• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.463-467
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• 2004

This paper presents the fabrication possibility of the micro actuator which uses a micro-thermal bubble, generated b micro-heater under pulse heating. The valve-less micropump using the diffuser/nozzle is consists of the lower plate, he middle plate, the upper plate. The lower plate includes the channel and chamber are fabricated on high processability silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The middle plate includes the chamber and diaphragm d the upper plate is the micro-heater. The Micropump is fabricated by bonding process of the three layer. This paper resented the possibility of the PCR chip operation by the fabricated micropump.

• Korean Journal of Metals and Materials
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• v.48 no.7
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• pp.630-638
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• 2010

The present investigation has been performed on the mixing behavior and microstructural development during fabrication of Fe micro-nano powder feedstock for a micro-powder injection molding process. The mixing experiment using a screw type blender system was conducted to measure the variations of torque and temperature during mixing of Fe powder-binder feedstock with progressive powder loading for various nano-powder compositions up to 25%. It was found that the torque and the temperature required in the mixing of feedstock increased proportionally with increasing cumulative powder loading. Such an increment was larger in the feedstock containing higher content of nano-powder at the same powder loading condition. However, the maximum value was obtained at the nano-powder composition of not 25% but 10%. It was owing to the 'roller bearing effect' of agglomerate type nano-powder acting as lubricant during mixing, consequently leading to the rearrangement of micro-nano powder in the feedstock. It is concluded that the improvement of packing density by rearrangement of nano-powders into interstices of micro-powders is responsible for the maximum powder loading of about 71 vol.% in the nano-powder composition of 25%.