• 제목/요약/키워드: Micro-lines

검색결과 213건 처리시간 0.033초

집속 아르곤 이온 레이저 빔을 이용한 레이저 유도 직접 구리 패터닝 (Laser-Induced Direct Copper Patterning Using Focused $Ar^+$ Laser Beam)

  • 이홍규;이경철;안민영;이천
    • 한국전기전자재료학회논문지
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    • 제13권11호
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    • pp.969-975
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    • 2000
  • Laser direct writing of micro-patterned copper lines has been achieved by pyrolytic decomposition of copper formate films (Cu(HCOO)$_2$.4$H_2O$), as a metallo-organic precursor, using a focused CW Ar$^{+}$ laser beam (λ=514nm) on PCB boards and glass substrates. The linewidth and thickness of the lines wee investigated as a functin of laser power and scan speed. The profiles of the lines were measured by scanning electron microscope (SEM), surface profiler ($\alpha$-step) and atomic force measured by scanning electron microscope (SEM), surface profiler ($\alpha$-step) and atomic force microscopy (AFM). The electrical resistivities of the patterned lines were also investigated as a function of laser parameters using probe station and semiconductor analyzer. We compared resistivities of the patterned copper lines with these of the Cu bulk. Resistivities decreased due to changes in morphology and porosity of the deposit, which were about 3.8 $\mu$$\Omega$cm and 12$\mu$$\Omega$cm on PCB and glass substrates after annealing at 30$0^{\circ}C$ for 5 minutes.s.

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광-마이크로파 기반 유도플라즈마의 과도응답 특성에 관한 연구 (Study of Transient Response in Non-uniform Plasma Layer with Optically-Controlled Microwave Pulses)

  • 왕설;최유순;박종구;김용갑
    • 전기학회논문지
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    • 제58권6호
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    • pp.1174-1179
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    • 2009
  • In this paper we develop the characteristic of density on non-uniform plasma in different layer of the semiconductor with optically controlled microwave pulses. The transient response of the microwave pulses in different plasma layer has been evaluated by calculating the variation of the reflection function of dielectric microstrip lines. The lines has used under open-ended termination containing optically induced plasma region, which has illuminated a laser source. The characteristics impedances resulting from the presence of plasma are evaluated by the transmission line model. The analyzes the variation of transient response in a 0.01cm layer near the surface for frequency range from 1GHz to 128GHz. The diffusion length LD is larger than compared to the absorption depth $l/_{\alpha}l$. The variation of characteristic response in plasma layer with microwave pulses which has in deferentially localized has been evaluated analytically.

Micro-HPLC/IS/MS에 의한 수 중의 Microcystins (LR, YR 및 RR)의 분석 (Analysis of Microcystins(LR, YR and RR) in Water)

  • 박관수;배준현;강준길;김연두
    • 대한화학회지
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    • 제45권6호
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    • pp.524-531
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    • 2001
  • Microcystin-LR, -YR 및 -RR과 같은 독성 microcystin의 분석에 있어서 정확성을 높이기 우해 고상 추출을 통한 micro-HPLC/IS/MS를 사용하였다. 이러한 microcystin-LR, -YR, -RR를 확인하는데 HPLC/UV로는 238nm에서의 흡광도를 측정하였고, 질량스펙트럼에서는 1 35m/z 및 $[M+H]^+$m/z의 특성 피이크만을 검출하여 왔다. 본 연구에서는 이중 전하에 해당하는 새로운 선들이 LR에서는 507m/z, PR에서는m/z, YR에서는 532m/z에서 추가로 검출되었다. 이 방법을 사용하여 대청호에서 독성 microcystin의 존재성을 조사하였다.

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Voltage Measurement Accuracy Assessment System for Distribution Equipment of Smart Distribution Network

  • Cho, Jintae;Kwon, Seong-chul;Kim, Jae-Han;Won, Jong-Nam;Cho, Seong-Soo;Kim, Juyong
    • Journal of Electrical Engineering and Technology
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    • 제10권3호
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    • pp.1328-1334
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    • 2015
  • A new system for evaluating the voltage management errors of distribution equipment is presented in this paper. The main concept of the new system is to use real distribution live-line voltage to evaluate and correct the voltage measurement data from distribution equipment. This new approach is suitable for a new Distribution Management System (DMS) which has been developed for a distribution power system due to the connection of distributed generation growth. The data from distribution equipment that is installed at distribution lines must be accurate for the performance of the DMS. The proposed system is expected to provide a solution for voltage measurement accuracy assessment for the reliable and efficient operation of the DMS. An experimental study on actual distribution equipment verifies that this voltage measurement accuracy assessment system can assess and calibrate the voltage measurement data from distribution equipment installed at the distribution line.

마이크로 추력장치용 과산화수소 촉매 반응기 (Catalytic Reactor of Hydrogen Peroxide for a Micro Thruster)

  • 이대훈;조정훈;권세진
    • 한국연소학회:학술대회논문집
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    • 한국연소학회 2002년도 제25회 KOSCI SYMPOSIUM 논문집
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    • pp.237-240
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    • 2002
  • Micro catalytic reactors are alternative propulsion device that can be used on a nano satellite. When used with a monopropellant, $H_2O_2$, a micro catalytic reactor needs only one supply system as the monopropellant reacts spontaneously on contact with catalyst and releases heat without external ignition, while separate supply lines for fuel and oxidizer are needed for a bipropellant rocket engine. Additionally, $H_2O_2$ is in liquid phase at room temperature, eliminating the burden of storage for gaseous fuel and carburetion of liquid fuel. In order to design a micro catalytic reactor, an appropriate catalyst material must be selected. Considering the safety concern in handling the monopropellants and reaction performance of catalyst, we selected hydrogen peroxide at volume concentration of 70% and perovskite redox catalyst of lantanium cobaltate doped with strondium. Perovskite catalysts are known to have superior reactivity in reduction-oxidation chemical processes. In particular, lantanium cobaltate has better performance in chemical reactions involving oxygen atom exchange than other perovskite materials. In the present study, a process to prepare perovskite type catalyst, $La_{0.8}Sr_{0.2}CoO_3$, and measurement of its propellant decomposition performance in a test reactor are described.

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핫 엠보싱 공정과 CMP 공정을 이용한 플라스틱 기판에 메탈 라인 형성 (Fabrication of metal line on plastic substrate by hot embossing and CMP process)

  • 차남구;강영재;박창화;임현우;박진구
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.655-656
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    • 2005
  • In the future, plastic based system will play a crucial role in modem life, for examples, transparent display or disposable electronics and so on. In this paper, we introduced a new method to fabricate the metal line on the plastic substrate. Metal lines were fabricated by hot embossing and CMP process on PMMA (polymethylmethacrylate) substrates. A Si mold was made by wet etching process and a PMMA wafer was cut off from I mm thick PMMA sheet. A 100 nm thick Al was deposited on PMMA wafers. The Al deposited PMMA wafer and the Si mold carefully sandwiched which was directly imprinted by hot embossing. After imprinting process, a residual Al layer was removed by CMP process. Finally, we found the entire process may be very useful to fabricate the metal line on plastic substrates.

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平활材表面 의 微小피勞균열에 관한 基礎的 特性 (Basic Characteristics of Micro-Fatigue-Cracks on the Unnotched Smooth Specimens)

  • 서창민;북천영부;결성양치
    • 대한기계학회논문집
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    • 제7권1호
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    • pp.28-35
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    • 1983
  • Quantitative analysis have been carried out on the micro-cracks on the surface and into the depth of unnotched smooth mild steel specimen under cyclic stains by rotating bending fatigue tests. Some of the results are; (1) Cracks initiate at the early stage of fatigue life N$_{I}$/ N$_{f}$=10 to 20%, and propagate during the rest of fatigue life. (2) Coalescence of highly crowded small fatigue cracks of random distribution seems to induce the final fracture at higher stress level. (3) The curves of crack initiation and the equal crack length on the graph of stress versus number of cycles are parallel to the S-N curve. (3) The curves of crack initiation and the equal crack length on the graph of stress versus number of cycles are parallel to the S-N curve. (4) The distributions of micro-surface crack length and depth show the composite Weibull distributions which are approximated to two straight lines separated by the value of transient region between stage I and stage II crack.k.k.

레이저 직접 묘화법에 의한 알루미나 기판위의 미세 전도성 패턴 제작 (The fabrication of micro- size conductor lines on alumina patterned by laser ablation)

  • 김혜원;이제훈;신동식;강성군
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.1889-1892
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    • 2003
  • The fabrication of micro-size patterning on alumina substrate is generated by laser direct writing, which has high precision and selectivity of various laser beam energies. The depth and width of patterns is affected by laser parameter such as laser power, scan rate. Through the chemical and mechanical polishing Pd seeds was effectively got rid of alumina substrate for selectivity electroless Ni plating. Thermal treatment is good method for changing electrical property of conductor line, because the treatment can control of the grain size.

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GIS를 기반으로 한 CT-2 서비스 영역 예측 및 셀설계 시뮬레이터 개발 (Development of a Simulator for CT-2 Coverage Prediction and Cell Planning by GIS-Based Approach)

  • 임종수;이봉석;이문수
    • 한국정보처리학회논문지
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    • 제6권5호
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    • pp.1342-1350
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    • 1999
  • A new design procedure for micro cellular coverage prediction is presented here on this paper, which contains a new propagation analysis algorithm based on processing of vector data representing roads and buildings which mainly affect the propagation phenomena in micro-cell environments. The propagation analysis algorithm presented here has been developed to aim at the practical application for micro-cellular systems such as PCS or CE-2. As all the vectors used here are of closed poly lines, i.e., polygons, a simplified ray path search technique can be developed not only to determine if the calculation points are on the road polygons and but also to calculate the amount of blockage by buildings. The result shows a capability of predicting path loss with an RMS error of 5dB or lower.

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On-Off 솔레노이드 엑츄에이터의 특성 연구 (A Study of On-Off Solenoid Actuator)

  • 전용식;김동수;임기조
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2007년도 제38회 하계학술대회
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    • pp.154-155
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    • 2007
  • Put Recently, development of micro valves that operate by compressed air has received significant attention in the fields of the micro fluid chip for medical applications or production lines of semi-conduct chip for electronic goods. Especially it is required that high-speed responsibility and lower power in optimal design of these micro valves. The primary objective of this study is to compare the optimally designed Solenoid Valve with the actually produced one which can highly improve the efficiency by providing optimal current according to mechanical load.

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