• Title/Summary/Keyword: Micro feature

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Manufacturing Mechanism of FIB-CVD using Focused Ion Beam (집속이온빔의 가공 공정 메카니즘 연구)

  • 강은구;최병열;이석우;홍원표;최헌종
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.10a
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    • pp.925-928
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    • 2004
  • The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its use in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries. This paper was carried out some experiments and verifications of mechanism on FIB-CVD using SMI8800 made by Seiko. FIB-CVD has in fact proved to be commercially useful for repair processes because the beam can be focused down to 0.05$\mu\textrm{m}$ dimensions and below and because the same tool can be used to sputter off material with sub-micrometer precision simply by turning off the gas ambient. Recently the chemical vapour deposition induced ion beam has been required more deposition rate and accurate pattern because of trying to manufacture many micro and nano parts. Therefore this paper suggested the optimization parameters and discussed some mechanism of chemical vapour deposition induced ion beam on FIB-CVD for simple pattern.

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Structural Characteristic Analysis of an Ultra-Precision Machine for Machining Large-Surface Micro-Features (초정밀 대면적 미세 형상 가공기의 구조 특성 해석)

  • Kim, Seok-Il;Lee, Won-Jae
    • Proceedings of the KSME Conference
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    • 2007.05a
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    • pp.1469-1474
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    • 2007
  • In recent years, research to machine large-surface micro-features has become important because of the light guide panel of a large-scale liquid crystal display and the bipolar plate of a high-capacity proton exchange membrane fuel cell. In this study, in order to realize the systematic design technology and performance improvements of an ultra-precision machine for machining the large-surface micro-features, a structural characteristic analysis was performed using its virtual prototype. The prototype consisted of gantry-type frame, hydrostatic feed mechanisms, linear motors, brushless DC servo motor, counterbalance mechanism, and so on. The loop stiffness was estimated from the relative displacement between the tool post and C-axis table, which was caused by a cutting force. Especially, the causes of structural stiffness deterioration were identified through the structural deformation analysis of sub-models.

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Effect of Mold Temperature on Injection Molding of Micro-Features with High Aspect Ratio (고세장비 미세형상 사출성형시 금형온도의 영향 고찰)

  • Park, Jung-Min;Do, Bum-Suk;Eom, Hye-Ju;Park, Keun
    • Proceedings of the KSME Conference
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    • 2008.11a
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    • pp.1124-1128
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    • 2008
  • Thin-wall injection molding is associated with many advantages, including increased portability, the conserving of materials, and the reduction of the molding cycle times. In the application of the thin-wall molding, a considerable reduction of the effective flow thickness results in filling difficulty. High-frequency induction is an efficient way to overcome this filling difficulty by means of heating the mold surface by electromagnetic induction. The present study applies the induction heating to the injection molding of thinwalled micro structures with high aspect ratio. The feasibility of the proposed heating method is investigated through a numerical analysis. The estimated filling characteristics of the micro-features are investigated with variations of mold temperature and part thickness, of which results are also compared with experimental measurements.

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Vibration Analysis for a Gimbal Structure of a Micro Wave Seeker(I) : Experimental Modal Analysis (마이크로 웨이브 탐색기의 김발 구조물 진동해석(I) : 실험모드해석)

  • Lee, Sock-Kyu;Chang, Young-Bae;Lee, Jin-Koo;Kwon, Byung-Hyun;Park, Young-Pil
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2000.06a
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    • pp.508-513
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    • 2000
  • Micro wave seeker detects micro wave signal reflecting from a object and modifies the angle of a antenna in the direction of a reflecting signal. Gimbal structure makes a motion in the direction of an elevation axis and an azimuth axis and change the direction of a missile toward a object. As before, Micro wave seeker is a important part of a missile. Especially, gimbal structure is designed to resist a external force generated by a strong propelling power. For that reason, it is essential to analyze a vibration feature of gimbal structure. In this paper, we analyze dynamic characteristics of a gimbal structure of a micro wave seeker. And we measure frequency response functions of a gimbal structure in order to investigate the effect of a pre-load on bearing.

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In-vitro study on the hemorheological characteristics of chicken blood in microcirculation

  • Ji, Ho-Seong;Lee, Jung-Yeop;Lee, Sang-Joon
    • Korea-Australia Rheology Journal
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    • v.19 no.2
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    • pp.89-95
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    • 2007
  • The flow characteristics of chicken blood in a micro-tube with a $100{\mu}m$ diameter are investigated using a micro-Particle Image Velocimetry (PIV) technique. Chicken blood with 40% hematocrit is supplied into the micro-tube using a syringe pump. For comparison, the same experiments are repeated for human blood with 40% hematocrit. Chicken blood flow has a cell-free layer near the tube wall, and this layer's thickness increases with the increased flow speed due to radial migration. As a hemorheological feature, the aggregation index of chicken blood is about 50% less than that of human blood. Therefore, the non-Newtonian fluid features of chicken blood are not very remarkable compared with those of human blood. As the flow rate increases, the blunt velocity profile in the central region of the micro-tube sharpens, and the parabolicshaped shear stress distribution becomes to have a linear profile. The viscosity of both blood samples in a low shear rate condition is overestimated, while the viscosity in a high shear rate range is underestimated due to radial migration and the presence of a cell-depleted layer.

A study on local facial features using LDP (LDP를 이용한 지역적 얼굴 특징 표현 방법에 관한 연구)

  • Cho, Young Tak;Jung, Woong Kyung;Ahn, Yong Hak;Chae, Ok Sam
    • Convergence Security Journal
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    • v.14 no.5
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    • pp.49-56
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    • 2014
  • In this paper, we proposed a method for representing local facial features based on LDP (Local Directional Pattern). To represent both PFF (Permanent Facial Features) and TFF (Transient Facial Features) effectively, the proposed method configure local facial feature vectors based on overlapped blocks for each facial feature in the forms of various size and shape. There are three advantages - it take advantages of geometric feature based method; it shows robustness about detection error using movement characteristics of each facial feature; and it shows reduced sampling error because maintain spatial information caused by block size variability. Proposed method shows better classification accuracy and reduced amount of calculation than existing methods.

A Study of Injection Mold Manufacturing for Ultra-Thin Walled Plate (초박판 사출성형특성 분석을 위한 금형제작에 관한 연구)

  • Lee, Sung-Hee;Ko, Young-Bae;Lee, Jong-Won;Kim, Sung-Kyu;Yang, Jin-Suk;Heo, Young-Moo
    • Design & Manufacturing
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    • v.2 no.5
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    • pp.11-15
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    • 2008
  • A micro-injection mold for ultra-thin-walled plate was considered in this work. The proposed mold system is for the fabrication of ultra-thin walled plastic plate with micro features by injection molding. As the injection molding of thin-walled plastic, which has the thickness under $400{\mu}m$, itself is not easy, the injection molding of the micro-features in the thin-walled structure is more complicated and difficult. To investigate the basic phenomenon of the ultra-thin walled part during the injection molding process, design of the part and mold system were performed in the present study. The injection molding and structural analysis of the suggested part and mold system were also performed. Consequently, injection molding system for ultra-thin walled plate with micro features were manufactured and presented.

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A Novel Cell Count Method Using Micro Lattice Engraved On A Culture Dish (미세 격자가 형성된 배양 접시를 이용한 새로운 세포 계수 방법)

  • Son, Sang-Uk;Choi, Yo-Han;Lee, Seung-Seob
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.28 no.8 s.227
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    • pp.1183-1189
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    • 2004
  • A novel cell count method, which can improve the count efficiency and reduce contamination problem, was presented using micro lattice engraved on culture dish. The micro lattice has feature of $50{\mu}m{\times}50{\mu}m$ rectangular shape, $2{\mu}m$ line width, and $2{\mu}m$ depth in $3mm{\times}3mm$ area. In this paper, nickel mold was fabricated with thickness of 3mm and diameter of 80 mm, and transcription of the micro lattice on a polystyrene cell culture dish was performed by hot embossing at $200\;^{\circ}C$. The tedious and error-prone harvest/load processes of conventional cell counts with a hemocytometer could be omitted, and these advantages became magnified during periodical counts involving long-term cultures. SupT1 cells and HeLa cells were cultivated with the dish for 7 days in $CO_2$ incubator and counted as $371.84/mm^2$ and $123.36/mm^2$, respectively, during the cultivation without harmful effects on the cells.

A Study on the Wear Condition Diagnosis of Grinding Wheel in Micro Drill-bit Grinding System (마이크로 드릴비트 연마 시스템 연삭휠의 마모 진단 연구)

  • Kim, Min-Seop;Hur, Jang-Wook
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.21 no.3
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    • pp.77-85
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    • 2022
  • In this study, to diagnose the grinding state of a micro drill bit, a sensor attachment location was selected through random vibration analysis of the grinding unit of the micro drill-bit grinding system. In addition, the vibration data generated during the drill bit grinding were collected from the grinding unit for the grinding wheels under the steady and worn conditions, and data feature extraction and dimension reduction were performed. The wear of the micro-drill-bit grinding wheel was diagnosed by applying KNN, a machine-learning algorithm. The classification model showed excellent performance, with an accuracy of 99.2%. The precision, recall and f1-score were higher than 99% in both the steady and wear conditions.

Local Binary Feature and Adaptive Neuro-Fuzzy based Defect Detection in Solar Wafer Surface (지역적 이진 특징과 적응 뉴로-퍼지 기반의 솔라 웨이퍼 표면 불량 검출)

  • Ko, JinSeok;Rheem, JaeYeol
    • Journal of the Semiconductor & Display Technology
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    • v.12 no.2
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    • pp.57-61
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    • 2013
  • This paper presents adaptive neuro-fuzzy inference based defect detection method for various defect types, such as micro-crack, fingerprint and contamination, in heterogeneously textured surface of polycrystalline solar wafers. Polycrystalline solar wafer consists of various crystals so the surface of solar wafer shows heterogeneously textures. Because of this property the visual inspection of defects is very difficult. In the proposed method, we use local binary feature and fuzzy reasoning for defect detection. Experimental results show that our proposed method achieves a detection rate of 80%~100%, a missing rate of 0%~20% and an over detection (overkill) rate of 9%~21%.