• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.482-486
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• 2004

The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its use in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies, such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries. This paper presents that the recent development and our research goals in FIB nano machining technology are given. The emphasis will be on direct milling, or chemical vapor deposition techniques (CVD), and this can distinguish the FIB technology from the contemporary photolithography process and provide a vital alternative to it. After an introduction to the technology and its FIB principles, the recent developments in using milling or deposition techniques for making various high-quality devices and high-precision components at the micro/nano meter scale are examined and discussed. Finally, conclusions are presented to summarize the recent work and to suggest the areas for improving the FIB milling technology and for studying our future research.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.04a
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• pp.294-299
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• 2001

The old technique of sandblasting which has been used for decoration of glass surface has recently been developed into a powder blasting technique for various materials, capable of producing micro structures larger than 100 m. This paper describes the performance of powder blasting technique in micro-line grooving of glass and the effect of the number of nozzle scanning on the depth and width of line groove. Experimental results showed that increasing the no. of nozzle scanning resulted in the increase of depth and width in grooves. Increase of width which may cause several problems in the precision machining results from wear of mask film.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.5
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• pp.198-204
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• 2007

This study was carried out to develope a flow control system using to supply PR(photo-resist) in the semi-conductor manufacturing process. The features of this system are to be able to measure the high viscosity and micro-flow. To meet above study object some ideas was induced to design a new concept valve with new material, multi-cross wheel, and new sealing method etc.. As the evaluations on the developed micro-flowmeter it was enough satisfied to use at the IT industries such as photo-resist process.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.3
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• pp.127-131
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• 2006

Existing orthopedic implants such as pedicle screw and spinal cage were designed to fix the spinal structure. But, nowadays, physicians want to rehabilitate there original functions. To achieve this request, we studied micro-movable structure for interspinous. As a first step, we designed interspinous structure by 3D CAD to join each spinous processes. Next, we simulate it with various factors such as the thickness of micro-movement structure and the design of clip. At last, we performed static compressive test to satisfy the failure load of 339N and dynamic endurance test of 1.2M cycle. As a result, we developed interspinous implant and did several surgery to evaluated its satisfaction.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.424-428
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• 2005

This paper shows a non-contact optical method to inspect micron scale parts which will be manufactured in micro-factory system. This inspection system should have some characteristics like a small size, flexibility, and high measuring speed. In the viewpoint of measuring capabilities, it also has resolution under micron scale with measuring range over millimeter scale. Two methods will be presented in this paper, one is Moire and the other is white-light scanning interferometry. Also some experimental results will be presented to show the possibilities of the proposed inspection system.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.04a
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• pp.173-178
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• 2003

Recently, according to the development of mechatronics industry that was composed of NT, ST, IT, RT and etc, the 1 necessity of nano-parts was increased. Because of the necessity, this research was started for improving work precision of the parts as fixing UPCU( Ultra Precision Cutting Unit)on lathe. So, in this research we executed the modeling of UPCU (Ultra Precision Cutting Unit) by the application of PZT, the relationship between the displacement of tool in UPCU and the cutting force of it has been in take a triangular position in the case of plane cutting. The modeling of system that is containing the fine displacement was performed. Also, we found like to find the optimal cutting condition through the simulation of relationship between the displacement and the cutting force.

• International Journal of Control, Automation, and Systems
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• v.6 no.3
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• pp.386-393
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• 2008

A position control method for interpolating aspherical grinding and polishing tool path was reviewed and experimented in a nano precision machine. The position-base algorithm was reformed from the time-base algorithm, proposed in the previous study. The characteristics of the algorithm were in the velocity control loop with position feedback. The aspherical surface was divided by an interval at which each velocity and acceleration were calculated. The theoretical velocity was corrected by position error during processing. In the experiment, a machine was constructed and nano-scale linear encoders were installed at each axis. Relation between process parameters and the variation of position error was monitored and discussed. The best result from optimized parameters showed that the accuracy was 150nm and improved from the previous report.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2000.04a
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• pp.591-596
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• 2000

The needs of ultra precision machined parts is increase every days. But the experimental data of nonferrous metal is insufficient. The cutting behavior in micro cutting area is different from that of traditional cutting because of the size effect. Al6061 is widely used as optical parts such as LASER reflector's mirror or multimedia instrument. Al6061 opper is machined by ultra precision machine with natural diamond tool. From the experiment and discussion on the cutting force and worked surface roughness as the variable spindle speed, feed rate and depth of cut. As a result, the cutting force increases as the increasing depth of cut, but the worked surface roughness does not increase so much. The surface roughness is good when spindle sped is above 1200rpm, and feed rate is small. The influence of depth of cut is very small.

• Journal of the Korean Society for Precision Engineering
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• v.2 no.3
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• pp.77-83
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• 1985

Adaptive control technique for a milling process is developed and implemented in an NC milling machine retrofitted to enable the micro-computer control. The control algorithm has the objects to guarantee the optimal tool life which can give the predetemined allowable lower limit of surface roughness. The experimental results show 1) that the extended tool life equation has good reliability in normal tool wear conditions. 2) and that the proposed adaptive control technique, which determine the optimal cutting condition by basing on the tool life equation modified continually according to the tool wear measured in real time, performs well.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.18 no.1
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• pp.36-41
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• 2009

This paper presents the development of a micro punching system with modified cymbal mechanism. To realize the micro punching, we introduced the hybrid system with a macro moving part and micro punching part. The macro moving part consists of a ball screw, a linear guide and the micro step motor and micro punching part includes the PZT actuators and displacement amplification device with modified cymbal mechanism. The PZT actuator is capable of producing very large force, but they provide only limited displacements which are several micro meters. Thus the displacement amplification device is necessary to make those actuators more efficient and useful. For this purpose, a cymbal mechanism in series is proposed. The finite element method was used to design the cymbal mechanism and to analyze the mode shape of the one. The displacement and mode shape error between the FEM results and experiments are within 10%. A considerable design effort has been focused on optimizing the flexure hinge to increase the output displacement and punching force.