• Journal of the East Asian Society of Dietary Life
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• v.20 no.5
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• pp.687-696
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• 2010

This study focused on microwave irradiation of dough, raising its temperature to monitor potential variations of dough properties and bread quality, and examined the optimum mixture ratio towards streamlining the bread-making process. According to comparison and analysis on dough properties and bread quality depending on mixture materials, it was found that Salt 2 had the highest dough temperature of all, and Salt 1 had the highest fermentation rate and specific volume but the lowest hardness (i.e. highest softness). Results of sensory evaluation, were that Salt 1.5 scored highest points in sweet taste, aftertaste, and overall acceptance, but there were significant differences among bread samples. Likewise, it was found that Fat 6 had the highest dough temperature, fermentation rate and specific volume of all. Texture analysis, showed that Fat 0 had the highest hardness of all. According to sensory characteristics, Fat 3 scored the highest points in overall acceptance. Based on these results, the optimum mixture ratio of salt and fat for microwave-irradiated bread was found to be 1.5% salt and 3% fat.

• Journal of the Korean Vacuum Society
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• v.1 no.1
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• pp.37-42
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• 1992

Abstract-The ECR(E1ectron Cyclotron Resonance) plasma etcher was developed for process of manufacturing 16M164' DRAM and applied to poly-Si etching process. The etching rate and selectivity of poly-Si were investigated by changing the process factor of pressure gas and microwave power. The increasing power of microwave will have the trend of increasing the etching rate and selectivity of Oxide, and have suitable value process pressure at 6 mTorr. The increasing value of process gas SFdSF6+ Clz will cause the decrease of etching rate and selectivity, this is because the best process factor is not found.

• Journal of Environmental Science International
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• v.17 no.5
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• pp.479-484
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• 2008

The application of microwave technology has been investigated in the remediation of diesel-contaminated soil. The paper deals with economic assessment by means of cost analysis and degradation characteristics at different microwave powers for total petroleum hydrocarbon (TPH) in diesel contaminated soils. The soils from S Mountain around the D University were sampled. The samples were screened with 2.0 mm mesh and dried for 6 hours before the diesel was added into the dried soils. The diesel-contaminated soil (3,300 mg THP/kg soil) was prepared with diesel (S Co.). The drying process was carried out in a microwave oven, a standard household appliance with a 2,450 MHz frequency and 700 W of power. The experiments were conducted from 0 to 20 minutes as the microwave powers increased from 350W to 500W to 700W. The concentrations of TPH were analysed using a gas chromatography/mass spectrometer (GC/MS). The initial concentration of TPH was 3,300 mg TPH/kg soil. The weight of contaminated soil was 200g. The concentration of TPH was decreased to 1,828 mg TPH/kg soil (44.7%), 1,347 mg TPH/kg soil (59.2%) and 1,014 mg TPH/kg soil (69.3%) at 350W, 500W and 700W for 15 minutes respectively. In addition, the curve was best fit with first order kinetics using the least-square method. The ranges of a first order rate constant k and r-square were $0.0298{\sim}0.0375min^{-1}$ and $0.9373{\sim}0.9541$ respectively.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.347.2-347.2
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• 2014

최근, 비정질 산화물 반도체 thin film transistor (TFT)는 수소화된 비정질 실리콘 TFT와 비교하여 높은 이동도와 큰 on/off 전류비, 낮은 구동 전압을 가짐으로써 빠른 속도가 요구되는 차세대 투명 디스플레이의 TFT로 많은 연구가 진행되고 있다. 한편, 기존의 Thin-Film-Transistor 제작 시 우수한 박막을 얻기 위해서는 $500^{\circ}C$ 이상의 높은 열처리 온도가 필수적이며 이는 유리 기판과 플라스틱 기판에 적용하는 것이 적합하지 않고 높은 온도에서 수 시간 동안 열처리를 수행해야 하므로 공정 시간 및 비용이 증가하게 된다는 단점이 있다. 이러한 점을 극복하기 위해 본 연구에서는 간단하고, 낮은 제조비용과 대면적의 박막 증착이 가능한 용액공정을 통하여 박막 트랜지스터를 제작하였으며 thermal 열처리와 microwave 열처리 방식에 따른 전기적 특성을 비교 및 분석하고 각 열처리 방식의 열처리 온도 및 조건을 최적화하였다. P-type bulk silicon 위에 산화막이 100 nm 형성된 기판에 spin coater을 이용하여 Al-Zn-Sn-O 박막을 형성하였다. 그리고, baking 과정으로 $180^{\circ}C$의 온도에서 10분 동안의 열처리를 실시하였다. 연속해서 Photolithography 공정과 BOE (30:1) 습식 식각 과정을 이용해 활성화 영역을 형성하여 소자를 제작하였다. 제작 된 소자는 Junctionless TFT 구조이며, 프로브 탐침을 증착 된 채널층 표면에 직접 접촉시켜 소스와 드레인 역할을 대체하여 동작시킬 수 있어 전기적 특성을 간단하고 간략화 된 공정과정으로 분석할 수 있는 장점이 있다. 열처리 조건으로는 thermal 열처리의 경우, furnace를 이용하여 $500^{\circ}C$에서 30분 동안 N2 가스 분위기에서 열처리를 실시하였고, microwave 열처리는 microwave 장비를 이용하여 각각 400 W, 600 W, 800 W, 1000 W로 15분 동안 실시하였다. 그 결과, furnace를 이용하여 열처리한 소자와 비교하여 microwave를 통해 열처리한 소자에서 subthreshold swing (SS), threshold voltage (Vth), mobility 등이 비슷한 특성을 내는 것을 확인하였다. 따라서, microwave 열처리 공정은 향후 저온 공정을 요구하는 MOSFET 제작 시의 훌륭한 대안으로 사용 될 것으로 기대된다.

• Applied Science and Convergence Technology
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• v.26 no.2
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• pp.34-41
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• 2017

A 2.45 GHz microwave plasma with linear antenna has been prepared for hydrophobic and wear-resistible surface coating of carbon steel. Wear-resistible properties are required for the surface protection of cutting tools and achieved by depositing a hydrogenated amorphous carbon film on steel surface through linear microwave plasma source that has $TE_{10}-TEM$ waveguide. Compared to the existing RF plasma source driven by 13.56 MHz, linear microwave plasma source can easily generate high density plasma and provide faster deposition rate and wider process windows. In this study, $Ar/CH_4$ gas mixtures are used for hydrogenated amorphous carbon film deposition. When microwave power of 1000 W is applied, 40 cm long uniform $Ar/CH_4$ plasma could be obtained in gas pressure of 200~400 mTorr. The Vickers hardness measurement of hydrogenated amorphous carbon film on steel surface was evaluated. It was found the optimized deposition condition at $Ar:CH_4=25:25$ sccm, 300 mTorr with microwave power of 1000W and RF bias power of 100W. By deposition of hydrogenated amorphous carbon film, contact angle on steel surfaces increases from $43.9^{\circ}$ to $93.2^{\circ}$.

• The Journal of Engineering Research
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• v.4 no.1
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• pp.93-107
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• 2002

The active carbon waste which was used in water purification plant was investigated for the improvement of capillary after microwave treatment. The variation of surface area was measured with the various kinds and amounts of active carbon. The water vapor as the activator was verified to improve the capillary but it reacted with the water contained in waste active carbon. In contrast to the water vapor, the $CO_2$ gas improved the surface area about 10-20 % compared to as received one. The best results was observed at the intensity of 2.75 kw microwave. The more effective recovery of active carbon waste was observed at the microwave treatment compared to the rotary kiln treatment. However, the mass production is so difficult in the microwave process.

• Proceedings of the Korea Society for Energy Engineering kosee Conference
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• 2001.11a
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• pp.359-366
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• 2001

• Journal of Biosystems Engineering
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• v.43 no.3
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• pp.237-246
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• 2018

Purpose: This study (a) investigated the effect of microwave power intensity and sample thickness on microwave drying characteristics of radish strips, and (b) determined the best-fit drying model for describing experimental drying data, effective moisture diffusivity ($D_{eff}$), and activation energy ($E_a$) for all drying conditions. Methods: A domestic microwave oven was modified for microwave drying and equipped with a small fan installed on the left upper side for removing water vapor during the drying process. Radishes were cut into two fixed-size strip shapes (6 and 9 mm in thickness). For drying experiments, the applied microwave power intensities ranged from 180 to 630 W at intervals of 90 W. Six drying models were evaluated to delineate the experimental drying curves of both radish strip samples. The effective moisture diffusivity ($D_{eff}$) was determined from Fick's diffusion method, and the Arrhenius equation was applied to calculate the activation energy ($E_a$). Results: The drying time was profoundly decreased as the microwave power intensity was increased regardless of the thickness of the radish strips; however, the drying rate of thicker strips was faster than that of the thinner strips up to a certain moisture content of the strip samples. The majority of the applied drying models were suitable to describe the drying characteristics of the radish strips for all drying conditions. Among the drying models, based on the model indices, the best model was the Page model. The range of estimated $D_{eff}$ for both strip samples was from $2.907{\times}10^{-9}$ to $1.215{\times}10^{-8}m^2/s$. $E_a$ for the 6- and 9-mm strips was 3.537 and 3.179 W/g, respectively. Conclusions: The microwave drying characteristics varied depending on the microwave power intensity and the thickness of the strips. In order to produce high-quality dried radish strips, the microwave power intensity should be lower than 180 W.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.65-66
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• 2009

This paper describes a procedure developed to fabricate negative photo resist SUMS to a semi-insulating (SI)-GaAs-based substrate. SU-8 is attractive for micromachine multi-layer circuit fabrication, because it is photo-polymerizable resin, leading to safe, and economical processing. This work demonstrates SUMS photo resist can be used for RFIC/MMIC application.

• Proceedings of the Materials Research Society of Korea Conference
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• 2007.11a
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• pp.147.1-147.1
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• 2007