• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.77-77
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• 2016

Thin films synthesized by plasma processes have been widely applied in a variety of industrial sectors. The structure control of thin film is one of prime factor in most of these applications. It is well known that the structure of this film is closely associated with plasma parameters and species of plasma which are electrons, ions, radical and neutrals in plasma processes. However the precise control of structure by plasma process is still limited due to inherent complexity, reproducibility and control problems in practical implementation of plasma processing. Therefore the study on the fundamental physical properties that govern the plasmas becomes more crucial for molecular scale control of film structure and corresponding properties for new generation nano scale film materials development and application. The thin films are formed through nucleation and growth stages during thin film depostion. Such stages involve adsorption, surface diffusion, chemical binding and other atomic processes at surfaces. This requires identification, determination and quantification of the surface activity of the species in the plasma. Specifically, the ions and neutrals have kinetic energies ranging from ~ thermal up to tens of eV, which are generated by electron impact of the polyatomic precursor, gas phase reaction, and interactions with the substrate and reactor walls. The present work highlights these aspects for the controlled and low-temperature plasma enhanced chemical vapour disposition (PECVD) of Si-based films like crystalline Si (c-Si), Si-quantum dot, and sputtered crystalline C by the design and control of radicals, plasmas and the deposition energy. Additionally, there is growing demand on the low-temperature deposition process with low hydrogen content by PECVD. The deposition temperature can be reduced significantly by utilizing alternative plasma concepts to lower the reaction activation energy. Evolution in this area continues and has recently produced solutions by increasing the plasma excitation frequency from radio frequency to ultra high frequency (UHF) and in the range of microwave. In this sense, the necessity of dedicated experimental studies, diagnostics and computer modelling of process plasmas to quantify the effect of the unique chemistry and structure of the growing film by radical and plasma control is realized. Different low-temperature PECVD processes using RF, UHF, and RF/UHF hybrid plasmas along with magnetron sputtering plasmas are investigated using numerous diagnostics and film analysis tools. The broad outlook of this work also outlines some of the 'Grand Scientific Challenges' to which significant contributions from plasma nanoscience-related research can be foreseen.

• Clean Technology
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• v.20 no.4
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• pp.415-424
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• 2014

In this study, two kinds of polymer (PPQX-2hdPTZ (P1), POPQX-2hdPTZ (P2)) were synthesised by Suzuki coupling reaction based on phenothiazine derivative as electron-donor and quinoxaline derivative as electron-acceptor. Microwave synthesis workstation was used to shorten the polymerization time and increase the degree of polymerization. The physical, thermal stability, optical and electrochemical properties of the synthesized polymer were confirmed. The thermal stability of two polymers was outstanding as the initial decomposition temperature was $323-328^{\circ}C$. And additional substituted alkoxy chain on P2 showed higher degree of polymerization. An analysis of electrochemical properties, all polymer had similar HOMO energy level values. Device was fabricated by ITO/PEDOT:PSS/active layer/$BaF_2$/Al structure and photovoltaic properties were confirmed. Each device has a different film thickness and the resulting change in PCE was confirmed. As a result the thinner thickness of the film showed a high efficiency ($PCE_{max}:P1=1.0%$, P2 = 1.1%).

• Korean Chemical Engineering Research
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• v.57 no.6
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• pp.812-825
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• 2019

Two dolomite samples mined from the different mines were calcined using a batch-type microwave kiln ($950/60min^{\circ}C$) to produce $CaO{\cdot}MgO$. The hydration of the $CaO{\cdot}MgO$ samples shows different reactivity. MgO was separated by reacting with a strong acid cation exchange resin using the reactivity of the hydration properties of light dolomite ($CaO{\cdot}MgO$). Calcium ($Ca-(R-SO_3)_2$) was separated from the prepared $CaO{\cdot}MgO$ by the cation exchange resin ($CaO{\cdot}MgO:R-SO_3H=1:12mass%$). High purity MgO (higher than 94 mass %) with unburned $CaCO_3$ (1~2 mass %) was obtained by the separation process. The separated MgO was heated at $950^{\circ}C$ for 60 minutes to afford high purity MgO with MgO content higher than 96%. And High-grade $CaCO_3$ was prepared from the reaction with calcium adsorbed resin ($Ca-(R-SO_3)_2$) and NaOH, $CO_2$ gas.

• Proceedings of the Korean Ceranic Society Conference
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• 2005.06a
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• pp.1-112
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• 2005

This report is results of a research on recent R&D trends in electroceramics, mainly focusing on the papers submitted to the organizing committee of the International Conference on Electroceramics 2005 (ICE-2005) which was held at Seoul on 12-15 June 2005. About 380 electroceramics researchers attended at the ICE-2005 from 17 countries including Korea, presenting and discussing their recent results. Therefore, we can easily understand the recent research trends in the field of electroceramics by analyses of the subject and contents of the submitted papers. In addition to the analyses of the papers submitted to the ICE-2005, we also collected some informations about domestic and international research trends to help readers understand this report easily. We analysed the R&D trends on the basis of four main categories, that is, informatics electroceramics, energy and environment ceramics, processing and characterization of electroceramics, and emerging fields of electroceramics. Each main category has several sub-categories again. The informatics ceramics category includes integrated dielectrics and ferroelectrics, oxide and nitride semiconductors, photonic and optoelectronic devices, multilayer electronic ceramics and devices, microwave dielectrics and high frequency devices, and piezoelectric and MEMS applications. The energy and environment ceramics category has four sub-categories, that is, rechargable battery, hydrogen storage, fuel cells, and advanced energy conversion concepts. In the processing and characterization category, there exist domain, strain, and epitaxial dynamics and engineering sub-category, innovative processing and synthesis sub-category, nanostructured materials and nanotechnology sub- category, single crystal growth and characterization sub-category, theory and modeling sub-category. Nanocrystalline electroceramics, electroceramics for smart sensors, and bioceramics sub-categories are included to the emerging fields category. We hope that this report give an opportunity to understand the international research trend, not only to Korean ceramics researchers but also to science and technology policy researchers.

• Korean Chemical Engineering Research
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• v.59 no.3
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• pp.399-409
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• 2021

In order to utilize dolomite as a calcium/magnesium compound material, it was prepared highly reactive calcined dolomite(CaO·MgO) using a microwave kiln (950 ℃, 60 min). The experiment was performed according to the standard of the hydration test (ASTM C 110) and hydration reactivity was analyzed as medium reactivity (max 74.1 ℃, 5 min). Experiments were performed with calcined dolomite and salt (MgCl₂·6H₂O) (a) 1:1, (b) 1:1.5, and (c) 1:2 wt% based on the hydration reaction of calcined dolomite. The result of X-ray diffraction analysis confirmed that MgO of calcined dolomite increased to Mg(OH)₂ as the salt addition ratio increased. After the separating reaction, calcium was stirred at 80 ℃, 24 hr that produced CaCl₂ of white crystal. XRD results, it was confirmed calcium chloride hydrate (CaCl₂·(H₂O)x) and CaO of calcined dolomite and salt additional reaction was separated into CaCl₂. And it was synthesized with Ca(OH)₂ 99 wt% by NaOH adding reaction to the CaCl₂ solution, and the synthesized Ca(OH)₂ was manufactured CaO through the heat treatment process. In order to prepare calcium carbonate, CaCO₃ was synthesized by adding Na₂CO₃ to CaCl₂ solution, and the shape was analyzed in cubic form with a purity of 99 wt%.