• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1499_1500
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• 2009

In this paper, we present a simple fabrication process for sloped electrodes in 2-degree of fredom(DOF) scanning micromirror employing pholydimethylsiloxane(PDMS). Using this process, quasi-conic figure electrode is successfully fabricated on the substrate. Simulation results show sloped electrodes decrease actuation voltage down to 22% compared with parallel plate type of electrodes having the same electrode area.

• 한국정보통신설비학회:학술대회논문집
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• 2003.08a
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• pp.93-95
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• 2003

We have designed and fabricated a micromirror array using single crystalline silicon (SCS) for data communication applications. The mirror array has $16{\times}16$ micromirrors and each mirror has $120{\mu}m{\times}100{\mu}m$ reflective surface. Electrostatic force was adopted as a driving mechanism. The spring dimensions were determined using relationship between spring dimensions and driving voltage. The designed tilting angle was $9.6^{\circ}$, and measured tilting angle according to applied voltages were experimented. The response time was measured using He-Ne laser and position sensitive diode (PSD), and lifetime was checked for reliability proof.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.132-137
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• 2003

For the evaluation of acoustic noise of a DLP projector, vibration and sound characteristics of a DLP projector were studied. The acoustic noise of DLP projector could be classified into three categories, that is, the direct noise from a body of rotation, the air-bone noise generated from turbulence or vortex occurred during cooling process and the structural born noise produced by vibrating elements. Cooling fans and color filter wheel which rotates at 9000 rpm are main causes of acoustic noise induced in DLP projector. Since the structure of an optical module in a DLP projector can be excited by the excessive vibration of a color filter wheel, the structural design for anti-vibration should be considered. To make a reduction of overall acoustic noise, the anti-vibration design and the enclosing structure have been studied and applied to a color filter wheel.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2257-2259
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• 2000

This paper reports on the design, fabrication and driving experiment of micro mirror array(MMA) for lithography process to apply to biochip fabrication Photolithography technology is applied to activate specific area on the surface of modified glass surface, DNA monomers are bound on the activated area of the glass surface. After repeat of DNA monomer synthesizing process, DNA single strand probes could be solid-synthesized on the glass substrate. Without using photomask, photolithography process is tried using micro mirror array(MMA). Photomask or mask alignment is not required in maskless photolithography process using micro mirror array.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.8 no.2
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• pp.163-168
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• 2015

The conventional simple-injection and unilateral-learning methods have the great disadvantages in special education outcomes for intellectual disabilities student. In this paper, we propose a digital micro-mirror system that learners themselves can manipulate the contents by using the various technology on user-interaction and augmented reality. Through the verification tests conducted by special education professionals, it is confirmed that the proposed commercial system can be used as a useful system in the special learning fields requiring high immersion.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.1530-1531
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• 2007

본 논문은 미러 표면에 형성된 코일과 미러 양쪽에 위치한 영구자석간의 전자기력에 의해 구동되는 마이크로미러의 설계 및 결과를 나타낸다. $4mm\;{\times}\;4mm$ 크기를 갖는 미러의 전자기 특성 및 구동을 유한요소해석 프로그램인 COMSOL Multiphysics를 이용하여 시뮬레이션 하였다. 4 kHz의 공진주파수 특성을 갖도록 설계된 마이크로미러는 코일에 $3.6\;A/mm^2$의 current density 적용 시 x-, y-axis displacement가 각각 $1.2{\mu}m$, $12{\mu}m$가 되는 것으로 나타났다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.514-517
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• 2005

Microstereolithography(MSL) has evolved from the stereolithography technique, and is also based on a light-induced layer-stacking fabrication. Although integral MSL allows the manufacture of a complete layer by one irradiation only, there is a problem related with shape precision due to the light-intensity distribution of focused image. In this study, we developed the integral MSL apparatus using Digital Micromirror Device ($DMD^{TM})$, Texas Instruments) as dynamic pattern generator. It is composed of Xenon-Mecury lamp, optical devices, pattern generator, precision stage, controllers and the control program. Also, we have studied curing depth and width of photocurable resin according to the change of exposure energy.

• Proceedings of the Korean Society of Broadcast Engineers Conference
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• fall
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• pp.49-50
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• 2021

본 논문에서는 홀로그래픽 영상을 시간 다중화 방식으로 구현한 360 도 홀로그래픽 테이블탑 디스플레이에 대해서 설명한다. 공간 다중화 방식의 경우 필요한 광학 소자의 수와 정렬 난이도를 시간 다중화 방식을 이용하여 해결하고, 홀로그래픽 영상을 재생하기 위하여 푸리에 변환 광학 소자를 추가하여 부드러운 운동 시차를 갖는 형태로 구현한다. 설계된 홀로그래픽 테이블탑 디스플레이는 풀-컬러 영상을 재생하기 위해서 총 3 개의 고속 구동이 가능한 DMD(Digital micromirror device)를 정렬하는 라이트 엔진 구조를 갖고 있다.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.05a
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• pp.463-466
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• 2005

While recent display devices are becoming light and slim, the size of a screen is especially the important issue in the field of display devices. Furthermore, it is also required that the projection TV, a large screen display device, be able to represent higher resolutions as the digital broadcasting is set off. In order to realize high resolutions in a DLP projection TV, the number of pixel on DMD should be increased. However, a large number of pixels make it difficult to realize resulting small sized pixels and this cause the increase in cost. Therefore, we propose a simple and improved pixel enhancement actuator using the existing DMD by offsetting half pixels repeatedly in the vertical direction.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1198-1201
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• 2005

A new foxtail actuator driven by V-shape beam deflection using electrostatic force has been designed, fabricated and characterized for nano-resolution manipulators. The proposed foxtail mechanism was implemented using a pair of electrostatic actuators and a pair of holding actuators, which was analyzed based on the electromechanically coupled motion of voltage - displacement relation. The proposed actuator was fabricated onto Silicon-on-Insulator (SOI) wafer and its stepping characteristics were measured by micro optical interferometer consisting of integrated micromirror and optical fiber. The fabricated foxtail microactuator was successfully operated from 1nm to 76nm, and the magnitude of step displacement was controllable up from 26nm/cycles to 53nm/cycle by changing the voltage.