• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.407-408
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• 2006

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.19-20
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• 2006

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.603-607
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• 2002

Recently, the need leer transporting and manipulating minute amount of fluids in microscale channels (so-called micro-fluidics) has been increasing, especially in biotechnology and biochemical processing. This work demonstrates that the mechano-chemical process which consists of mechanical abrasive action combined with chemical process can be used to fabricate micro-fluidic channels more rapidly and cost effectively than other methods. In this work, capillary filling of fluids in micro-channels was investigated by theoretical approaches and experiments. From the experimental results, it is expected that a complex micro-fluidic system can be fabricated using the micro- fabrication technique and microsystem packaging method described in this work.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.5
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• pp.99-103
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• 2012

Presently, A glass is widely used in telecommunication system, optoelectronic devices and micro electro mechanical systems. Micro drilling of glass using the laser can save processing cost and improve the accuracy. This paper experiments micro drilling using KrF excimer laser on the pyrex glass of $500{\mu}m$ thickness. We have experiment to find out optimum laser machining conditions of micro drilling of glass and ablation depth and influence by processing parameter suc'h pulse repetition rate, energy density and number of pulses. Pulse repetition rate don't influence ablation depth at the micro drilling of pyrex glass. Energy density influence micro drilling of parallelism and maximum thickness that can be drilled. Ablation depth is most influenced by number of pulses.

• Journal of Powder Materials
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• v.20 no.4
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• pp.285-290
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• 2013

$Ti_2AlN$ composites are a laminated compounds that posses unique combination of typical ceramic properties and typical metallic(Ti alloy) properties. In this paper, the powder synthesis, SPS sintering, composite characteristics and machinability evaluation were systematically conducted. The random orientation characteristics and good crystallization of the $Ti_2AlN$ phase are observed. The electrical and thermal conductivity of $Ti_2AlN$ is higher than that of Ti6242 alloy. A machining test was carried out to compare the effect of material properties on micro electrical discharge drilling for $Ti_2AlN$ composite and Ti6242 alloy. Also, mixture table as a kind of tables of orthogonal arrays was used to know how parameter is main effective at experimental design. Consequently, hybrid $Ti_2AlN$ ceramic composites showed good machining time and electrode wear shape under micro ED-drilling process. This conclusion proves the feasibility in the industrial applications.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.12 no.2
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• pp.623-628
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• 2011

Micro EDM(Electric Discharge Machining) is one of the most powerful technologies which are capable of fabricating micro-structure without any problems from high cutting force. However, there is a significant defect in the part machining with deep holes or pockets, because debris which are generated by electric discharging may frequently cause a short circuit between an electrode and workpiece material. Vibration flushing can reduce the undesirable phenomena with dynamic flow of EDM fluid in a deep and choked area. In this study, Vibration flushing with solenoid is suggested and the results show that the method can generate a remarkable EDM efficiency with high amplitude at a low frequency in comparison with current vibration flushing methods with high frequency using piezo actuators.

• Journal of the Korean Society of Industry Convergence
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• v.3 no.1
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• pp.83-90
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• 2000

The purpose of this study is the development of CAM system which can machine and measure any shape by CNC lathe. The overall goal of the CAM system is to achieve the CNC lathe machining, from roughing through to final measuring, The hardware of the system comprises PC, CNC lathe and measuring tools. There are three steps in the CNC lathe machining and measuring, (1) geometric modeling by the shape patterns, (2) NC commands generation by the tool path compensated for tool nose radius, (3) machining and workpiece measuring on the lathe. It is developed a software package, with which we can conduct a micro CAM system in the PC without economical burden.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2000.04a
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• pp.435-440
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• 2000

In this study, we aims to develop the machining technology for the ultra precision surface and profile accuracy. For this purpose, we construct the electrolytic in process grinding system (ELID grinding) and apply to the cylindrical and internal grinding. Through the various machining experiments such as SCM steel., ceramics, tungsten carbide etc., we have obtained nanometer surface roughness. And we have applied this mirror grinding technique to hydraulic manual valve and mold core of mini disk optical pick-up base. For the development of fine mechanical part machining technology, e have made multi fiber optical connector using fine grinding technology. And constructed micro drilling system with process monitoring system which is possible to drill 50${\mu}{\textrm}{m}$ diameter hole.

• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.1-6
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• 2023

In CO₂ laser surface machining of plastic films in modern display manufacturing, scattering of fume particles could be a major source of well-recognized film surface contamination. This computational fluid dynamics research investigates the suction air flow patterns over a film surface as well as the dispersion of micron-sized fume particles with low-Reynolds number particle drag model. The numerical results show the recirculatory flow patterns near laser machining point on film surface and also over the surface of vertical suction slot, which may hinder the efficient removal of fume particles from film surface. The dispersion characteristics of fume particles with various particle size have been tested systematically under different levels of suction flow intensity. It is found that suction removal efficiency of fume particles heavily depends on the particle size in highly nonlinear manners and a higher degree of suction does not always results in more efficient particle removal.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.22 no.2
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• pp.372-379
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• 1998

A new 6 degrees-of-freedom micro stage, based on parallel mechanisms and actuated by using piezoelectric elements, has been developed for the application of micro positioning such as semiconductor manufacturing devices, high precision optical measurement systems, and high accurate machining. The micro stage structure consists of a base platform and an upper platform(stage). The base platform can effectively generates planar motion with yaw motion, while the stage can do vertical motion with roll and pitch motions with respect to the base platform. This separated structure has an advantage of less interference among actuators. The forward and inverse kinematics of the micro stage are discussed. Also, through linearization of kinematic equations about an operating point on the assumption that the configuration of the micro stage remains essentially constant throughout a workspace is performed. To maximize the workspace of the stage relative to fixed frame, an optimal design procedure of geometric parameter is shown. Hardware description and a prototype are presented. The prototype is about 150mm in height and its base platform is approximately 94mm in diameter. The workspace of the prototype is obtained by computer simulation. Kinematic calibration procedure of the micro stage and its results are presented.