• 제목/요약/키워드: Microwave Plasma

검색결과 398건 처리시간 0.028초

전자오븐을 이용한 간편하고 연속적인 마이크로파 발생 장치 개발 (Development of simple and continuous microwave source using a microwave oven)

  • 권기청;김재현;김정희;이효석;전상진;허승회;최원호
    • 한국진공학회지
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    • 제9권3호
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    • pp.290-295
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    • 2000
  • KAIST-TOKAMAK에서 재현성이 좋은 저항가열 플라즈마를 발생시키는데 필요한 전이온화(pre-ionization)에 응용하기 위해 2.45 GHz 마그네트론을 사용하여 간편한 마이크로파 발생장치를 개발하였다. 장치에 사용한 마그네트론은 출력 500 W, 주파수 2.45 GHz이며, 일반적인 가정용 전자오븐(microwave oven)에 사용된다. 기존의 가정용 마그네트론은 음극(cathode)과 양극(anode)사이에 걸리는 고전압이 60 Hz의 주기를 갖기 때문에 약 16ms마다 약 8 ms 동안만 주기적으로 마이크로파를 발생한다. 이 마그네트론을 사용하여 토카막 전이온화에 충분할 정도로 연속적으로 발생되는 마이크로파를 얻기 위해서 음극과 양극사이에 개량된 회로로 리플전압이 작은 DC 고전압(5 kV 1 A)을 인가하였다. 본 논문에서는 주기적으로 생성.소멸하는 ECH 플라즈마와 연속적인 ECH 플라즈마를 발생시켜 랑뮈어탐침과 광증배관(PMT)을 이용한 이온 포화전류와 $H_\alpha$/ 방출(emission)을 측정하여 마이크로파 발생장치의 특성을 조사하였다.

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주기경계를 갖는 지파 마이크로파 도파관의 연구 (A Study of Slow Wave Microwave Waveguide on Period Boundary)

  • 김원섭
    • 전기학회논문지P
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    • 제58권4호
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    • pp.461-464
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    • 2009
  • The characteristics of slow wave structure employed for backward wave oscillators expected to be a high power microwave source are studied analyytically. The slow wave structure is a sinusoidally corrugated wall waveguide. The waveguide is designed and fabricated by cast aluminun. The dispersion relation and transmitted characteristics for microwaves are measured in the air. There exist literatures on high efficiency of enhanced radiation from backward wave oscillators involving plasma studied experimentally.

마이크로파 방전에 의한 Sulfur와 NaI의 광학적 특성 (Optical Properties of Sulfur and NaI by Microwave Discharge)

  • 이종찬;황명근;박대희
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2002년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.109-111
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    • 2002
  • The fundamental principles of the operation of microwave discharges that are used to convert microwave energy to broad spectrum visual light are known. In this paper, emission dependance of microwave discharges in mixture content of sulfur with noble gases was studied. It is shown that the excitation of this gaseous mixture is carried out in two phases; (1) ionization of noble gas atoms by a microwave field and (2) the consequent maintenance of slightly ionized nonequilibrium plasma by the field. These two processes have essentially various thresholds for the microwave pump. The purpose of this work is to investigate spectral properties of the high frequency discharges in a mixture sulfur vapors with noble gases.

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OMVPE and Plasma-Assisted Doping of ZnSe with Dimethlzinc:triethylamine Adduct Source

  • 허증수;임정옥
    • 센서학회지
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    • 제5권2호
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    • pp.55-60
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    • 1996
  • The growth and microwave plasma assisted nitrogen doping of ZnSe by low pressure organometallic vapor phase epitaxy(OMVPE) has been investigated in a vertical downflow reactor equipped with a laser interferometer for in-situ growth rate measurements. Particular emphasis is placed on understanding growth characteristics of $H_{2}Se$ and the new adduct source dimethylzinc:triethyllamine($DMZn:NEt_{3}$) as compared with those obtained with $H_{2}Se$ and DMZn. At lower temperatures ($<300^{\circ}C$) and pressures(<30Torr), growth rates are higher with the adduct source and the surface morphology is improved relative to films synthesized with DMZn. Hall measurements and photoluminescence spectra of the grown films demonstrate that DMZn and $DMZn:NEt_{3}$ produce material with comparable electronic and optical properties. Microwave plasma decomposition of ammonia is investigated as a possible approach to increasing nitrogen incorporation in ZnSe and photoluminescence spectra are compared to those realized with conventional ammonia doping.

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Microwave plasma emission from tunnel-injected nonequilibrium high-Tc superconductors

  • Lee, Kie-Jin
    • 한국초전도학회:학술대회논문집
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    • 한국초전도학회 2000년도 High Temperature Superconductivity Vol.X
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    • pp.9-14
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    • 2000
  • We report on the novel nonequilibrium nlicrowave emission from quasiparticle-injected high-Tc superconductors. The phenomena have been observed for the current-injected YBCO/I/Au or BSCCO/I/Au thin-film tunnel junctions and BSCCO single-crystal intrinsic Josephson mesa junction samples. For the thin-film tunnel junctions, the emitted radiation appears as broadband. For the intrinsic BSCCO mesa samples, the radiation appears as three different modes of emissions depending on the bias point in the hysteretic current-voltage characteristics; Josephson-emission, nonequilibrium broad emission and sharp coherent microwave emission. The results were interpreted by the Josephson plasma excitation model due to quasiparticle injection.

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Development of Atmospheric Pressure Plasma Sources in KRISS

  • Tran, T.H.;You, S.J.;Kim, J.H.;Seong, D.J.;Jeong, J.R.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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    • pp.151-151
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    • 2011
  • Atmospheric-pressure plasmas are used in a variety of materials processes. The lifetime of most atmospheric-pressure plasma sources is limits by electrode erosion due to energetic ion bombardment. These drawbacks were solved recently by several microplasma sources based on microstrip structure, which are more efficient and less prone to perturbations than other microplasma sources. In this work, we propose microplasma sources based on strip line and microstrip line, developed for the generation of microplasmas even in atmospheric air and analyzes these systems with microwave field simulation via comparative study with two previous microwave sources (Microstrip Spit Ring Resonator (MSRR), Microstrip Structure Source (MSS)).

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Millimeter-wave Fast-sweep FM Reflectometry Applied to Plasma Density Profile Measurements

  • Kang, Wook-Kim
    • Journal of electromagnetic engineering and science
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    • 제1권1호
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    • pp.18-23
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    • 2001
  • A fast-sweep broadband FM reflectometer system has been successfully developed and operacted at the DIII-D tokamak, producing reliable density Profiles with excellent spatial (1 $\leq$ cm) and temporal resolution (~100 $\mu$ s). The system uses a solid-state microwave oscillator and an active quadrupler, covering full Q-band frequencies (33~50 GHz) and providing relatively high output power (20~60 mW). The system hardware allows fu11band frequency sweep in 10 $\mu$ s, but due to digitization rate limit on DIII-D, sweep time was limited to 75~100 $\mu$ s. Fast frequency sweep has helped to reduce density fluctuation effects on the reflectometer phase measurements, thus improving reliability for individual sweeps. The fast-sweep system with high spatial and temporal resolution has allowed to measure fast-changing edge density profiles during plasma ELMS and L-H transitions, thus enabling fast-time sca1e physics studies.

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PLS(Plasma Light System)의 내열방사 특성 연구 (Study on the heat-resistance characteristic for PLS(Plasma Light System))

  • 신상욱;이세현;조미령;임종민;황명근
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2004년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.293-295
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    • 2004
  • PLS(Plasma Light System) is one of the electrodeless lamp discharged by micro wave. In this new lamp has high efficacy and CRI(Color Rendering Index). It is mainly composed of microwave part and optical part. Microwave parts consist of magnetron, wave-guide and cavity-mesh, while optical parts consist of bulb, mirror and reflector. In this paper, we studied experimentally the heat-resistance and temperature distribution characteristics of bulb in PLS.

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마이크로웨이브 플라즈마와 촉매를 이용한 메탄으로부터 수소 밀 C2+ 화학원료 제조에 환한 연구 (Manufacture of Hydrogen and C2+ Chemicals from Methane using Microwave Plasma and Catalyst)

  • 조원일;백영순;김영채
    • 한국가스학회지
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    • 제5권1호
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    • pp.15-20
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    • 2001
  • 저온 마이크로웨이브 플라즈마와 촉매반응에 의한 메탄올 활성화하여 C2+ 화합물과 수소로 전환하는 반응을 고찰하였다. 금속 촉매인 Fe, Ni과 귀금속 촉매인 Pt, Pd 계열의 촉매로 본 실험을 수행하였다 메탄의 유속이 $20ml\;min^{-1}$일때 플라즈마의 출력이 증가할수록 C2+ 생성물은 29에서 $42\%$로 증가하였으며 동시에 메탄의 커플링 반응에서 발생하는 수소는 0.6에서 0.65 몰분율을 나타내었다. 촉매는 플라즈마 영역 후단에 위치하였을 때, C2+ 생성물이 일정한 수율을 나타내는 반면 에틸렌과 아세틸렌의 선택도는 향상되었다. 플라즈마 반응후 ECR 전기장과 Pd-Ni 이원촉매를 위치했을 때 최고의 C2+ 수율은 $64\%$로 관찰되었다.

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