• Title/Summary/Keyword: Microwave Plasma

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A Study on the Diamond Synthesis by MPECVD using $CO-H_2$ Mixture ($CO-H_2$ 혼합 기체의 MPECVD 에 의한 다이아몬드 합성에 관한 연구)

  • Ku, Ja-Chun;Oh, Jeong-Seob;Hwang, Ki-Woong
    • Proceedings of the KIEE Conference
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    • 1989.07a
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    • pp.390-393
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    • 1989
  • Diamond is synthesized from the gaseous mixture of carbon monoxide and hydrogen by microwave PECVD. $10{\times}10mm^2$ silicon wafers are used as the substrate,and it can be raised more than $900^{\circ}C$ by microwave absorption, radiation by plasma and bombardment of ions. The changes of the morphology and the growth rates of the deposits with the experimental conditions are examined by Scanning Electron Microscopy. The d values of all the deposited films concide with those of powder diffraction data in XRD. In Raman spectra, the peak of the deposit coincides with that of the natural diamond which has a value of 1332.5 $cm^{-1}$, and the broad peak from 1360 $cm^{-1}$to 1600 $cm^{-1}$which represents the amorphous graphite was observed in the higher concentration of carbon monoxide.

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Unexpected Chemical and Thermal Stability of Surface Oxynitride of Anatase TiO2 Nanocrystals Prepared in the Afterglow of N2 Plasma

  • Jeon, Byungwook;Kim, Ansoon;Kim, Yu Kwon
    • Applied Science and Convergence Technology
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    • v.26 no.4
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    • pp.62-65
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    • 2017
  • Passivation of surface defects by the formation of chemically inert structure at the surface of $TiO_2$ nanocrystals can be potentially useful in enhancing their photocatalytic activity. In this regard, we have studied the surface chemical states of $TiO_2$ surfaces prepared by a treatment in the afterglow of $N_2$ microwave plasma using X-ray photoemission spectroscopy (XPS). We find that nitrogen is incorporated into the surface after the treatment up to a few atomic percent. Interestingly, the surface oxynitride layer is found to be chemically stable when it's in contact with water at room temperature (RT). The surface nitrogen species were also found to be thermally stable upon annealing up to $150^{\circ}C$ in the atmospheric pressure. Thus, we conclude that the treatment of oxide materials such as $TiO_2$ in the afterglow of $N_2$ plasma can be effective way to passivate the surface with nitrogen species.

Study on the Reconstruction of KSTAR Plasma Density Profiles Using Microwave Reflectometry (마이크로파 레플렉토메터리를 이용한 KSIAR 플라즈마 밀도분포 재구성에 관한 연구)

  • Roh Young-Su
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.54 no.8
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    • pp.365-370
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    • 2005
  • Microwave diagnostics have been widely utilized to measure the important parameters of high temperature and high density plasmas. Reflectometry is known as a promising microwave diagnostic which has a number of merits to measure electron density profiles. In the KSTAR device, X-mode FM reflectometry is planned to measure the plasma density profiles. FM reflectometry is required to extract phase information on raw mixer IF signals, thereby obtaining time-of-flight of reflectometry signals. It is known that the data analysis method is crucial to determine the performance of FM reflectometry In fact, there are several analysis programs which have been utilized in various FM systems. Since each program was developed for a specific device, however, it is difficult to directly apply it to a different reactor like the KSTAR device. It is necessary, therefore, to develop a data analysis program for the KSTAR FM reflectometry. In this paper, complex digital demodulation (CDM) and wavelet transformation are examined in terms of the performance of density profile reconstruction. For the comparison of both methods, FM reflectometry signals are generated on the basis of assumed profiles and the interaction of the X-mode wave and the plasma. In order to see how well both methods work under various conditions, three types of profiles are assumed and noise effects are included. As a result, both methods work well under the condition of gentle density gradient and small noise level. As density gradient becomes steeper and noise level gets higher. the reconstruction performance of wavelet is better than that of CDM.

Development and spectroscopic characteristics of the high-power wave guide He Plasma (도파관식 고출력 헬륨 플라즈마의 개발과 분광학적 특성 연구)

  • Lee, Jong-Man;Cho, Sung-Il;Woo, Jin-Chun;Pak, Yong-Nam
    • Analytical Science and Technology
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    • v.25 no.5
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    • pp.265-272
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    • 2012
  • Okamoto cavity was modified to generate high power (2.45 GHz, 2 kW) He, N2 and Ar plasmas with WR-340 waveguide. Many factors which influence to the plasma generation were optimized and investigated for the spectroscopic properties of the He plasma generated. Some of the important factors are the diameter of the inner conductor, the distance between the inner and outer conductors and the distance between the tip of the inner conductor and the torch. After optimization for the He, two torches (a commercial mini torch for ICP and a tangential flow torch made locally) were compared and showed similar results for the helium plasma gas flow of 25 L/min~30 L/min. A tall torch (extended) was used to block the air in-flow and reduced the background intensity at 340 nm region (NH band). Emission intensity was measured for determination of halogen element in the aqueous solution with power and carrier gas flow rate. Electron number density and the excitation temperature were on the order of $3.67{\times}10^{11}/cm^3$ and 4,350 K, respectively. These values are similar or a bit smaller than other microwave plasmas. It has been possible to analyze aqueous samples. The detection limit for Cl (479.45 nm) was obtained to be 116 mg/L and needs analytical optimization for the better performance.

Synthesis of size-controlled ZnO tetrapods sizes using atmospheric microwave plasma system and evaluation of its photocatalytic property (대기압 마이크로웨이브 플라즈마를 이용한 다양한 크기의 ZnO tetrapod 합성 및 광촉매 특성 평가)

  • Heo, Sung-Gyu;Jeong, Goo-Hwan
    • Journal of the Korean institute of surface engineering
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    • v.54 no.6
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    • pp.340-347
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    • 2021
  • Among various metal oxide semiconductors, ZnO has an excellent electrical, optical properties with a wide bandgap of 3.3 eV. It can be applied as a photocatalytic material due to its high absorption rate along with physical and chemical stability to UV light. In addition, it is important to control the morphology of ZnO because the size and shape of the ZnO make difference in physical properties. In this paper, we demonstrate synthesis of size-controlled ZnO tetrapods using an atmospheric pressure plasma system. A micro-sized Zn spherical powder was continuously introduced in the plume of the atmospheric plasma jet ignited with mixture of oxygen and nitrogen. The effect of plasma power and collection sites on ZnO nanostructure was investigated. After the plasma discharge for 10 min, the produced materials deposited inside the 60-cm-long quartz tube were obtained with respect to the distance from the plume. According to the SEM analysis, all the synthesized nanoparticles were found to be ZnO tetrapods ranging from 100 to 600-nm-diameter depending on both applied power and collection site. The photocatalytic efficiency was evaluated by color change of methylene blue solution using UV-Vis spectroscopy. The photocatalytic activity increased with the increase of (101) and (100) plane in ZnO tetrapods, which is caused by enhanced chemical effects of plasma process.

Novel nonequilibrium microwave emission and current-voltage characteristics of $Bi_2$$Sr_2$Ca$Cu_2$$O_{8+d}$ intrinsic Josephson junction mesas

  • Kim, Sun-Mi;Lee, Kie-Jin;Bae, Myung-Ho;Lee, Hu-Jong;Cha, Deok-Joon;Takayuki Ishibashi;Katsuaki Sato;Kim, Jin-Tae
    • Progress in Superconductivity
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    • v.4 no.2
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    • pp.104-108
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    • 2003
  • We have measured the transport properties of $Bi_2$$Sr_2$$CaCu_2$$O_{8+d}$ (BSCCO) intrinsic Josephson junction mesa. Transport measurements with current flow along the c-axis, perpendicular to the layer of mesa showed multi-branch structures on the current-voltage characteristics. For single intrinsic junctions, the microwave radiation appears in the form of three different modes of oscillations, which include Josephson emission, nonequilibrium broad emission and sharp coherent microwave emission. Mutual phase interactions between two-mesas structures of BSCCO intrinsic Josephson junctions were studied. The results were explained within the framework of the Josephson plasma excitation model due to quasiparticle injection.n.

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Fabrication of All-Nb Josephson Junction Array Using the Self-Aligning and Reactive ion Etching Technique (Self-Aligning 기술과 반응성 이온 식각 기술로 제작된 Nb 조셉슨 접합 어레이의 특성)

  • Hong, Hyun-Kwon;Kim, Kyu-Tea;Park, Se-Il;Lee, Kie-Young
    • Progress in Superconductivity
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    • v.3 no.1
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    • pp.49-55
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    • 2001
  • Josephson junction arrays were fabricated by DC magnetron sputtering, self-aligning and reactive ion etching technique. The Al native oxide, formed by thermal oxidation, was used as the tunneling barrier of Nb/$Al-A1_2$$O_3$Nb trilayer. The arrays have 2,000 Josephson junctions with the area of $14\mu\textrm{m}$ $\times$ $46\mu\textrm{m}$. The gap voltages were in the range of 2.5 ~2.6 mV and the spread of critical current was $\pm$11~14%. When operated at 70~94 ㎓, the arrays generated zero-crossing steps up to 2.1~2.4 V. To improve transmission of microwave power and prevent diffusion of oxygen into Nb ground-plane while depositing $SiO_2$dielectric, we applied a plasma nitridation process to the Nb ground-plane. The microwave power was well propagated in Josephson junction arrays with nitridation. The difference in microwave transmission 7an be interpreted by the surface impedance change depending on nitridation.

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Shear Behavior of Plasma-treated Graphite/Epoxy Laminated Composites Using Oxygen Gas (산소 플라즈마로 표면처리된 탄소섬유/에폭시 적층복합재의 전단거동)

  • Kim, Min-Ho;Rhee, Kyong-Yop;Paik, Young-Nam;Jung, Dong-Ho;Kim, Hyeon-Ju
    • Journal of the Korean Society for Precision Engineering
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    • v.25 no.9
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    • pp.103-108
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    • 2008
  • In-plane shear tests were performed to investigate the shear property change of FRP by plasma modification. Graphite/epoxy prepreg was used as a test material and plasma source was a microwave (2.4GHz) type. Plasma was induced by oxygen gas and its flow rate was kept $4{\sim}5$sccm with low vacuum state of $10^{-3}$ Torr. Prepreg was stacked unidirectionally ($[0^0]_8$) after plasma modification. Wettability was determined by measuring a contact angle. The results showed that the contact angle was decreased from $86^0$ to $45^0$ after plasma modification. Shear strength was also improved by ${\sim}10%$. SEM examination was made on the fracture surface and functional group produced by the plasma modification was investigated by XPS.