• Journal of the Optical Society of Korea
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• v.7 no.3
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• pp.166-173
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• 2003

This paper presents micromachining results on planar-lightwave-circuit (PLC) chips with Si substrate and the quartz substrate by using Ti:Sapphire femtosecond-pulsed laser. The ablation process with femtosecond laser pulses generates nothing of contamination, molten zone, microcracks, shock wave, delamination and recast layer. We also showed that the micromachine for PLC using femtosecond pulsed lasers is superior to that using nanosecond pulsed lasers. The insertion loss and the optical return loss of the 1 ${\times}$ 8 optical power splitters packaged with micromachined input- and output-port U-grooves were less than 11.0 ㏈ and more than 55 ㏈, respectively. The wavelength dependent loss (WDL) was distributed within $\pm$0.6 ㏈ and the polarization dependent loss (PDL) was less than 0.2 ㏈.

• Journal of Sensor Science and Technology
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• v.5 no.2
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• pp.1-8
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• 1996

In this paper, We have designed silicon pressure sensor with center-bossed diaphragm which improving sensitivity and linearity by reducing diaphragm deflection. Designed center-bossed pressure sensor showed maximum deflection of $0.125{\mu}m$, maximum stress of $2.24{\times}10^7 Pa$ and sensitivity of 27.67 mV/V.psii. As a result, diaphragm deflection was reduced to 1/160 that of diaphragm thickness and 1/35 that of square diaphragm. Also, sensitivity was increased 19 times compared to square diaphragm.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.12
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• pp.236-243
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• 1998

퍼지 이론과 계산기하학적 수법에 의한 자동요소 생성법, 해석코드 및 상용 솔리드 모델러를 유기적으로 통합한 자동화된 설계시스템을 개발하였다. 본 시스템은 여러 가지 복합현상과 관련된 실제 구조물에 대한 설계기능을 갖고 있다. 정전장 해석, 변형해석 및 모드해석 등과 같은 해석하고자 하는 물리적인 현상에 의존한 형상모델이 자동적으로 유한요소모델로 변환되어 해석을 수행한다. 또한 신경망의 기능을 도입, 통합시킴으로써 설계해의 영역을 유용하게 제시하여 준다. 개발한 시스템은 정전 마이크로머쉰의 성능 평가에 적용하여 그 효용성을 검증하였다.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2004.05a
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• pp.245-249
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• 2004

Transparent materials such as fused silica are important materials in optical and optoelectronics field because of its outstanding properties, such as transparency in a wide wavelength range, strong damage resistance for laser irradiation, and high thermal and chemical stability. However, these properties make it difficult to micromachine silica in micro-sized quantities. In this study, we fabricated a micro patterns on the surface of fused silica plate using laser induced wet etching. KrF excimer laser was used as a light source. There were no burrs and micro cracks on the etched surface of fused silica and the flatness of the etched surface was fairly good. We investigated the influence of etchant upon the etch rate and quality in laser induced wet etching. Pyrene-acetone, toluene, and pyrene-toluene solution were used as etchant. In the side of etch rate, toluene and pyrene-toluene solution were better than pyrene-acetone solution.

• Transactions of Materials Processing
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• v.15 no.9 s.90
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• pp.686-691
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• 2006

Powder blasting technique was introduced to micromachine the micro patterns of circular and rectangular shape in LGP mould. The machinability of these patterns and matt treatment by powder blasting were verified. Then a prototype of LGP was injected by the developed LGP mould with micro patterns. Shape analysis of micro patterns and performance test of the injected LGP were carried out. The results showed printless LGP with micro patterns could be produced by just single injection using the mould with micro patterns, and powder blasting technique could be successfully applied to micrornachining of micro patterns and matt treatment of LGP mould.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.5
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• pp.1363-1371
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• 1996

This paper presents the design, fabrication, and testing of polysilicon electrostatic microactuators that resonate in the direction parallel to the silicon susbstrates. A set of six different designs has been developed using a theoretical model and design formulae developed for the mocroactuators. Microactuator prototypes are fabricated from a 2.1 $\mu{m}$-thick LPCVD polysilicon film, using a 4-mask surface-micromachining process. The prototypes are tested under a d.c. bias voltage of 45V with an a.c. drive voltage amplitude of 20 v.Measured resorant frequencies are in the ranges of 40-60 kHz, showing a good agreement to their theoretical estimates within error bounds of .$\pm$.5%. Important issues inthe design and microfabrication of the microactuators are discussed, together with potential applicaitons of the key technology involved.

• International Journal of Precision Engineering and Manufacturing
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• v.3 no.1
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• pp.43-48
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• 2002

This paper describes an automated computer-aided engineering (CAE) system for three-dimensional structures. An automatic finite element mesh-generation technique, which is based on fuzzy knowledge processing and computational geometry techniques, is incorporated into the system, together with a commercial FE analysis code, and a commercial solid modeler. The system allows a geometry model of interest to be automatically converted to different FE models, depending on the physical phenomena of the structures to be analyzed, i.e., electrostatic analysis, stress analysis, modal analysis, and so on. Also, with the aid of multilayer neural networks, the present system allows us to obtain automatically a design window in which a number of satisfactory design solutions exist in a multi-dimensional design parameter space. The developed CAE system is successfully applied to evaluate an electrostatic micromachines.

• Transactions of Materials Processing
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• v.13 no.2
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• pp.168-173
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• 2004

Microforming can be a good application for bulk metallic glasses. It is important to simulate the deformation behaviour of the bulk metallic glasses in a supercooled liquid region for manufacturing micromachine parts. For these purposes, a correct constitutive model which can reproduce viscosity results is essential for good predicting capability. In this paper, we studied deformation behaviour of the bulk metallic glasses using the finite element method in conjunction with the fictive stress constitutive model which can describe non-Newtonian as well as Newtonian behaviour. A combination of kinetic equation which describes the mechanical response of the bulk metallic glasses at a given temperature and evolution equations fur internal variables provide the constitutive equation of the fictive stress model. The internal variables are associated with fictive stress and relation time. The model has a modular structure and can be adjusted to describe a particular type of microforming process. Implementation of the model into the MARC software has shown its versatility and good predictive capability.

• Journal of Sensor Science and Technology
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• v.14 no.5
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• pp.357-361
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• 2005

Low-stress silicon nitride (LSN) thin films with embedded metal line have been developed as free standing structures to keep microspheres in proper locations and localized heat source for application to a chip-based sensor array for the simultaneous and near-real-time detection of multiple analytes in solution. The LSN film has been utilized as a structural material as well as a hard mask layer for wet anisotropic etching of silicon. The LSN was deposited by LPCVD (Low Pressure Chemical Vapor Deposition) process by varing the ratio of source gas flows. The residual stress of the LSN film was measured by laser curvature method. The residual stress of the LSN film is 6 times lower than that of the stoichiometric silicon nitride film. The test results showed that not only the LSN film but also the stack of LSN layers with embedded metal line could stand without notable deflection.

• Journal of the Korea Society for Simulation
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• v.5 no.1
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• pp.29-29
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• 1996

This paper describes a new automated simulation system for micromachines whose size range $10^{-6}$ to $10^{-3}$ m. An automic finite element (FE) mesh generation technique, which is bases on the fuzzy knowledge processing and computation al geometry technique, is incorporated into the system, together with one of commerical FE analysis codes, MARC, and one of commerical solid modelers, Designbase. The system allows a geometry model of concern to be automatically converted to different FE models, depending on physical phenomena of micromachines to be analyzed, i,e. electrostatic analysis, stress analysis, modal analysis and so on. The FE models are then automatically analyzed using the FE analysis code. Among a whole process of analysis, the definition of a geometry model, the designation of local node patterns and the assignment of material properties and boundary conditions onto the geometry model are only the interactive process to be done by a user. The interactive operations can be processed in a few minutes. The other processes which are time consuming and labour-intensive in conventional CAE systems are fully automatically performed in a popular engineering workstation environment. This automated simulation system is successfully applied to evaluate an electrostatic micro wobble actuator.