• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 춘계학술대회 논문집
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• pp.209-214
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• 2002

Mechanical micro-engineering is an easy and cheap way to fabricate micro-structures. If the application of the conventional machining method using flat-end mill becomes available for the micro-manufacturing process, it will be advanced as an extension of the conventional machining process. In this study, micro-grooves cutting using flat-end mill(($\phi$8) was performed. The characteristics on flat-end milling was investigated to improve machinability of micro-grooves. The experiments were performed according to variations of spindle revolution, depth of cut, and feed rate. Machinability through various cutting conditions was evaluated by surface geometry, tool wear, and cutting force. The results show that micro V-grooves of width(pitch) 29${\mu}{\textrm}{m}$ were acquired by flat-end milling. The maximum and minimum roughness of the wall of grooves was 438 and 67nm, respectively

• 한국정밀공학회지
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• 제22권5호
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• pp.37-44
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• 2005

In this paper, wire electrochemical machining (Wire ECM) with ultra short pulses is presented. Platinum wire with $10{\mu}m$ diameter was used as a tool and 304 stainless steel was locally dissolved by electrochemical machining in 0.1M $H_{2}SO_4$ electrolyte. Wire ECM can be easily applied to the fabrication of arbitrarily shaped micro-grooves without tool wear. The change of machining gap according to applied pulse voltage, pulse on-time and pulse period was investigated and the optimal pulse condition for stable machining was obtained. Using this method, various micro-grooves with less than $20{\mu}m$ width were fabricated.

• 한국정밀공학회지
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• 제30권3호
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• pp.284-291
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• 2013

Micro cutting of titanium alloy by polycrystalline diamond (PCD) tools was studied. Micro electro discharge machining (MEDM) was used to fabricate customized micro shaping tools from PCD blank. The tool was used to machine micro grooves on Ti alloy and the effects of depth of cut and machining length on tool wear, burr and surface roughness were studied. The shaping tool has cutting edge of a few ${\mu}m$. The crater size of the tool surface was increased with increasing capacitance of EDM machining conditions, which was used to control the surface roughness of the machined micro grooves.

• 한국생산제조학회지
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• 제18권6호
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• pp.636-641
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• 2009

Recently, expansion of micro-technology parts requires micro-precision machining technology. Micro-groove machining is important to fabricate micro-grating lens and many micro-parts such as microscope lens, fluidic graphite channel etc. Conventional groove fabrication methods such as etching and lithography have some problems in efficiency and surface integrity. But, mechanical micromachining methods using single crystal diamond tools can reduce these problems in chemical process. For this reason, microfabrication methods are expected to be very efficient, and widely studied. This study deals with machinability in micro-precision V-grooves machining of nickel plated layer using non-rotational single crystal diamond tool and 3-axis micro stages. Micro V-groove shape, chip formation and tool wear were investigated for the analysis of machinability of Ni plated layer.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.918-921
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• 2002

Some investigators who have tried to achieve the highly smooth surface finish using electrochemical processes have reported that high current density produced lustrous surfaces while the opposite conditions produced a passive layer and had a tendency to produce a black surface. However, processing at a low current density may produce a non-lustrous surface but the improvement of dimensional accuracy of the surface is significant. The surface with pulse process was a bit more lustrous than with continuous current but the black passive layer still could be found at grooved surface. There are two ways to achieve highly smooth surface finish. One is brushing it with a brush the other is electrochemical machining (ECM) with high current. The former method is the most common polishing practice, but not only may the surface obtained differ from operator to operator, but precision smooth surface on micro grooves are difficult to obtain. The latter one recently has been used to produce a highly smooth surface after EDM process. However, the material removal rate in ECM with high current is relatively high. Hence the original shape of the micro grooves, which was formed by electrochemical micro-machining (EMM) process, may be destroyed. In this study, an electrochemical polishing process using pulse current is adopted as a possible alternative process when micro grooves formed by EMM process should be polished. Mirror-like micro grooves with lustrous and smooth surface can be produced electrochemically with pulse current because the voltage and current used can be lower than the case of continuous current. This study will discuss the accurate control of physical and electrical conditions so as to achieve mirror-like micro grooves with lustrous and smooth surface without destroying the original shape of micro grooves.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2005년도 춘계학술대회
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• pp.546-549
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• 2005

Micro EDM milling using deionized water as dielectric fluid was investigated. After machining micro grooves using deionized water with different voltage. capacitance. and resistivity of deionized water, machining characteristics were investigated. The wear of a tool electrode and the machining time can be reduced by using deionized water instead of kerosene. Micro hemispheres were machined in deionized water and kerosene and their machining characteristics were compared.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.918-921
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• 2000

Micro-machining, one of the non-traditional machining techniques, can achieve a wanted shape of the surface using metal dissolution with electrochemical reaction and can be applied to the metal such as high tension, heat resistance and hardened steel. The workpiece dissolves when it is positioned close to the tool electrode in electrolyte and the current is applied. Traditional machining has been used in the industries such as cutting, deburring, drilling and shaping. The aim of this work is to develop Micro-machining techniques for micro shape by establishing appropriate machining parameters of micro-machining

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1902-1906
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• 2003

Micro-milling is an efficient method for fabricating micro structures because of its high machining rate compared with other non-conventional micro machining processes. But it is not easy to make a micro milling tool with less than 50 $\mu\textrm{m}$ in diameter by conventional machining. In this study, the characteristics of a micro milling tool fabricated by wire electrical discharge machining (WEDM) were studied. The workpiece is copper and stainless steel. The effects of some machining conditions such as feed rate, depth of cut, and a shape of tool were studied. The tools with D-shape and square shape in cross section were tested for machining micro grooves and 3D structures.

• 한국정밀공학회지
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• 제25권11호
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• pp.45-51
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• 2008

Successive micro-scale V-grooves and a grid of pyramids were machined by elliptical vibration tufting (EVC) to investigate feasibility of using EVC as an alternative method of creating micro-molds to photo-lithography and electroforming, which have been commonly employed. An elliptical vibration grooving machine was developed which consists of two orthogonally-arranged piezoelectric actuators, a diamond cutting tool, and a motorized xyz stage. The micro-scale features were machined on materials of copper, duralumin, nickel, and hastelloy and it was found that EVC significantly reduces cutting resistance and prohibits generation of side burrs and rollover burrs, thus resulting in improving machining qualify of micro-molds in ail experimented workpiece materials.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.97-100
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• 2004

In recent years, a demand for micro-structure machining is increasing by the development of information and optics industries. Micro machining technology is in general well known in the field of lithograghy. However, the requirement of producing micro machine and/or micro mechanism with metal materials will be increased since a variety of workpiece configurations can be easily made. In this paper, ultra precision machine is developed to obtain micro groove and mirror surface using single crystal diamond tool. According to the cutting experiment, no burr was found at the edge of V-grooves, and the surface roughness of copper is about 1～3nm Ra. It is verified that ultra precision machine is effective to high precision machining.