• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.1897-1901
• /
• 2003

Recently, with the development of semiconductor technology the miniaturization of products as well as parts and the products with high precision are being required. In addition as a national competitive power is increasingly effected by micro part development through micro machining and the secure of micro machining technology, the study of micro machining technology is being conducted in many countries. The goal of this study is to fabricate micro tool under the size of 30$\mu\textrm{m}$ and machine micro holes through micro tool fabrication by grinding, the application of ELID to grinding wheel and the measurement of surface roughness for micro tool.

• Journal of IKEEE
• /
• v.9 no.2 s.17
• /
• pp.101-107
• /
• 2005

This paper presents an one-chip controller for an electronic dispenser. The electronic dispenser is composed of electronic part and mechanical part. The electronic part is consisted of input keypad, micro-controller, display module, and pump module. In this paper we designed micro-controller for the electronic part. The micro-controller controls display module and pump module. The display module is composed by LCD device, and the pump module is composed by motor device . The micro-controller for an electronic dispenser is designed by VHDL. We used WX12864AP1 for the LCD device and SPS20 for the stepping motor. Also, the micro-controller is designed by Altera Quartus tool and verified with Agent 2000 Design-kit using APEX20K Device. In this paper, we present possibility to adopt of the biomedical device through the one-chip controller for the electronic dispenser.

• Proceedings of the SAREK Conference
• /
• 2009.06a
• /
• pp.1079-1083
• /
• 2009

In this study, the distribution of $CO_2$ in an evaporator with 10 parallel micro channel aluminum tubes are experimentally investigated. Each tube has 6 circular micro channels with a diameter of 0.8mm. The tubes are heated with electric resistance wires, and the distribution of $CO_2$ into each tube is investigated by measuring the outer wall temperature. The outer wall temperature was found to be higher at the exit part of the top tube. It is thought that the $CO_2$ vapor at the upper part of the header reduces the mass flow rate of $CO_2$ into the top tube.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.10a
• /
• pp.593-597
• /
• 2005

FIB equipment can perform sputtering and chemical vapor deposition simultaneously. It is very advantageously used to fabricate a micro structure part having 3D shape because the minimum beam size of ${\phi}$ 10nm and smaller is available. Currently FIB is not being applied in the fabrication of this micro part because of some problems to redeposition and charging effect of the substrate causing reduction of accuracy with regards to shape and productivity. Furthermore, the prediction of the material removal rate information should be required but it has been insufficient for micro part fabrication. The paper have the targets that are FIB-CVD characteristic analysis and minimum line pattern resolution achievement fur 3D micro fabrication. We make conclusions with the analysis of the results of the experiment according to beam current, pattern size and scanning parameters. CVD of 8 pico ampere shows superior CVD yield but CVD of 1318 pico ampere shows the pattern sputtered. And dwell time is dominant parameter relating to CVD yield.

• Current Applied Physics
• /
• v.18 no.11
• /
• pp.1368-1374
• /
• 2018

In this paper, forced vibration was used to regulate the droplet migration, fully recording the transient migration of droplets on a micro-textured substrate under the resonance frequency by a high-speed camera. The influence of resonance frequency and dynamic migration characteristics of droplets on the solid micro-texture surface under lateral vibration were researched. The experiment demonstrates that the driving force is caused by the difference between the left and right contact angles made the droplet oscillate and migrate, and as time t increases, the left and right contact points are periodically shifted and the amplitude of migration increases. Therefore, based on the droplet migration behavior and its force balance mechanism, a spring vibration model of migration behavior of the vibrating droplet micro unit was set up to predict the complete trajectory of its migration on a solid surface. The calculation results show that the theoretical displacement is less than the experimental displacement, and the longer the time, the larger the difference. Affected by the vibration, part of the droplet permeates through the micro-texture, resulting in the droplet losing height and the contact angle becoming smaller as well. While the other part of droplet overcomes the internal surface tension to migrate.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 1997.10a
• /
• pp.1061-1064
• /
• 1997

Micro injection molding technology is very important fiw mass product of micro structures or micro parts. And, it is so difficult that the molding technology of micro pole or thin wall(barrier rib) structures with high aspect ratio. In this stud). \vc intend to research on the basic technology of micro wall structure part:< with high aspect ratio by the inject~on moldins method. The mold for esperimenrs with micro multi-square structures was made by L, I(;A process. One square polc's size is 157 157pm. height 50011111. And the distance of each poles is 5011n1. 7'hus. molding products will be for~nctl like as the net structure with thin wall of about 50pn thickness.(aspect ratio 10) Ihrough the e~lxriment. \be obtained the prociuctr of micro multi-square slructure with bout 37.000 cell per a piece. 'Ihe micro injection molding process technolog for thin wall by multi-square structure mold was analy~cd.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2003.10a
• /
• pp.381-385
• /
• 2003

This paper presents the fabrication possibility of the micro actuator which uses a micro-thermal bubble, generated by a micro-heater under pulse heating. The micro-actuator is consist of three plate. The lower plate includes the channel and chamber are fabricated on high processability silicon wafer by the DRIE(Deep Reactive ion Etching) process. The middle plate includes the chamber and diaphragm, and the upper plate is the micro-heater. The micro-heater designed non-uniform width and results in periodic generation of stable single bubbles in D.I water. The single bubble appears precisely on the narrow part of the micro-heater and control is recorded.

• Proceedings of the KSME Conference
• /
• 2004.11a
• /
• pp.904-909
• /
• 2004

In this paper a web-based micro fabrication system is discussed. A commercial CAD and a web browser were used as its user interfaces. In these user interfaces the concepts of Design for Manufacturing (DFM) was implemented providing the fabrication knowledge of micro machining to the designers. Simple databases were constructed to store the fabrication knowledge of materials, tools, and micro machining know-how. The part geometry was uploaded to the web server of this system as an STL (Stereo Lithography) format with process parameters for 3-axis micro milling. A Slice-based process planner automatically provides NC codes for controlling micro stages. A couple of micro parts were fabricated using the system with micro endmills. This design and manufacturing system enables network users to obtain micro-scale prototypes in a rapid manner.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2004.10a
• /
• pp.170-173
• /
• 2004

In this paper a web-based micro fabrication system is discussed. A commercial CAD and a web browser were used as its user interfaces. For the user interfaces, the concepts of Design for Manufacturing (DFM) were implemented providing the fabrication knowledge of micro machining to the designers. Simple databases were constructed to store the fabrication knowledge of materials, tools, and micro machining know-how. The part geometry was uploaded to the web server of this system as an STL (Stereo Lithography) format with process parameters for 3-axis micro milling. A Slice-based process planner automatically provides NC codes for controlling micro stages. A couple of micro parts were fabricated using the system with micro endmills. This design and manufacturing system enables network users to obtain micro-scale prototypes in a rapid manner.

• Proceedings of the KIEE Conference
• /
• 2001.11c
• /
• pp.359-361
• /
• 2001

This paper reports on the development of Micro optical cross connector(MOXC) performance evaluation system using DAQ board and Labview. The system is composed of optical part, driving circuit and software part, this evaluation system can measure insertion loss, response time and life time of MOXC, this system canbe used in mass production of MOXC.