• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2004.10a
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• pp.40-43
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• 2004

Stamps for microcontact processing are fabricated by casting elastomer such as PDMS on a master with a negative of the desired pattern. After curing, the PDMS stamp is peeled away from the master and exposed to a solution of ink and then dried. Transfer of the ink from the PDMS stamp to the substrate occurs during a brief contact between stamp and substrate. Generally, negative-tone masters, which are used for making positive-tone PDMS stamps, are fabricated by using photolithographic technique. The shortcomings of photolithography are a relative high-cost process and require extensive processing time and heavy capital investment to build and maintain the fabrication facilities. The goal of this study is to fabricate a negative-tone master by using Nano-indenter based patterning technique. Various sizes of V-grooves and U-groove were fabricated by using the combination of nanoscratch and HF isotropic etching technique. An achieved negative-tone structure was used as a master in the PDMS replica molding process to fabricate a positive-tone PDMS stamp.

• Transactions of Materials Processing
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• v.23 no.4
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• pp.206-210
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• 2014

The metal lead frame, a semiconductor component, has product tolerances in micro units as compared to products made with a larger size mold. Therefore, small deflections of the mold and of the press as well as the press molding process itself have a strong influence on accuracy of the product. Hence, it is necessary for the process design to consider the structural response of the mold and the press during deformation. In the current study, the mold deflection and pressure on the punch is examined using the finite element modeling (FEM) program ABAQUS. The results from the simulation were verified with the dynamic deformation measurement equipment using digital image correlation (DIC).

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.3
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• pp.203-207
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• 2008

Chemical mechanical polishing (CMP) allows the planarization of wafers with two or more materials. There are many elements such as slurry, polishing pad, process parameters and conditioning in CMP process. Especially, polishing pad is considered as one of the most important consumables because this affects its performances such as WIWNU(within wafer non-uniformity) and MRR(material removal rate). In polishing pad, grooves and pores on its surface affect distribution of slurry, flow and profile of MRR on wafer. A subject of this investigation is to apply CMP for planarization of shallow trench isolation structure using microstructure(MS) pad. MS pad is designed to have uniform structure on its surface and manufactured by micro-molding technology. And then STI CMP performances such as pattern selectivity, erosion and comer rounding are evaluated.

• Design & Manufacturing
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• v.15 no.2
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• pp.11-16
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• 2021

Recently, three-dimensional (3D) cell culture systems, which are superior to conventional two-dimensional (2D) vascular systems that mimic the in vivo environment, are being actively studied to reproduce drug responses and cell differentiation in organisms. Conventional two-dimensional cell culture methods (scaffold-based and non-scaffold-based) have a limited cell growth rate because the culture cannot supply the culture medium as consistently as microvessels. To solve this problem, we would like to propose a 3D culture system with an environment similar to living cells by continuously supplying the culture medium to the bottom of the 3D cell support. The 3D culture system is a structure in which microvascular structures are combined under a scaffold (agar, collagen, etc.) where cells can settle and grow. First, we have manufactured molds for the formation of four types of microvessel-mimicking chips: width / height ①100 ㎛ / 100 ㎛, ②100 ㎛ / 50 ㎛, ③ 150 ㎛ / 100 ㎛, and ④ 200 ㎛ / 100 ㎛. By injection molding, four types of microfluidic chips were made with GPPS (general purpose polystyrene), and a 100㎛-thick PDMS (polydimethylsiloxane) film was attached to the top of each microfluidic chip. As a result of observing the flow of the culture medium in the microchannel, it was confirmed that when the aspect ratio (height/width) of the microchannel is 1.5 or more, the fluid flows from the inlet to the outlet without a backflow phenomenon. In addition, the culture efficiency experiments of colorectal cancer cells (SW490) were performed in a 3D culture system in which PDMS films with different pore diameters (1/25/45 ㎛) were combined on a microfluidic chip. As a result, it was found that the cell growth rate increased up to 1.3 times and the cell death rate decreased by 71% as a result of the 3D culture system having a hole membrane with a diameter of 10 ㎛ or more compared to the conventional commercial. Based on the results of this study, it is possible to expand and build various 3D cell culture systems that can maximize cell culture efficiency by cell type by adjusting the shape of the microchannel, the size of the film hole, and the flow rate of the inlet.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.365-365
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• 2010

Similar to the superhydrophobic surfaces of lotus leaf, water strider leg is attributed to hierarchical structure of micro pillar and nano-hair coated with low surface energy materials, by which water strider can run and even jump on the water surface. In order to mimick its leg, many effort, especially, on the fabrication of nanohairs has been made using several methods such as a capillarity-driven molding and lithography using poly(urethane acrylate)(PUA). However most of those effort was not so effective to create the similar structure due to its difficulty in the fabrication of nanoscale hairy structures with hydrophobic surface. In this study, we have selected a low surface energy polymeric material of polytetrafluoroethylene (PTFE, or Teflon) assisted with surface modification of CF4 plasma treatment followed by hydrophobic surface coating with pre-cursor of hexamethyldisiloxane (HMDSO) using a plasma enhanced chemical vapor deposition (PE-CVD). It was found that the plasma energy and duration of CF4 treatment on PTFE polymer could control the aspect ratio of nano-hairy structure, which varying with high aspect ratio of more than 20 to 1, or height of over 1000nm but width of 50nm in average. The water contact angle on pristine PTFE surface was measured as approximately $115^{\circ}$. With nanostructures by CF4 plasma treatment and hydrophobic coating of HMDSO film, we made a superhydrophobic nano-hair structure with the wetting angle of over $160^{\circ}C$. This novel fabrication method of nanohairy structures has been applied not only on 2-D flat substrate but also on 3-D substrates like wire and cylinder, which is similarly mimicked the water strider's leg.

• The Korean Journal of Rheology
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• v.11 no.1
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• pp.34-43
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• 1999

Flow-induced voids during resin impregnation and poor fiber wetting have known to be highly detrimental to the performance of composite parts manufactured by resin transfer molding(RTM) process. In this study, in order to overcome these serious problems encountered in RTM, the effects of surface modification by using silane coupling agent as a surface modifier on the flow characteristics, the wetting between resin and fiber, and void content were investigated. For the experiments of microscopic flow visualization and curing in a beam mold, glass fiber mats having plain weaving structure and epoxy resin were used. Modifying the fiber surface was found to result in a significant decrease of dynamic contact angle between resin and fiber and increase of wicking rate. Therefore, it was confirmed that the surface modification employed in this study could improve the wettability of reinforcing fibers as well as micro flow behavior. In addition, It was revealed that high temperature and low penetration rate of the resin are more favorable processing conditions to reduce the dynamic contact angle. However, surface modified fiber mat was found to have lower permeability than the unmodified one, which may be explained in terms of the decrease of contact time between resin and fiber owing to improvement of wetting. It was also exhibited that surface modification had a significant influence on void formation in RTM process, resulting in a decrease of overall void content due to the improvement of wetting in cured composite parts.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.81.2-81.2
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• 2012

To fabricate a metal mold for injection molding, hot-embossing and imprinting process, mechanical machining, electro discharge machining (EDM), electrochemical machining (ECM), laser process and wet etching ($FeCl_3$ process) have been widely used. However it is hard to get precise structure with these processes. Electrochemical etching has been also employed to fabricate a micro structure in metal mold. A through mask electrochemical micro machining (TMEMM) is one of the electrochemical etching processes which can obtain finely precise structure. In this process, many parameters such as current density, process time, temperature of electrolyte and distance between electrodes should be controlled. Therefore, it is difficult to predict the result because it has low reliability and reproducibility. To improve it, we investigated this process numerically and experimentally. To search the relation between processing parameters and the results, we used finite element simulation and the commercial finite element method (FEM) software ANSYS was used to analyze the electric field. In this study, it was supposed that the anodic dissolution process is predicted depending on the current density which is one of major parameters with finite element method. In experiment, we used stainless steel (SS304) substrate with various sized square and circular array patterns as an anode and copper (Cu) plate as a cathode. A mixture of $H_2SO_4$, $H_3PO_4$ and DIW was used as an electrolyte. After electrochemical etching process, we compared the results of experiment and simulation. As a result, we got the current distribution in the electrolyte and line profile of current density of the patterns from simulation. And etching profile and surface morphologies were characterized by 3D-profiler(${\mu}$-surf, Nanofocus, Germany) and FE-SEM(S-4800, Hitachi, Japan) measurement. From comparison of these data, it was confirmed that current distribution and line profile of the patterns from simulation are similar to surface morphology and etching profile of the sample from the process, respectively. Then we concluded that current density is more concentrated at the edge of pattern and the depth of etched area is proportional to current density.

• Composites Research
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• v.17 no.3
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• pp.1-7
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• 2004

In the vacuum assisted RTM (VARTM) process that has become the center of attention for manufacturing massive composite structures, a good evacuation of air in the fiber preform is recognized as the prime factor. The microvoids, or the dry spots, are formed as a result of improper gate/vent locations and the mold geometry. The non-uniform resin velocity at the flow front leads to the formation of microvoids in the fibers, whereas the air in the microvoids can migrate along with the resin flow during mold filling. The residual air in the internal voids of a composite structure may cause a degradation of the mechanical properties as well as the structural failure. In this study, a unified macro- and micro analysis methods were developed to investigate the formation and transport of air in resin during VARTM process. A numerical simulation program was developed to analyze the three-dimensional flow pattern as well as the macro- and microscopic distribution of air in a composite part fabricated by VARTM process.

• Korean Chemical Engineering Research
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• v.50 no.6
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• pp.1068-1075
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• 2012

Poly(butylene terephthalate) (PBT)/Nylon6,12 core/shell micro fiber were prepared by extrusion molding. To investigate their optimum extrusion conditions, compatibility of PBT/Nylon6,12 blend micro fiber in conformity to their weight ratio and manufacture temperature was explored with SEM morphology and DSC. The alterations in their mechanical properties by extrusion speed were compared and analyzed through a UTM. In comparison with SEM figures, the domain sizes of Nylon6,12 were gradually declined by increasing the extrusion temperature of blends. Furthermore, according to these SEM images, the phase separation between Nylon6,12 domain and PBT matrix became indistinct with increasing of weight percentage of Nylon6,12. In case of DSC, the boundaries of two peaks were almost disappeared when increasing the extrusion temperature and also intervals of each two melting peaks became narrow as increasing the Nylon6,12 ratio. The mechanical properties including tensile strength, elongation, flexural strength and flexural modulus were increased as the increase in the extrusion temperature until $260^{\circ}C$. However, the mechanical properties were actually deteriorated over $260^{\circ}C$. The tensile strength, elongation, flexural strength and flexural modulus at $260^{\circ}C$ were 560 $kg_f/cm^2$, 220%, 807 $kg_f/cm^2$ and 22,146 $kg_f/cm^2$, respectively. These values are more than intermediate values of mechanical properties of PBT and Nylon6,12. These results mean that there is compatibility between PBT and Nylon6,12. Based on the extrusion conditions that produced optimum compatibility of blend, as a result, our group obtained micro fibers with the core/shell structure.

• Conservation Science in Museum
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• v.8
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• pp.49-69
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• 2007

This is about the scientific analysis of the 10 items of the gilt-bronze Panbul excavated from Anapji, Gyeongju. First, the composition of the Panbul was confirmed, using X-ray fluorescence spectrometer (XRF), and the patinas covering the surface of the Panbul were analyzed, using X-ray diffractometer (XRD). And the micro structures and gilt layer of the Panbul were investigated, using microscope and scanning electron microscope with energy dispersive spectrometer (SEM/EDS), and in order to investigate the internal conditions of the Panbul, X-radiography was conducted. As the result, it is found out that the material of the Panbul excavated from Anapji was the bronze of copper (86~95%) and tin (4~12%), and coated with gold. And cuprite (Cu₂O) was detected from red patina of the gilt-bronze Panbul, and chalcocite(Cu₂S) also was detected from the black patina. As the result of the observation of the micro structure through microscope, it is estimated that it was manufactured, using the wax molding method, and, judging from the fact that the thickness of gilt layer was not even, and that the groove had been filled, it was presumed that the amalgam coating method had been used, but some questions still remain, because mercury was not detected. Lastly, through the X-radiography, it was observed that the tiny round spots existed, which was presumed to have been generated during the casting.