• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.04a
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• pp.275-280
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• 2001

Recently, the trends of industrial products grow more miniaturization, variety and mass production. Micro drilling which take high precision in cutting work is requested more micro hole and high speed working. Especially, Micro deep hole drilling is becoming more important in a wide spectrum of precision production industries, ranging from the production of automotive fuel injection nozzle, watch and camera parts, medical needles, and thick multi-layered Printed Circuit Boards(PCB) that are demanded for very high density electric circuitry. This paper shows the tool monitoring results of micro drill with tool dynamometer. And additionally, microscope with built-in monitor inspection show the relationship between burr in workpiece and chip form of micro drill machining.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.468-472
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• 2005

In this paper, the static and dynamic stiffness of the air bearing stage for micro-micro machine tool are examined experimentally. For stiffness and precision concerns, air bearing stages are adapted for 3-axis micro-milling machine which is size of $200x200\;mm^2$. The air bearings in the stage are preloaded by permanent magnets to achieve desired bearing clearance and stiffness for vertical direction. As the stiffness of the air bearing is primary interests, static stiffness test were performed on XY stage in Z direction and Z column in Y direction. Dynamic test were performed on XY stage and Z column, respectively. Both static and dynamic tests were performed in different air pressure conditions. The vertical stiffness of XY stage is about 9 N/ pm where Y stiffness of Z column is much smaller as $1\;N/{\mu}m$ because of the large moment generated by Y force on the column.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.2
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• pp.5-11
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• 2005

Among the micro machining techniques, micro EDM is generally used for machining micro holes, pockets, and micro structures on difficult-cut-materials. Micro EDM parameters such as applied voltage, capacitance, peak current, pulse width, duration time are very important to fabricate the tool electrode and produce the micro structures. Developed micro EDM machine is composed of a 3-axis driving system and RC circuit equipped with pulse generator. In this paper, using micro EDM machine, the characteristics of micro EDM process are investigated and it is applied to micro holes, slots, and pockets machining. Through experiments, relations between machined surface and voltages and between MRR and feedrate are investigated. Also the trends of tool wear are investigated in case of hole and slot machining.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.278-281
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• 2005

Today, manufacturing capability at the micro or nano scale production field is requested strongly in view of parts and product miniaturization. Miniaturized parts and products will introduce lots of benefits in terms of high precision functionality and low energy consumption. This paper presents the results of micro milling machine tool development for micro machining process. Finite element analysis has been performed to know the relationship between design dimensional variables and structural stiffness in terms of static, dynamic, thermal aspects. Performance evaluation through machining has been tested and discussed for achievable machining characteristics.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.7
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• pp.139-144
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• 2008

Micro electrochemical machining was investigated to machine micro internal features. This method uses a micro disk tool electrode and can easily machine micro features inside of a micro hole, which are very difficult to make by the conventional processes. In order to limit the machining area and localize the electrochemical dissolution, ultra short pulses were used as power source and a micro disk electrode with insulating layer on its surface was used as a tool electrode. By electrochemical process, internal features, such as groove array, were fabricated on the stainless steel plate.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.5
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• pp.101-107
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• 2007

Assembly is mentioned as important process saving time and cost where we produce the machine with many parts relationships. In this study, parts assembly relationship is analysed for assembly information of micro milling machine which have been developing for research. Liaison diagram, datum flow chain and assembly tree are applied to discuss assembly characteristics of micro milling machine model. We can find out the characteristics of micro machine assembly and discuss about facility of assembly. Some analysis in this paper about micro milling machine will give a useful tools for assembly. We knew that the predicted results from analysis in this study are alignment and clearance among the parts. The 3D model of micro machine which is studied in this paper is not a complete model. Main parts of a micro milling machine are used and presented.

• Transactions of Materials Processing
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• v.18 no.2
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• pp.144-149
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• 2009

Recently, the monitoring technology of machining process is very important to improve productivity and quality in manufacturing filed. Such monitoring technology has been performed to measurement using vibration signal, acoustic emission signal and tool dynamometer. However, micro machining is limited small-scale parts machining because micro tool is very small and weakness to generate signal in micro machining process. Therefore, this study has efficient sensing technology for real monitoring system in micro machine that is proposed to supplement a disadvantage of single-sensor by multi sensor. From experimental result, it was evaluated tool wear and cutting situation according to repetitive slot cutting condition and changing cutting condition, and it was performed monitoring spindle rpm and condition according to compare acceleration signal with current signal.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.99-104
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• 2004

Micro/meso cutting is getting more important in the fields of precision machining technology. A micro-turning lathe is one of parts to consist the Micro Factory. It accepts stepwise motion actuators that are used for feeding system instead of the conventional mechanism. It is consisted of two Piezoelectric ceramics; one is for feeding the slider, and the other is for clamping the slider in the guide way of the body. The linearity and positional accuracy of the actuators are good enough for high precision motion. The spindle unit is operated with DC motor on the top of the slider. The motion is communicated with miniaturized linear encoder attached on each side of axis. A mono crystal diamond tool is used for cutting tool. This micro-lathe has been made a machining experiment to see the characteristics of micro-machining.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.6
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• pp.703-713
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• 2011

In this study, to minimize trial and error in the design and manufacturing processes of a high-precision large-surface micro-grooving machine which is able to fabricate the molds for 42 inch LCD light guide panels, the effects of the structural deformation of the micro-grooving machine according to the positions of the X-axis, Y-axis and Z-axis feed systems were examined on the tool tip displacement errors associated with the machining accuracy. The virtual prototype (finite element model) of the micro-grooving machine was constructed to include the joint stiffnesses of the hydrostatic bearings, hydrostatic guideways and linear motors, and then the tool tip displacement errors were measured from the virtual prototype. Especially, to establish the prediction model of the tool tip displacement errors, which was constructed using the positions of the X-axis, Y-axis and Z-axis feed systems as independent variables, the response surface method based on the central composite design was introduced. The reliability of the prediction model was verified by the fact that the tool tip displacement errors obtained from the prediction model coincided well those measured from the virtual prototype. And the causes of the tool tip displacement errors were identified through the analysis of interactions between the positions of the X-axis, Y-axis and Z-axis feed systems.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.6
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• pp.68-73
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• 2009

One of the traditional optical methods to monitor a tool is a CCD sensor-based vision system which captures an aspect of the tool in real time. In the case using the CCD sensor, specific lens-modules are necessary to monitor the tool with higher resolution than its pixel size, and a microprocessor is required to attain desired data from captured images. Thus theses additional devices make the entire measurement system complex. Another method is to use a pair of an optical source and a detector per measuring axis. Since the method is based on the intensity modulation, the structure of the measurement system is simper than the CCD sensor-based vision system. However, in the case measuring the three dimensional position of the tool, it is difficult to apply to micro machine-tools because there may not be space to integrate three pairs of an optical source and a detector. In this paper, in order to develop a tool-origin measurement system which is employed in micro machine-tools, the improved method to measure a tool origin in x, y and z axes is introduced. The method is based on the intensity modulation and employs one pair of an optical source radiating divergent beams and a quadrant photodiode to detect a three dimensional position of the tool. This paper presents the measurement models of the proposed tool-origin sensor. The models were verified experimentally The verification results show that the proposed method is possible and the induced models are available for design.