• 한국산학기술학회논문지
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• 제6권2호
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• pp.165-171
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• 2005

초음파 모터는 전자기식 모터들과는 달리 다양한 특징과 뛰어난 성능을 가진 새로운 형태의 모터이다. 그러나, 초음파 모터는 특히 구동시간에 따라 시스템의 비선형적인 특성과 파라미터의 변화들에 대한 문제를 갖는다. 그러므로 기존의 PID제어기를 사용함으로써 만족스러운 제어기의 성능을 내기가 어렵다. 본 논문에서는 원환형 초음파 모터와 선형 초음파 모터의 정밀 제어를 하기 위해 구동시간에 따른 응답 시간과 변화 등의 특성을 각각 분석하고, 리니어 초음파 모터에 대해서는 ${\mu}m$정도의 오차를 갖는 스텝 제어기와 PD제어기를 결합한 제어기를 제안한다. 제안된 제어기의 성능은 제어를 하지 않고 구동 시에 측정된 슬립 오차와 제안된 제어기를 사용하여 구동 시 측정된 슬립 오차를 비교하여 평가하였다. 실험 결과 스텝 제어기를 사용한 리니어 초음파 모터의 슬립오차는 $10{\mu}m$이하로 우수한 성능을 입증하였다.

• Journal of Welding and Joining
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• 제28권5호
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• pp.51-57
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• 2010

Brittle microstructure created in a heat affected zone (HAZ) during the welding of low alloy steel can be eliminated by post-weld heat treatment (PWHT). If the PWHT is not possible during a repair welding, the controlled bead depositions of multi-pass welding should be applied to obtain tempering effect on the HAZ without PWHT. In order to anticipate and control the tempering effect during the temper bead welding, the definition of temperature curve obtained from the analytical solution was suggested in this research. Because the analytical solution for heat flow is expressed as a mathematical equation of weld parameters, it may be effective in anticipating the effect of each weld parameter on the tempering in HAZ during the successive bead depositions. The reheating effect by the successive bead layer on the brittle coarse grained HAZ formed by earlier bead deposition was estimated by comparing the overlapped distance between the temperature curves in the HAZ. Three layered weld specimens of SA508 base metal with A52 filler were prepared by controlling heat input ratio between layers. The tempering effect anticipated by using the overlapped distance between the temperature curves was verified by measuring the micro-hardness distribution in the HAZ of prepared specimens. The temperature curve obtained from analytical solution was expected as a good tool to find optimal temper bead welding conditions.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.68-68
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• 2011

As feature size is smaller, new technology are needed in semiconductor factory such as gap-fill technology for sub 100nm, development of ALD equipment for Cu barrier/seed, oxide trench etcher technology for 25 nm and beyond, development of high throughput Cu CMP equipment for 30nm and development of poly etcher for 25 nm and so on. We are focus on gap-fill technology for sub-30nm. There are many problems, which are leaning, over-hang, void, micro-pore, delaminate, thickness limitation, squeeze-in, squeeze-out and thinning phenomenon in sub-30 nm gap fill. New gap-fill processes, which are viscous oxide-SOD (spin on dielectric), O3-TEOS, NF3 Based HDP and Flowable oxide have been attempting to overcome these problems. Some groups investigated SOD process. Because gap-fill performance of SOD is best and process parameter is simple. Nevertheless these advantages, SOD processes have some problems. First, material cost is high. Second, density of SOD is too low. Therefore annealing and curing process certainly necessary to get hard density film. On the other hand, film density by Flowable oxide process is higher than film density by SOD process. Therefore, we are focus on Flowable oxide. In this work, dielectric film were deposited by PECVD with TSA(Trisilylamine - N(SiH3)3) and NH3. To get flow-ability, the effect of plasma treatment was investigated as function of O2 plasma power. QMS (quadruple mass spectrometry) and FTIR was used to analysis mechanism. Gap-filling performance and flow ability was confirmed by various patterns.

• 한국해안해양공학회지
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• 제10권4호
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• pp.165-173
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• 1998

파고와 주기 그리고 수심의 함수로 정의된 이류계수를 파고와 주기에 대한 결합분포함수와 확률적으로 결합하여 수중둔덕의 이동율을 예측할 수 있는 해석해를 유도하였다. 파랑의 비선형성에 의하여 유발되는 하상에서의 흐름이 표사의 이동을 유발한다는 가정하에 개념적 모형의 표사이동량 방정식을 사용하였다. 표사보존식에 표사이동량을 대입하여 시간에 따른 해저면의 변동을 나타내는 비선형 이류-확산 방정식을 얻을 수 있었다. 해석해에 의하면 수심이 증가할 수록 수중둔덕의 이동율은 지수적으로 감소하는 경향을 보였다. 그러나 스펙트럼에서 주파수 영역의 폭을 정의하는 계수, v의 값이 커지면 수중둔덕의 이동율은 증가하였다. 해석해에 의하여 예측된 수중둔덕의 이동율은 관측자료보다 과대평가하는 경향을 나타내나, 해석해를 유도하는 과정에 내포된 이론식의 제약성 및 입력자료의 부정확성 등을 고려할 때 전반적으로 해석해의 결과는 관측자료와 잘\ulcorner 일치한다고 볼 수 있다. 특히, 수심의 변화에 따른 해석해의 거동은 대상영역 외해에서 추정된 자료를 이용하여 이산화 기법으로 추정된 결과와 매우 잘 일치하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.163-166
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• 2002

We investigated structural and electrical properties of Metal-Oxide-Semiconductor(MOS) structure using Hafnium $oxide(HfO_{2})$ as high-k gate dielectric material. $HfO_{2}$ films are ultrathin gate dielectric material witch have a thickness less than 2.0nm， so it is spotlighted to be substituted $SiO_{2}$ as gate dielectric material. In this paper We have grown $HfO_{2}$ films with pt electrode on P-type Silicon substrate by RF magnetron sputtering system using $HfO_{2}$ target and oserved the property of semiconductor-oxide interface. Using pt electrode, it is necessary to be annealed at ${300^{\circ}C}$. This process is to increase an adhesion ratio between $HfO_{2}$ films with pt electrode. In film deposition process, the deposition time of $HfO_{2}$ films is an important parameter. Structura1 properties are invetigated by AES depth profile, and electrical properties by Capacitance-Voltage characteristic. Interface trap density are measured to observe the interface between $HfO_{2}$ with Si using High-frequency(1MHz) C-V and Quasi - static C-V characteristic.

• 한국터널지하공간학회 논문집
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• 제20권4호
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• pp.687-699
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• 2018

해저터널의 시공은 육상터널의 시공과 몇 가지 다른 부분이 존재하는데 지하수 이외에 해수가 존재하여 고수압을 받으며, 시공 중 지반보강이 육상터널보다 매우 어려운 점 등이 대표적이다. 그러므로 해저터널 시공 시 시공트러블 발생의 예방은 매우 중요하다. 본 고에서는 서해안 해저 약 60 m에 시공한 소형 슬러리 TBM의 굴진 성능을 분석하기 위하여 대상 지반의 지질학적 특성들과 기계적 특성들을 DB로 구축하였다. 구축한 DB 중 추력, 토크 및 RPM 등이 순굴진율에 주는 영향을 확인하고자 각 변수들 간의 상관분석을 실시하였다. 또한 구축된 DB로부터 비에너지와 FPI와의 상관관계를 분석하고 순 굴진율을 예측할 수 있는 경험식을 제시하였다.

• Smart Structures and Systems
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• 제26권3호
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• pp.331-343
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• 2020

In this paper, based on the CPT, motion equations for a sandwich plate containing a core and two integrated face-sheets have derived. The structure rests on the Visco-Pasternak foundation, which includes normal and shear modules. The piezo-magnetic core is made of CoFe₂O₄ and also is subjected to 3D magnetic potential. Two face sheets at top and bottom of the core are under electrical fields. Also, in order to obtain more accuracy, the effect of flexoelectricity has took into account at face sheets' relations in this work. Flexoelectricity is a property of all insulators whereby they polarize when subject to an inhomogeneous deformation. This property plays a crucial role in small-scale rather than macro scale. Employing CPT, Hamilton's principle, flexoelectricity considerations, the governing equations are derived and then solved analytically. By present work a detailed numerical study is obtained based on Piezoelectricity, Flexoelectricity and modified couple stress theories to indicate the significant effect of length scale parameter, shear correction factor, aspect and thickness ratios and boundary conditions on natural frequency of sandwich plates. Also, the figures show that there is an excellent agreement between present study and previous researches. These finding can be used for automotive industries, aircrafts, marine vessels and building industries.

• Smart Structures and Systems
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• 제20권6호
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• pp.709-728
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• 2017

This disquisition proposes a nonlocal strain gradient beam theory for thermo-mechanical dynamic characteristics of embedded smart shear deformable curved piezoelectric nanobeams made of porous electro-elastic functionally graded materials by using an analytical method. Electro-elastic properties of embedded curved porous FG nanobeam are assumed to be temperature-dependent and vary through the thickness direction of beam according to the power-law which is modified to approximate material properties for even distributions of porosities. It is perceived that during manufacturing of functionally graded materials (FGMs) porosities and micro-voids can be occurred inside the material. Since variation of pores along the thickness direction influences the mechanical and physical properties, so in this study thermo-mechanical vibration analysis of curve FG piezoelectric nanobeam by considering the effect of these imperfections is performed. Nonlocal strain gradient elasticity theory is utilized to consider the size effects in which the stress for not only the nonlocal stress field but also the strain gradients stress field. The governing equations and related boundary condition of embedded smart curved porous FG nanobeam subjected to thermal and electric field are derived via the energy method based on Timoshenko beam theory. An analytical Navier solution procedure is utilized to achieve the natural frequencies of porous FG curved piezoelectric nanobeam resting on Winkler and Pasternak foundation. The results for simpler states are confirmed with known data in the literature. The effects of various parameters such as nonlocality parameter, electric voltage, coefficient of porosity, elastic foundation parameters, thermal effect, gradient index, strain gradient, elastic opening angle and slenderness ratio on the natural frequency of embedded curved FG porous piezoelectric nanobeam are successfully discussed. It is concluded that these parameters play important roles on the dynamic behavior of porous FG curved nanobeam. Presented numerical results can serve as benchmarks for future analyses of curve FG nanobeam with porosity phases.

• 대한의용생체공학회:의공학회지
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• 제29권3호
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• pp.212-221
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• 2008

The total hip replacement (THR) has been used as the most effective way to restore the function of damaged hip joint. However, various factors have caused some side effects after the THR. Unfortunately, the success of the THR have been decided only by the proficiency of surgeons so far. Hence, It is necessary to find the way to minimize the side effect caused by those factors. The purpose of this study was to suggest the definite data, which can be used to design and choose the optimal hip implant. Using finite element analysis (FEA), the biomechanical condition of bone cement was evaluated. Stress patterns were analyzed in three conditions: cement mantle, procimal femur and stem-cement contact surface. Additionally, micro-motion was analyzed in the stem-cement contact surface. The 3-D femur model was reconstructed from 2-D computerized tomography (CT) images. Raw CT images were preprocessed by image processing technique (i.e. edge detection). In this study, automated edge detection system was created by MATLAB coding for effective and rapid image processing. The 3-D femur model was reconstructed based on anatomical parameters. The stem shape was designed using that parameters. The analysis of the finite element models was performed with the variation of parameters. The biomechanical influence of each parameter was analyzed and derived optimal parameters. Moreover, the results of FE A using commercial stem model (Zimmer's V erSys) were similar to the results of stem model that was used in this study. Through the study, the improved designs and optimal factors for clinical application were suggested. We expect that the results can suggest solutions to minimize various side effects.

• 생태와환경
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• 제36권2호통권103호
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• pp.117-123
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• 2003

러시아의 바이칼 호수에서의 식물성 플랑크톤을 함유한 mesocosm 실험, 물벼룩(Daphnia magna)과 클로렐라(Chlorella vulgaris)를 함유한 microcoms 실험 결과에 따르면 펩톤, 디젤오일, odiphenol 및 $CdCl_2$을 mesocosm에 첨가하였을 때, 또 페놀, $CoCl_2$및 $CuSO_4$를 microcosm에 첨가함에 따라 구조 엑서지 (structrural exergy)가 감소하였다. 오염된 지역의 수계 생태계에서는 각 구성성분의 생물량과 총 생물량의 변화 보다는 구조 엑서지의 변화가 훨씬 컸다. 또, 바이칼 호수 주변의 Baikalsk Pulp and Paper Combine으로부터 나오는 배출수의 영향을 받는 지역과 청정지역의 benthos의 엑서지를 비교해 보면, 오염된 지역에서 군집의 구조 엑서지가 급격히 감소하였다. 이러한 결과는 구조 엑서지가 생태계의 건강성을 반영하는 척도로서 이용될 수 있음을 보여주는 것이다.