• Journal of the Korean Chemical Society
• /
• v.43 no.4
• /
• pp.412-417
• /
• 1999

The analytical results obtained by microwave digestion and acid digestion methods for sample pretreatment to determine metal impurities in silicon wafer by inductively coupled plasma-mass spectrometry (ICP-MS) were compared. In order to decompose the silicon wafer, a mixed solution of $HNO_3$ and HF was added to the sample and the metal elements were determined after removing the silicon matrix by evaporating silicon in the form of Si-F. The recovery percentages of Ni,Cr and Fe were found to be 95∼106% for both microwave digestion and acid digestion methods. The recovery percentage of Cu obtained by the acid digestion method was higher than that obtained by the microwave digestion method. For Zn, however, the microwave digestion method gave better result than the acid digestion method. Fe was added to a silicon wafer using a spin coater. The concentration of Fe in this sample was determined by lCP-MS, and the same results were obtained in the two pretreatment methods.

• Proceedings of the Korean Magnestics Society Conference
• /
• 2003.12a
• /
• pp.90-90
• /
• 2003

• Proceedings of the Korean Vacuum Society Conference
• /
• 2009.08a
• /
• pp.75-75
• /
• 2009

• Proceedings of the Korean Ceranic Society Conference
• /
• 2003.04a
• /
• pp.95.1-95
• /
• 2003

• Proceedings of the KIEE Conference
• /
• 2015.07a
• /
• pp.1281-1282
• /
• 2015

본 논문에서는 원편광 초고주파를 이용한 무전극 플라즈마 광원 기술과 광원의 특성을 논의한다. 특히 비회전 무전극 플라즈마 광원을 Solar Simulator용 광원으로 적용하여 그 특성을 설명한다.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2003.08a
• /
• pp.170-170
• /
• 2003

• Proceedings of the Korean Vacuum Society Conference
• /
• 2003.08a
• /
• pp.204-204
• /
• 2003

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
• /
• 2001.06a
• /
• pp.327-333
• /
• 2001

DLC films due to their extreme properties have attracted a lot of attention. In this study, the films were prepared on High Speed Steel (SKH2) by microwave plasma assisted CVD method using CH4. Every friction test under the normal load 2,5N and sliding velocity of 20,25mm/s in high vacuum (5${\times}$10$\^$-5/ Torr). The films were analyzed with Raman spectroscopy. The films failed immediately in vacuum due to high friction. Wear volume of DLC coated disks decreased more than that of non-DLC coated disks. Also, hardness of the films is about 600HV.

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2009.10a
• /
• pp.142-143
• /
• 2009

Ar/$CH_4$ 마이크로웨이브 플라즈마 하에서 나노결정다이아몬드 박막의 미세구조 형성 과정에 대하여 연구하였다. 실리콘 기판 위에 불균일 핵생성을 위해 만든 스크래치 자리에 생성된 나노결정 크기의 다이아몬드 입자는 시간의 경과에 따라 성장하고 이웃하고 있는 입자들 간에 접촉이 일어나 표면을 완전히 채우게 되면 다이아몬드 박막이 형성되고 지속적인 박막 두께의 성장이 일어나게 된다. 입자들의 높이(혹은 직경)는 증착시간의 제곱근에 비례하는 것으로 나타났다.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2016.02a
• /
• pp.376-376
• /
• 2016

Poly(ethylene oxide) (PEO)/functionalized bacterial cellulose nanowhiskers (f-BCNW) (0.1 wt%) composite nanofibers were fabricated by electrospinning process and the thermomechanical properties were significantly enhanced more than the PEO and PEO/bacterial cellulose nanowhiskers (BCNW) (0.1 wt%) composite nanofibers. The functionalization of BCNW (f-BCNW) was performed by microwave plasma treatment for effects of nitrogen functionalization of chemically-driven BCNW. The N-containing functional groups of f-BCNW enhanced chemical bonding between the hydroxyl groups of the polymer chains in the PEO matrix and diameter size of PEO/f-BCNW (0.1 wt%) composite nanofibers were decreased more than PEO and PEO/BCNW (0.1 wt%) composite nanofibers on the same concentration. The strong interfacial interactions between the f-BCNW nanofillers and polymer matrix were improved the thermomechanical properties such as crystallization temperature, weight loss and glass transition temperature (Tg) compared to PEO and PEO/BCNW composites nanofibers. The results demonstrated that N2 plasma treatment of BCNW is very useful in improving thermal stability for bio-applications.