• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.18 no.6
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• pp.636-641
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• 2009

Recently, expansion of micro-technology parts requires micro-precision machining technology. Micro-groove machining is important to fabricate micro-grating lens and many micro-parts such as microscope lens, fluidic graphite channel etc. Conventional groove fabrication methods such as etching and lithography have some problems in efficiency and surface integrity. But, mechanical micromachining methods using single crystal diamond tools can reduce these problems in chemical process. For this reason, microfabrication methods are expected to be very efficient, and widely studied. This study deals with machinability in micro-precision V-grooves machining of nickel plated layer using non-rotational single crystal diamond tool and 3-axis micro stages. Micro V-groove shape, chip formation and tool wear were investigated for the analysis of machinability of Ni plated layer.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.4
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• pp.49-54
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• 2005

In this paper, micro structuring technique using localized electrochemical deposition (LECD) with ultra short pulses was investigated. Electric field in electrochemical cell was localized near the tool tip end region by applying pulses of a few hundreds of nano second duration, Pt-Ir tip was used as a counter electrode and copper was deposited on the copper substrate in mixed electrolyte of 0.5 M $CuSO_4$ and 0.5 M $H_2SO_4$, The effectiveness of this technique was verified by comparison with ECD using DC voltage. The deposition characteristics such as size, shape, surface, and structural density according to applied voltage and pulse duration were investigated. The proper condition was selected based on the results of the various experiments. Micro columns less than $10{\mu}m$ in diameter were fabricated using this technique. The real 3D micro structures such as micro spring and micro pattern were made by the presented method.

• Korean Journal of Materials Research
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• v.20 no.12
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• pp.640-644
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• 2010

Information technology devices, such as cellular phones, MP3s and so on, due to restrictions of space, require thin and small micro-speakers to generate sound. The reduction of the size of micro-speakers has resulted in the decrease of sound quality, due to such factors as frequency range and sound pressure level. In this study, the acoustical properties of oval microspeakers has been studied as a function of pattern shape on the diaphragm. The other conditions of micro-speakers, except for the pattern, was not changed. When the pattern is present on the diaphragm and the shape of pattern was a whirlwind, the resonance frequency was reduced due to the decrease of tensile strength of diaphragm. The patterns presented in the semi-minor axis of diaphragm did not effect a change of resonance frequency. However, increasing the number of patterns in the semimajor axis of diaphragm became a reason for the decrease of resonance frequency on edge side. When the depth of pattern on edge side was increased, the resonance frequency was decreased due to reduction of geometrical stiffness. If the height of edge and dome were increased, the resonance frequency and geometrical stiffness rapidly increased. After reaching the maximum values, they began to decrease with the continuous increase of height.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.24 no.7
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• pp.517-524
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• 2014

Micro-vibration induced by on-board equipments such as fly-wheel and cryogenic cooler with mechanical moving parts affects the image quality of high-resolution observation satellite. Micro-vibration isolation system has been widely used for enhancing the pointing performance of observation satellites. In general, the micro-vibration isolation system requires a launch locking mechanism additionally to guarantee the structural safety of mission payloads supported by the isolation system with low stiffness under launch environment. In this study, we propose a passive launch and on-orbit vibration isolation system using shape memory alloy mesh washers for the micro-vibration isolation of spaceborne compressor, which does not require the additional launch locking mechanism. The basic characteristics of the isolator were measured in static and free vibration tests of the isolator, and a simple equivalent model of the isolator was proposed. The effectiveness of the isolator design in a launch environment was demonstrated through sine vibration, random vibration and shock tests.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.383-383
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• 2011

Generally, field emitters can be categorized into two types according to the emitter shape, one is a planar field emitter and the other is a point emitter. The planar field emitter is used for displays, flat lamps and signage boards. On the other hands, the point field emitter is expected to play a significant role in x-ray sources and electron beam sources. Such applications of the point field emitters, especially, need large emission current and high emission stability with a small electron beam size. A few reports announced point emitters made by carbon nanotubes (CNTs). However, they still have suffered from poor reproducibility and low emission current. Here, we demonstrated high performance CNT point emitters by attaching CNTs onto graphite rod. Graphite rod exhibited good electrical conductivity and chemical stability. In this method, the shape of the point emitter could be easily controlled by changing the length and diameter of the graphite rod. The CNT point emitter showed emission current over 1 mA at an applied electric field of 1.4 V/${\mu}m$. We consider that the stable emission performance is attributed to the stable contact between CNTs and graphite rod.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.918-921
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• 2002

Some investigators who have tried to achieve the highly smooth surface finish using electrochemical processes have reported that high current density produced lustrous surfaces while the opposite conditions produced a passive layer and had a tendency to produce a black surface. However, processing at a low current density may produce a non-lustrous surface but the improvement of dimensional accuracy of the surface is significant. The surface with pulse process was a bit more lustrous than with continuous current but the black passive layer still could be found at grooved surface. There are two ways to achieve highly smooth surface finish. One is brushing it with a brush the other is electrochemical machining (ECM) with high current. The former method is the most common polishing practice, but not only may the surface obtained differ from operator to operator, but precision smooth surface on micro grooves are difficult to obtain. The latter one recently has been used to produce a highly smooth surface after EDM process. However, the material removal rate in ECM with high current is relatively high. Hence the original shape of the micro grooves, which was formed by electrochemical micro-machining (EMM) process, may be destroyed. In this study, an electrochemical polishing process using pulse current is adopted as a possible alternative process when micro grooves formed by EMM process should be polished. Mirror-like micro grooves with lustrous and smooth surface can be produced electrochemically with pulse current because the voltage and current used can be lower than the case of continuous current. This study will discuss the accurate control of physical and electrical conditions so as to achieve mirror-like micro grooves with lustrous and smooth surface without destroying the original shape of micro grooves.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.7
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• pp.233-240
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• 2003

Recently, the world are preparing for new revolution, called as If (Information Technology), NT (Nano-Technology), and BT (Bio-Technology). NT can be applied to various fields such as semiconductor-micro technology. Ultra precision processing is required for NT in the field of mechanical engineering. Recently, together with radical advancement of electronic and photonics industry, necessity of ultra precision processing is on the increase for the manufacture of various kernel parts. Therefore, in this paper, stability of ultra precision cutting unit is investigated, this unit is the kernel unit in ultra precision processing machine. According to alteration of shape and material about hinge, stability investigation is performed. In this paper, hinge shapes of micro stage in UPCU(Ultra Precision Cutting Unit) are designed as two types, where, hinge shapes are composed of round and rectangularity. Elasticity and strength are analyzed about micro stage, according to hinge shapes, by FE analysis. Micro stage in ultra precision processing machine has to keep hinge shape under cutting condition with 3-component force (cutting component, axial component, radial component) and to reduce modification against cutting force. Then we investigated its elasticity and its strength against these conditions. Material of micro stage is generally used to duralumin with small thermal deformation. But, stability of micro stage is investigated, according to elasticity and strength due to various materials, by FE analysis. Where, Used materials are composed of aluminum of low strength and cooper of medium strength and spring steel of high strength. Through this stability investigation, trial and error is reduced in design and manufacture, at the same time, we are accumulated foundation data for unit control.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.377-382
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• 2005

This paper describes the design of micro machine tools system for mechanical machining of micro/meso scale mechanical parts. The micro machining systems such as $\mu-Late$, $\mu-milling/drilling$ machine and $\mu-grinding$ machine are the basic elements constructing $\mu-factory$ which gains more attention recently because of increasing needs of mico and nano-parts in various industrial and medical area. A miniaturized 3-axis milling machine with VCM stage and air spindle and palm-top size micro-late are designed, and air bearing stage and stepwise linear motion system with PZT are studied for motion system. The micro cutting characteristics are investigated experimentally, and reconfigurable machine structures are also considered.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.6
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• pp.91-97
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• 2019

Rotating machining unit is a revolutionary product that can process worm shaft or spiral shaft with fast and precise, a rotary type cutting tool, which is attached to automatic lathe and processes spiral groove on outer circumference of round bar. In this work, a study on micro tooth shape modification method of driving gear train in the rotating machining unit was presented. To observe the effect on power transmission characteristics of the driving gear pair, visualize the gear meshing condition and the load distribution on the gear teeth by using the professional gear train analysis program RomaxDesigner. By comparing the repeated analysis results, the effect of micro tooth shape modification on power transmission characteristics on driving gear can be summarized. The optimized gears were fabricated and measured by precision tester as a validation in this research.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.441-445
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• 2005

In the resent years, as the research and the development of micro and precision machinery become active, the interest of micro actuators using SMA(Shape Memory Alloy) has been increased. But, no detailed researches between the thermo-dynamic property in Nitinol alloy have been done yet. In this study, the thermal property of high temperature Nitinol shape memory alloy were evaluated using differential scanning calorimeter(DSC). The structure property was investigated using X-ray diffraction(XRD). A dynamic mechanical analyzer(DMA) with three point bending mode was used to study storage and loss modulus of shape memory alloy according to the thirteen frequencies in the temperature range between 30 and $200^{\circ}C$. The effects of the temperature heating/cooling rate, the frequency on the damping capacity have been systematically investigated. Such a frequency and temperature changes also influenced significantly to the damping behavior of the shape memory alloy. It was also found that Nitinol exhibited high damping capacity during phase transformation.