• Journal of Soil and Groundwater Environment
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• v.18 no.1
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• pp.67-77
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• 2013

To improve the energy efficiency of conventional thermal treatment, soil remediation with microwave has been studied. In this study, the remediation efficiency of contaminated soil with semi-volatile organic contaminants were evaluated with microwave oven and several additives such as water, formic acid, iron powder, sodium hydroxide (NaOH) solution, and activated carbon. For the experiment, loamy sand and sandy loam collected from Imjin river flood plain were intentionally contaminated with hexachlorobenzene and phenanthrene, respectively. The contaminated soils were treated with microwave facility and the mass removals of organic contaminants from soils were evaluated. Among additives that were added to increase the remediation efficiency, activated carbon and NaOH solution were more effective than water, iron powder, and formic acid. When 10 g of hexachlorobenzene (142.4 mg/kg-soil) or phenanthrene (2,138.8 mg/kg-soil) contaminated soil that mixed with 0.5 g iron powder, 0.5 g activated carbon and 1 ml 6.25 M NaOH solution were treated with microwave for 3 minutes, more than 95% of contaminants were removed. The degradation of hexachlorobenzene during microwave treatments with additives was confirmed by the detection of pentachlorobenzene and tetrachlorobenzene. Naphthalene and phenol were also detected as degradation products of phenanthrene during microwave treatment with additives. The results showed that adding a suitable amount of additives for microwave treatments fairly increased the efficiency of removing semi-volatile soil organic contaminants.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.206.1-206.1
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• 2015

최근에 금속산화물을 증착하는 방법으로 용액공정이 주목 받고 있다. 용액 공정은 대기압에서 매우 간단한 방법으로 복잡한 공정과정을 요구하지 않기 때문에 박막을 경제적으로 간단하게 형성할 수 있다. 하지만 용액공정을 통해 형성한 박막에는 소자의 특성을 열화 시키는 solvent와 탄소계열의 불순물을 많이 포함하고 있어 고온의 열처리가 필수적이다. 박막의 품질을 향상시키기 위해서 다양한 열처리 방법들이 이용되고 있으며, 일반적인 열처리 방법으로는 furnace를 이용한 conventional thermal annealing (CTA)이 많이 이용되고 있다. 하지만, 최근에는 microwave를 이용한 공정이 주목 받고 있다. Microwave energy는 CTA보다 효과적으로 비교적 낮은 온도에서 높은 열처리 효과를 나타낸다. 본 실험은 n-type Silicon 기판에 solution-ZrO2 산화막을 형성 후, oven baking을 한 뒤, CTA와 microwave를 이용하여 solvent와 불순물을 제거 하였다. 전기적 특성을 확인하기 위해 solution ZrO2 산화막 위에 E-beam evaporator를 이용해 Ti 금속 전극을 증착하여 Metal-Oxide-Semiconductor (MOS) capacitor를 제작하였다. 다음으로, PRECISION SEMICONDUCTOR PARAMETER ANALYZER (4156B)를 이용하여, capacitance-voltage (C-V) 특성 및 current-voltage (I-V) 특성을 비교하였다. 다음으로, CTA를 통하여 제작한 소자와 전기적 특성을 비교하였다. 그 결과, Microwave irradiation으로 열처리한 MOS capacitor 소자에서 capacitance 값과 flat band voltage, hysteresis 등이 개선되는 효과를 확인하였다. Microwave irradiation 열처리는 100oC 미만의 온도에서 공정이 이루어짐에도 불구하고 시료 내에서의 microwave 에너지의 흡수가 CTA 공정에서의 열에너지 흡수보다 훨씬 효율적으로 이루어지며, 결과적으로 ZrO2 용액의 불순물과 solvent를 낮은 온도에서 제거하여 고품질 박막 형성에 매우 효과적이라는 것을 나타낸다. 따라서, microwave irradiation 열처리 방법은 비정질 산화막이 포함되는 박막 transistor 소자 제작에 대하여 결정적인 열처리 방법이 될 것으로 기대한다.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.211.1-211.1
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• 2015

최근 용액 공정을 이용한 산화물 반도체에 대한 연구가 활발히 진행되고 있다. 넓은 밴드갭을 가지고 있는 산화물 반도체는 높은 투과율을 가지고 있어 투명 디스플레이에 적용이 가능하다. 기존의 박막 진공증착 방법은 진공상태를 유지하기 위한 장비의 가격이 비싸며, 대면적의 어려움, 높은 생산단가 등으로 생산율이 높지 않다. 하지만 용액 공정을 이용하면 대기압에서 증착이 가능하고 대면적화가 가능하다. 그리고 각각의 조성비를 조절하는 것이 가능하다. 이러한 장점에도 불구하고, 소자의 신뢰성이나 저온공정은 중요한 이슈이다. Instability는 threshold voltage (Vth)의 shift 및 on/off switching의 신뢰성과 관련된 parameter이다. 용액은 소자의 전기적 특성을 열화 시키는 수분 과 탄소계열의 불순물을 다량 포함 하고 있어 고품질의 박막을 형성하기 위해서는 고온의 열처리가 필요하다. 기존의 열처리는 고온에서 장시간 이루어지기 때문에 유리나 플라스틱, 종이 기판의 소자에서는 불가능하지만 $100^{\circ}C$ 이하의 저온 공정인 microwave를 이용하면 유리, 플라스틱, 종이 기판에서도 적용이 가능하다. 본 연구에서는 산화물 반도체 중에서 InGaZnO (IGZO)를 용액 공정으로 제작한 juctionless thin-film transistor를 제작하여 기존의 열처리를 이용하여 처리한 소자와 microwave를 이용해서 열처리한 소자의 전기적 특성을 한 달 동안 관찰 하였다. 또한 In:Zn의 비율을 고정한 후 Ga의 비율을 달리하여 특성을 비교하였다. 먼저 p-type bulk silicon 위에 SiO2 산화막이 100 nm 증착된 기판에 RCA 클리닝을 진행 하였고, solution InGaZnO 용액을 spin coating 방식으로 증착하였다. Coating 후에, solvent와 수분을 제거하기 위해서 $180^{\circ}C$에서 10분 동안 baking공정을 하였다. 이후 furnace열처리와 microwave열처리를 비교하기 위해 post-deposition-annealing (PDA)으로 furnace N2 분위기에서 $600^{\circ}C$에서 30분, microwave를 1800 W로 2분 동안 각각의 샘플에 진행하였다. 또한, HP 4156B semiconductor parameter analyzer를 이용하여 제작된 TFT의 transfer curve를 측정하였다. 그 결과, microwave 열처리한 소자의 경우 기존의 furnace 열처리 소자와 비교하여 높은 mobility, 낮은 hysteresis 값을 나타내었으며, 1달간 소자의 특성을 관찰하였을 때 microwave 열처리한 소자의 경우 전기적 특성이 거의 변하지 않는 것을 확인하였다. 따라서 향후 용액공정, 저온공정을 요구하는 소자 공정에 있어 열처리방법으로 microwave를 이용한 활용이 기대된다.

• Applied Chemistry for Engineering
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• v.16 no.3
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• pp.427-433
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• 2005

The use of the microwave-assisted process for the extraction of effective constituents from ginseng was investigated at various operating conditions. The influence of solvent (ethanol-water, 50% v/v) to ginseng ratio, particle size and applied microwave power on the efficiency of extraction was examined. The microwave extraction system used was custom manufactured so that the intensity of microwave may be varied by using anode-voltage controller. It was found that the ratio of 6 : 1 (vol/mass) gave a good extraction efficiency. Small particle size gave high yield but it caused difficulties in the separation of solvent from the sludge. The higher power was no guarantee of the efficient extraction yield. The more important factor than the employed power was the adequate temperature under sufficient contact time. Using deionized-water as swelling agent, the degree of swelling of ginseng by microwave heating and conventional heating in water-bath was also studied. It was observed that the microwave heating enhanced the swelling much more than the conventional heating. It is believed that this enhanced swelling was responsible for the rapid microwave-assisted extraction rate.

• Journal of Yeungnam Medical Science
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• v.11 no.2
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• pp.213-220
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• 1994

Damages on central nervous system induced by the exposure of microwave. However, the effects of microwave on ICP are not studied yet. The ICP affected by the condition of the brain has an significant effect on vital sign. So we investigated the changes of ICP of the rabbits after exposure. Twenty four rabbits were devided into 3 groups depending on the amount of exposure to microwave. One group was composed with 8 rabbits were exposed to microwave for 10 miniutes. Other were composed to microwave for 20 miniutes, 30 miniures, respectively. Intracranial pressure on each group were measured by subdural type ICP monitoring catheter immediately, first day, 3rd day, 5th day and 7th day after exposure of microwave. Results indicates that intracranial pressure of rabbits are not affected with statistical significance by exposure of microwave.

• Journal of the Korean Applied Science and Technology
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• v.30 no.4
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• pp.612-621
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• 2013

Microwave-assisted extraction (MAE), which is known as less time and less solvent than current extraction methods, was applied to hydrocarbons extraction from irradiated soybean. Among the transported agricultural products, soybean was selected as representative samples for possible application of irradiated treatment and identification of radiation-induced markers. Using 4 kGy-irradiated soybean, different microwave extraction conditions (extraction time and microwave power) were applied and the changes in hydrocarbon concentrations were monitored. The predicted optimum extracted condition for hydrocarbon analysis of soybean was found to be microwave extraction with a microwave power of 97 W and extraction time of 2.2 min. This extraction time was significantly lower compared to the common extraction time of 12-24hr.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.19 no.5
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• pp.556-561
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• 2008

The characteristics of microwave reflectometry, which is based on the technologies of FM radar and is applied as a non-invasive method to examine the properties including density distribution of inhomogeneous media, is investigated. The microwave reflectometry system requires not only an optimized system hardware but as well as the understanding of system response from the media under test in order to provide the system solution describing the object under test quantitatively. The introduction of microwave reflectometry especially in the area of applied plasma physics has been relatively new and the number of usage is found to be increasing gradually. The experimental method to characterize the microwave system as a device to examine the properties of plasma is explained. The microwave reflectometry signals consist of the cutoff signals which originate from the region where most of the reflected power comes from and the scattered signals which result as an interaction of the microwave and the density perturbations. This paper describes the experimental results of the scattered signal from the microwave reflectometry, such as the wavenumber dependence and the sensitivity on density perturbation, and the comparison of the characteristics with those from the numerical simulations and those from the cutoff signals.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.218.1-218.1
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• 2014

In order to measure the absolute plasma density, various probes are proposed and investigated and microwave probes are widely used for its advantages (Insensitivity to thin non-conducting material deposited by processing plasmas, High reliability, Simple process for determination of plasma density, no complicate assumptions and so forth). There are representative microwave probes such as the cutoff probe, the hairpin probe, the impedance probe, the absorption probe and the plasma transmission probe. These probes utilize the microwave interactions with the plasma-sheath and inserted structure (probe), but frequency range used by each probe and specific mechanisms for determining the plasma density for each probe are different. In the recent studies, behaviors of each microwave probe with respect to the plasma parameters of the plasma density, the pressure (the collision frequency), and the sheath width is abundant and reasonably investigated, whereas relative diagnostic characteristics of the probes by a comparative study is insufficient in spite of importance for comprehensive applications of the probes. However, experimental comparative study suffers from spatially different plasma characteristics in the same discharge chamber, a low-reproducibility of ignited plasma for an uncertainty in external discharge parameters (the power, the pressure, the flow rate and so forth), impossibility of independently control of the density, the pressure, and the sheath width as well as expensive and complicate experimental setup. In this paper, various microwave probes are simulated by finite-different time-domain simulation and the error between the input plasma density in FDTD simulations and the measured that by the unique microwave spectrums of each probe is obtained under possible conditions of plasma density, pressure, and sheath width for general low-temperature plasmas. This result shows that the each probe has an optimum applicable plasma condition and reliability of plasma density measurement using the microwave probes can be improved by the complementary use of each probe.

• Korean Journal of Food Science and Technology
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• v.25 no.5
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• pp.461-467
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• 1993

The purpose of this study was to investigate the physico-chemical properties of potato starch heated with microwave. Two types of potato starches are prepared; in group A raw potato starch was heated with microwave and in group B potato starch was isolated from potato heated with microwave. Both groups were exposed to the microwave energy in a 560 W, 2,450 MHz oven for 60, 120, 180 and 300 seconds. As the microwave heating time took longer, free lipid decreased and bound lipid increased in both groups. The shape of starch granules, birefrigence and X-ray diffraction pattern were not changed much by microwave heating in both groups. Water binding capacity increased, but amylose content, swelling power and solubility decreased as the microwave heating time took longer. It was also found that the extent of decreases in swelling power and solubility were different between group A and group B.

• Korean journal of food and cookery science
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• v.7 no.1
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• pp.53-59
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• 1991

The purpose of this study is to investigate textural characteristics of egg solution coagulated with steamer and microwave oven, and egg solution diluted various concentration of it with water or milk. Textural Characteristics of the samples were evaluated by the Sensory test and Rheometer. The results obstained were as follow; 1. Rheometer measurement indicated that the thicker is concentration of egg solution, the harder is samples 2. In sensory evaluation on the various concentration of egg solution, the panels on the overall quality showed the most favorite tendency that the sample diluted with 50% of water and the one with 70% of milk in use steamer; the sample diluted with 30% of water and the one with 70% of milk in use microwave oven.