• JSTS:Journal of Semiconductor Technology and Science
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• v.2 no.4
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• pp.253-258
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• 2002

This paper reports the design, modeling, fabrication and measurement of passive microvalves, which are applicable to glaucoma implants. The proposed microvalves were designed using fluidic theory. The microvalves consisted of microchannels and chambers. The microchannels had a constant fluidic resistance generating a pressure difference. Six kinds of microvalves were designed using fluidic equations for laminar flow and fabricated to examine the influences of chamber size, channel length and the shape of channel cross section. The pressure difference between the designed microvalve and the fabricated microvalve was measured to be less than 4%.