by the rotary surface grinding machine with straight type wheels were conducted, by which the possible grinding area of the workpiece is independent of the diameter of the wheels. For the purpose of investigating the grinding characteristics of large scale diametrical silicon wafer, grinding conditions such as rotation speed of grinding wheels and revolution of workpieces are varied, and grinding machine used in this experiment is rotary type surface grinding m/c equipment with an ELID unit. The surface ground using the SD8000 wheels showed that mirror like surface roughness can be attained near 2~6 nm in Ra.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2001.04a
• /
• pp.946-949
• /
• 2001

Mirror surface finish of Si-wafers has been achieved by rotary in-feed machining with cup-type wheels in ELID grinding. But the diameter of the workpiece is limited with the diameter of the grinding wheel in the in-feed machining method. In this study, some grinding experiments by the rotary surface grinding machine with straight type wheels were conducted, by which the possible grinding area of the workpiece is independent of the diameter of the wheels. For the purpose of investigating the grinding characteristics of large scale diametral silicon wafer, grinding conditions such as rotation speed of grinding wheels and revolution of workpiece are varied, and grinding machine used in this experiment is rotary type surface grinding m/c equipped with an ELID unit. The surface ground using the SD8000 wheels showed that mirror like surface roughness can be attained near 2~6nm in Ra.

• Transactions of the Society of Information Storage Systems
• /
• v.1 no.2
• /
• pp.182-187
• /
• 2005

A large area micro mirror is an optical element that functions as changing an optical path by reflection in integrated optical system. We fabricated the large area silicon mirror by anisotropic etching using MEMS for implementation of integrated optical pickup. In this work, we report the optimum conditions to better fabricate and design, greatly improve mirror surface quality. To obtain mirror surface of $45^{\circ},\;9.74^{\circ}$ off-axis silicon wafer from (100) plane was used in etching condition of $80^{\circ}C$ with 40wt.% KOH solution. After wet etching, polishing process by MR fluid was applied to mirror surface for reduction of roughness. In the next step, after polymer coating on the polished Si wafer, the Si mirror was fabricated by UV curing using a trapezoid bar-type way structure. Finally, we obtained peak to valley roughness about 50 nm in large area of $mm^2$ and it is applicable to optical pickup using blu-ray wavelength as well as infrared wavelength.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.06a
• /
• pp.1522-1526
• /
• 2005

In this study, the fabrication of large area silicon mirror is accomplished by anisotropic etching using MEMS for implementation of integrated optical pickup and the process condition is also established for improving the mirror surface roughness. Until now, few results have been reported about the production of highly stepped $9.74^{\circ}$ off-axis-cut silicon wafer using wet etching. In addition rough surface of the mirror is achieved in case of long etching time. Hence a novel method called magnetorheolocal finishing is introduced to enhancing the surface quality of the mirror plane. Finally, areal peak to valley surface roughness of mirror plane is reduced about 100nm in large area of $mm^2$ and it is applicable to optical pickup using infrared wavelength.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2003.05a
• /
• pp.397-401
• /
• 2003

In this work, diamond turning process is used to produce mirror surface on a Al cone. The Al cone as used as a mirror which can reflect a laser beam without scattering and, hence, it is critical to minimize the surface roughness of a Al cone. During diamond turning, feedrate and tool nose radius are changed to investigate characteristics of the ultra precision machined surface of a Al cone. A laser beam of 633 nm is applied to examine the effect of surface roughness on the characteristics of reflectivity. It is found that surface roughness is not significantly affected by feedrate. The main factor influencing surface roughness is tool nose radius. The line patterns of reflected laser beams show that the minimum surface roughness of 0.08 $\mu\textrm{m}$ (Ra) is required to avoid scattering phenomena of reflectivity.