• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.10
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• pp.1039-1045
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• 2007

Ultrasonic machining (USM) is suitable for machining hard, brittle and non-conductive materials such as silicon, glass and ceramics. Usually, when micro holes are machined on glass by USM, roundness of hole entrance is poor and cracks appear around the hole exit. In this paper the machining characteristics were studied for roundness improvement and exit crack prevention. From experiments, the tool bending and the shape of tool tip affect hole roundness. When the tool tip is hemispherical, good roundness of holes was obtained. The feedrate and the rotational speed of the tool affect the exit crack. With the machining conditions of 150 rpm in spindle speed and $0.5\;{\mu}m/s$ in feedrate, micro holes with less than $100\;{\mu}m$ in diameter were machined without an exit crack.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.482-486
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• 2004

The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its use in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies, such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries. This paper presents that the recent development and our research goals in FIB nano machining technology are given. The emphasis will be on direct milling, or chemical vapor deposition techniques (CVD), and this can distinguish the FIB technology from the contemporary photolithography process and provide a vital alternative to it. After an introduction to the technology and its FIB principles, the recent developments in using milling or deposition techniques for making various high-quality devices and high-precision components at the micro/nano meter scale are examined and discussed. Finally, conclusions are presented to summarize the recent work and to suggest the areas for improving the FIB milling technology and for studying our future research.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.11 s.176
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• pp.159-164
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• 2005

For increasing productivity of micro electrochemical machining (MECM), the application of multiple electrodes was introduced. The electrodes were fabricated by reverse electrical discharge machining (REDM). By REDM micro electrodes with various shapes can be machined easily. According to capacitance and applied voltage, machining characteristics of reverse EDM were investigated and the optimal conditions for stable machining were suggested. By using multiple electrodes and a channel-shape electrode, holes and channels were machined on stainless steel by ECM.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.10 no.6
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• pp.95-101
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• 2011

Micro-abrasive jet machining(${\mu}AJM$) using mask is a fine machining technology which can carve a figure on a material. The mask should have holes exactly same as the required figure. Abrasive particles are jetted into the holes of the mask and it collide with the material. The collision break off small portion of the material. And the ${\mu}AJM$ nozzle should move all over the machining area. However, in general the carving shape is modeled as in a bitmap figure, because it often contains characters. And the mask model is also often modeled from the bitmap image. Therefore, the machining path of the ${\mu}AJM$ also efficient if it can be generated from the bitmap image. This paper suggest an algorithm which can generate ${\mu}AJM$ tool path directly from the bitmap image of the carving figure. And shows some test results and applications.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.12
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• pp.177-184
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• 2001

C3M(chemical mechanical micro machining) is applied for diminishing the size of burr and fabricating the massless patterning for aluminium wafer(thickness of 1${\mu}m$). It is difficult to perform the micro size machining with the radically increased shear stress. While the miniaturization and function-orientation of parts has been needed in the many field such as electronics, optics and medicine. etc., it is not enough to satisfy the industry needs in the machining technology. In this paper feasibility test of diminishing burr and fabricating maskless pattern was experimented and analyzed. In the experiment oxide layer was farmed on the aluminium with chemical reaction by ${HNO_3}$(10wt%), then the surface was grooved with tungsten carbide tool for the different condition such as the load and fred rate. The result was compared with the conventional machining to show the improvement of C3M with SEM for burr diminish and XPS for atomic existence, AFM for more precise image.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.267-268
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• 2011

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.649-652
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• 2005

Abrasive jet machining is a well-known process for patterning window glass and mirrors. The technics is now being developed for the production structure with high precision. This paper describes erosion profile modeling of micro abrasive jet machining and compares with other researcher's model.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.4 no.4
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• pp.7-13
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• 2005

In the case of fabricating micro pole structures such as column, square-pole and gear shaft by the micro end-milling process, it can be useful in the fields of industry, for example, micro parts, electrode for electrical discharge machining and micro mold for injection molding. In this study, machining factors and the process were analyzed. Machining experiments of various micro pole configurations were performed. Analysis of the change and effect of the cutting force according to the machining conditions was carried out. An analytical study of the deformation of the micro pole caused cutting conditions and cutting force through the finite element method and ANSYS program was carried out. As a result, this research presented a method of fabricating the column pole of below $100{\mu}m$ diameter with high aspect ratio by using micro end-milling process, and based on that, a method of fabricating a variety of applicable structures. Also the minimum size of the pole capable of fabricating through theory and experiment were demonstrated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1171-1174
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• 2005

Manufacturing capability at the micro or nano scale production field is requested strongly in view of parts and product miniaturization. Miniaturized parts and products will introduce lots of benefits in terms of high precision functionality and low energy consumption. This paper presents the results of micro milling machine tool development for micro machining process. Finite element analysis has been performed to know the relationship between design dimensional variables and structural stiffness in terms of static, dynamic, thermal aspects. Performance evaluation through machining has been tested and discussed for achievable machining characteristics.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1052-1058
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• 2003

The possibility of micro/nano machining through electro-chemical process is discussed in this research. Electro-chemical dissolution region is localized within 1 ${\mu}m$ by applying ultra short pulses with tens of nanosecond duration. The effects of voltage, pulse duration, and pulse frequency on the localization distance are investigated. Localization distance can be manipulated by controlling the voltage and pulse duration, and various hole shapes are produced including stepped holes and taper free hole. High quality micro-hole with 8 ${\mu}m$ diameter with 20 ${\mu}m$ depth and micro-groove with 9 ${\mu}m$ width with 10 ${\mu}m$ depth are machined on 304 stainless steel.