• Transactions of the Korean Society of Mechanical Engineers B
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• v.28 no.10
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• pp.1264-1270
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• 2004

In this paper research on micro solid propellant thruster is reported. Micro solid propellant thruster has four basic components; micro combustion chamber, micro nozzle, solid propellant and micro igniter. In this research igniter, solid propellant and combustion chamber are focused. Micro igniter was fabricated through typical micromachining and the effect of geometry was evaluated. The characteristic of solid propellant was investigated to observe burning characteristic and to obtain burning velocity. Change of thrust force and the amount of energy loss following scale down at micro combustion chamber were estimated by numerical simulation based on empirical data and through the calculation normalized specific impulses were compared to figure out the efficiency of combustion chamber.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1280-1285
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• 2004

Microsystem technology has been applied to space technology and became one of the enabling technology by which low cost and high efficiency are achievable. Micro propulsion system is a key technology in the miniature satellite because micro satellite requires very small and precise thrust force for maneuvering and attitude control. In this paper research on micro solid propellant thruster is reported. Micro solid propellant thruster has four basic components; micro combustion chamber, micro nozzle, solid propellant and micro igniter. In this research igniter, solid propellant and combustion chamber are focused. Micro igniter was fabricated through typical micromachining and evaluated. The characteristic of solid propellant was investigated to observe burning characteristic and to obtain burning velocity. Change of thrust force and the amount of energy loss following scale down at micro combustion chamber were estimated by numerical simulation based on empirical data and through the calculation normalized specific impulses were compared to figure out the efficiency of combustion chamber.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.36 no.5
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• pp.483-490
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• 2008

Minimization of nozzle induces many flow losses in micro-propulsion system. In this study, we studied about thermal transpiration based micro propulsion system to overcome these losses. Thermal transpiration device(Knudsen pump) having no moving parts can self-pump the gaseous propellant by temperature gradient only (cold to hot). We designed, fabricated the Knudsen pump and analyzed pressure gradient efficiency of membrane according to Knudsen number under vacuum condition. Experimental results showed that thick membranes are more effective than thin membranes in transition flow regime, and pressure gradient efficiency according to Knudsen number is increased to maximum 82% apart from membrane thickness in free molecular regime.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.1196-1200
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• 2004

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. In this study, a bubble-powered micropump was fabricated and tested. The micropump consists of two-parallel micro line heaters, a pair of nozzle-diffuser flow controller and a 1 mm in diameter, 400 ${\mu}m$ in depth pumping chamber. The two-parallel micro line heaters with 20 ${\mu}m-width$ and 200 ${\mu}m-length$ were fabricated to be embedded in the silicon dioxide layer of a wafer which serves as a base plate for the micropump. The pumping chamber, the pair of nozzle-diffuser unit and microchannels including the liquid inlet and outlet port were fabricated by etching through another silicon wafer. A glass wafer (thickness of $525{\pm}15$ ${\mu}m$) having two holes of inlet and outlet ports of liquid serve as upper plate of the pump. Finally the silicon wafer of the base plate, the silicon wafer of pumping chamber and the glass wafer were aligned and bonded (Si-Si bonding and anodic bonding). A sequential photograph of bubble nucleation, growth and collapse was visualized by CCD camera. Clearly liquid flow through the nozzle during the period of bubble growth and slight back flow of liquid at the end of collapsing period can be seen. The mass flow rate was found to be dependent on the duty ratio and the operation frequency. As duty ratio increases, flow rate decreases gradually when the duty ratio exceeds 60%. Also as the operation frequency increases, the flow rate of the micropump decreases slightly.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.36 no.12
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• pp.1643-1651
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• 2012

Recently, with increasing standards of living and income, environmental pollution has attracted increased interest. On account of a revision to water pollution regulations, the improvement of sewage disposal efficiency was studied. One of the ways to improve the sewage disposal efficiency is to increase the dissolved oxygen content of water in the water treatment tank. In this study, we suggest a nozzle design using a spiral and a crash mode for generating micro bubbles and thus increasing the dissolved oxygen content of water. The micro bubbles through the spiral and crash flows are generated in the nozzle. In the design of the crash mode, the development goal with regard to the bubble size was not achieved. On the other hand, a bubble size of $0-50{\mu}m$ accounted for 79.3% of all bubbles in the spiral mode. This study should contribute toward increasing the sewage disposal efficiency.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2003.05a
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• pp.147-150
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• 2003

The purpose of this research was to develope components of micro solid propellant thruster. Micro solid propellant thruster had four basic components: combustion chamber, nozzle, solid propellant and micro heater for ignition. A performance of micro heater and characteristic of solid propellant was investigated. Micro heater was fabricated by conventional MEMS process and Platinum layer was used for heating element. Effect of geometry parameters on micro heater was tested. The temperature responses of heater with respect to each parameters was compared for a given electrical power. The characteristic of solid propellant(HTPB/AP) was investigated to obtain burning velocity in small chamber. Additionally, a capacity of filling propellant with high viscosity in small chamber was checked to guarantee for the micro fabrication.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.04a
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• pp.275-280
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• 2001

Recently, the trends of industrial products grow more miniaturization, variety and mass production. Micro drilling which take high precision in cutting work is requested more micro hole and high speed working. Especially, Micro deep hole drilling is becoming more important in a wide spectrum of precision production industries, ranging from the production of automotive fuel injection nozzle, watch and camera parts, medical needles, and thick multi-layered Printed Circuit Boards(PCB) that are demanded for very high density electric circuitry. This paper shows the tool monitoring results of micro drill with tool dynamometer. And additionally, microscope with built-in monitor inspection show the relationship between burr in workpiece and chip form of micro drill machining.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.1051-1054
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• 2000

We developed the micro CSF (celebrospinal fluid) shunt valve with surface and bulk micromachining technology in polymer MEMS. This micro CSF shunt valve was formed with four micro check valves to have a membrane connected to the anchor with the four bridges. The up-down movement of the membrane made the CSF on & off and the valve characteristic such as open pressure was controlled by the thickness and shape of the bridge and the membrane. The membrane, anchor and bridge layer were made of the $O_2$ RIE (reactive ion etching) patterned Parylene thin film to be about 5~10 microns in thickness on the silicon wafer. The dimension of the rectangular nozzle is 0.2＊0.2 $\textrm{mm}^2$ and the membrane 0.45 mm in diameter. The bridge width is designed variously from 0.04 mm to 0.12 mm to control the valve characteristics. To protect the membrane and bridge in the CSF flow, we developed the packaging system for the CSF micro shunt valve with the deep RIE of the silicon wafer. Using this package, we can control the gap size between the membrane and the nozzle, and protect the bridge not to be broken in the flow. The total dimension of the assembled system is 2.5＊2.5 $\textrm{mm}^2$ in square, 0.8 mm in height. We could precisely control the burst pressure and low rate of the valve varing the design parameters, and develop the whole CSF shunt system using this polymer MEMS fabricated CSF shunt valve.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.8
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• pp.1441-1444
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• 2007

This paper presents a novel electrostatic drop-an-demand ejector with a conductive pole inside nozzle. The MEMS fabricated pole-type nozzle shows a significant improvement in the performance and reliability of forming meniscus and generating a micro dripping mode of droplet out of the meniscus. It is verified experimentally that the use of the pole-type nozzle. The liquid is used D20+SDS+SWNT (5 %wt). The gap between upper electrode and nozzle is about 600 um. Electrostatic drop-an-demand ejection is observed when a DC voltage of 1.5 kV is applied between the control electrode and ground electrode. Droplet diameter is $100{\mu}m$.

• 한국가시화정보학회:학술대회논문집
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• 2006.12a
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• pp.145-148
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• 2006

In order to design a micro-thruster which controls the altitude of a space vehicle for a very long lifetime, the flow field should be analyzed considering the nozzle geometry and the difference between stagnation and environmental pressures and so on. This paper describes the axisymmetric non-reacted computational results which were carried out to understand the basic flow phenomena according to the high nozzle pressure ratio. The area ratio is about 56 and the diameter of a nozzle exit is about 0.46 inch. The Mach cell and waves are predicted well.