• Proceedings of the KIEE Conference
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• 대한전기학회 1998년도 하계학술대회 논문집 G
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• pp.2512-2514
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• 1998

The bending actuator using zigzag type shape memory alloy springs has been fabricated and characterized. The small sized actuator with outer diameter of 3.0mm and inner diameter of 2.0mm could be implemented because zigzag type spring has advantages for thin wall type actuator over the coil type spring. The measured characteristics of the fabricated bending actuator show the possibility of practical application to micro active bending catheter.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.334-337
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• 2003

In this paper. we introduce a novel actuation method based on dielectric elastomer. Along with basic principles of actuation using dielectric elastomer a new design of actuator is discussed. The proposed design has advantageous features in reduction in size, speed of response, ease and ruggedness of operation. Using the actuator. a three-degree-of-freedom actuator module is developed, which can provide up-down. and two rotational degree-of-freedom motion. In the application of the proposed actuation method, a micro-robot mimicking the motion of an inchworm is developed.

• The Transactions of the Korean Institute of Electrical Engineers C
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• 제52권1호
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• pp.55-59
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• 2003

With the progress of optical communication technology recently, the development of micro actuator using MEMS technology has been made for optical switching. The actuation types are various; electrostatic, electromagnetic, and electrostatic +electromagnetic etc. Among them, the electrostatic type is the most popular because of the relative ease of fabrication, integration and shielding as well as low power consumption. However, it needs a high voltage to generate a larger driving force. To overcome this problem, we proposed a new type of electrostatic actuator with an extra vertical electrode in addition to the horizontal one. The vertical electrode also lays a role of making the stable angular rotation as a stopper. From the theoretical analysis and experiment, we find the actuation voltage can be reduced up to 50 % of that of the conventional one.

• Proceedings of the KIEE Conference
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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• pp.2372-2373
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• 2005

The design of a piezoelectric actuator for micro droplet ejecting system has bee studied. The actuator has been evaluated by using commercial FEM package and its displacement are measured by LDV(Laser Doppler Vibrometer). The characteristics of the actuator are evaluated with varation in a ratio of width of PZT to that of membrane and thickness ratio of PZT to membrane.

• 한국가시화정보학회:학술대회논문집
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• 한국가시화정보학회 2002년도 마이크로/바이오 가시화기술부문 학술강연회
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• pp.1-7
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• 2002

This papers describes the preparation and experimental results of a micro mass detection devices based on cantilever and a diffuser-type micro pump using screen printing thick-film technologies and Si micro-machining. PZT-PCW thick films were prepared by new hybrid method based on the screen printing. By applying these PZT-PCW piezoelectric thick films on actuator, a cantilever for mass detection sensor and a micropump for microfluidic element are successfully fabricated. Resonant frequency and displacement of PZT-PCW thick film actuator in air and in liquid are measured by laser vibrometer system as a function of actuator size. The resonant frequency of PZT-PCW thick film actuator in liquid decreases order of 1/2-1/4 due to damping effect. The sensitivity of cantilever is characterized by Au deposition method which has the mass loading effect such as adsorption of protein. The Sensitivity of PZT-0.12PCW thick film cantilever is proportional to detecting area.

• Proceedings of the KSME Conference
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• 대한기계학회 2001년도 춘계학술대회논문집A
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• pp.854-859
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• 2001

An eigenvalue analysis of a tunable micro-mechanical actuator is presented. The actuator is modeled as a continuum structure. The eigenvalue modified by the tuning voltage is computed through the linearization of the relation between the electrostatic force and the displacement at the equilibrium. A staggered algorithm is employed to perform the coupled analysis of the electrostatic and elastic fields. The stiffness matrix of the actuator is modified at this equilibrium state. The displacement field is perturbed using an eigenmode profile of the actuator. The configuration change of the actuator due to perturbation modifies the electrostatic field and thus the electrostatic force. The equivalent stiffness matrix corresponding to the perturbation and the change in the electrostatic force is then added to stiffness matrix in order to explain natural frequency shifting. The numerical examples are presented and compared with the experiments in the literatures.

• Transactions of the Korean Society of Mechanical Engineers B
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• 제26권10호
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• pp.1394-1405
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• 2002

The performance of micro-actuators utilizing radiometric forces are studied numerically. The Knudsen number based on gas density and characteristic dimension is varied from near-continuum to highly rarefied conditions. Direct simulation Monte Carlo(DSMC) calculations have been performed to estimate the performance of the micro-actuators. In the present DSMC method, the variable hard sphere molecular model and no time counter technique are used to simulate the molecular collision kinetics. For simulation of diatomic gas flows, the Borgnakke-Larsen phenomenological model is adopted to redistribute the translational and internal energies.

• Journal of the Korean Society for Precision Engineering
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• 제16권2호통권95호
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• pp.15-22
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• 1999

This paper demonstrates the feasibility of Shape Memory Alloy (SMA) actuators in controlling the motion of micro active catheter. The dynamic behavior of SMA is obtained by several experiments for the design of the controller. With the control parameters obtained in experiments, temperature feedback control algorithm is proposed and realized. The prototype of micro active catheter is fabricated, and its control performance which uses the designed controller is investigated. The results obtained show the potential of the SMA as viable means for actuating the micro active catheter.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 한국공작기계학회 1995년도 춘계학술대회 논문집
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• pp.40-62
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• 1995

A micro positioning system using piezoelectric actuators have very wide application region such as ultra-precision machine tool optical device measurement system. In order to keep a high precision displacement resolution it to useful to take a position sensor and feedback of the error. From the practical point of view high-resolution displacement sensor systems are very expensive and it is difficult to make such a sensitive sensor work properly in a poor operational environment of industry. In this study a piezo-electric micro-depth control system which does not require position sensor but piezoelectric voltage feedback has been developed. It is driven by hysteresis-considering reference input voltage calculated in advance and actuator/sensor characteristics of piezoelectric materials. From the result of experiments a fast and stable response of micro-depth control system has been achieved and an efficient technique to control the piezoelectric actuator suggested.

• The Transactions of the Korean Institute of Electrical Engineers C
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• 제50권6호
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• pp.307-313
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• 2001

A micro syringe which can be attached to the end of a micro intravascular endoscope for drug injection is fabricated and its characteristic is tested. The syringe consists of a drug chamber and an actuator chamber which are separated by a silicone rubber membrane. The drug chamber is filled with liquid drug by the membrance actuation caused by the vaporization and condensation of the working liquid in the actuator chamber. The liquid drug is ejected by the electrolysis of the working liquid. The membrane deflection by each actuation method has been measured. The liquid ejection image has been captured during the electrolysis of the electrolyte. Also, the successful operation of the micro syringe under the normal blood pressure was verified.