• 한국진공학회:학술대회논문집
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• 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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• pp.188-188
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• 2000

DLC (Diamond-Like Carbon) 박막은 높은 경도와 가시광선 및 적외선 영역에서의 광 투과도, 전기적 절연성, 화학적 안정성 및 저마찰.내마모 특성 등의 우수한 물리.화학적인 물성을 갖고 있기 때문에 여러 분야의 응용연구가 이루어지고 있다. 이러한 DLC 박막을 제작하는 과정에는 여러 가지가 있으나, 본 연구에서는 ECR-PECVD electron cyclotron resonance plasma enhanced chemical vapor deposition) 방법을 사용하였다. 이것은 최근에 많이 이용되고 있는 방법으로, 이온화률이 높을뿐만 아니라 상온에서도 성막이 가능하고 넓은 진공도 영역에서 플라즈마 공정이 가능한 장점이 있다. 기판으로는 4" 크기의 S(100)를 사용하였고, 박막을 제작하기 전에 진공 중에서 플라즈마 전처리를 하였다. 플라즈마 전처리는 Ar 가스를 150SCCM 주입시켜 5$\times$10-1 torr 의 진공도를 유지시키면서, ECR power를 700W로 고정하고, 기판 bias 전압을 -300 V로 하여 5분 동안 기판을 청정하였다. DLC 박막은 ECR power를 700W. 가스혼합비와 유량을 CH4/H2 : 10/100 SCCM, 증착시간을 2시간으로 고정하고, 기판 bias 전압을 0, -50, -75, -100, -150, -200V로 변화시켜가면서 제작하였다. 이때 ECR 소스로부터 기판까지의 거리는 150mm로 하였고, 진공도는 2$\times$10-2torr 였으며, 기판 bias 전압은 기판에 13.56 MHz의 RF power를 연결하여 RF power에 의해서 유도되는 negative DC self bias 전압을 이용하였다. 제작된 박막을 Auger electron spectroscopy, elastic recoil detection, Rutherford backscattering spectroscopy, X-ray diffraction, secondary electron microscopy, atomic force microscoy, $\alpha$-step, Raman scattering spectroscopu, Fourier transform infrared spectroscopy 및 micro hardness tester를 이용하여 기판 bias 전압이 DLC 박막의 특성에 미치는 영향을 조사하였다. 분석결과 본 연구에서 제작된 DLC 박막은 탄소와 수소만으로 구성되어 있으며, 비정질 상태임을 알 수 있었다. 기판 bias 전압의 증가에 따라 박막의 두께가 감소됨을 알 수 있었고, -150V에서는 박막이 거의 만들어지지 않았으며, -200V에서는 기판 표면이 식각되었다. 이것은 기판 bias 전압과 ECR 플라즈마에 의한 이온충돌 효과 때문으로 판단되며, 150V 이하에서는 증착되는 양보다 re-sputtering 되는 양이 더 많을 것으로 생각된다. 기판 bias 전압을 증가시킬수록 플라즈마에 의한 이온충돌 현상이 두드러져 탄소와 결합하고 있던 수소원자들이 떨어져 나가는 탈수소화 (dehydrogenation) 현상을 확인할 수 있었으며, 이것은 C-H 결합에너지가 C-C 결합이나 C=C 결합보다 약하여 수소 원자가 비교적 해리가 잘되므로 이러한 현상이 일어난다고 판단된다. 결합이 끊어진 탄소 원자들은 다른 탄소원자들과 결합하여 3차원적 cross-link를 형성시켜 나가면서 내부 압축응력을 증가시키는 것으로 알려져 있으며, hardness 시험 결과로 이것을 확인할 수 있었다. 그리고 표면거칠기는 기판 bias 전압을 증가시킬수록 더 smooth 해짐을 확인하였다.인하였다.

• 한국자원식물학회:학술대회논문집
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• 한국자원식물학회 2019년도 춘계학술대회
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• pp.64-64
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• 2019

In order to evaluate the taxonomical relevance of seeds morphological characteristics, a macroand micro-morphological study was conducted on seeds of Korean Vicia (Fabacea). We collected 19 taxa of genus Vicia distributed in Korea and introduced one taxa from USDA. The morphological characteristic and testa texture of seeds were investigated using a Stereo-microscope (SM) and Scanning Electron Microscope (SEM). Most of Vicia seeds were found spherical or oblong and some seeds were oval and subglose. The largest seed was V. chosenensis ($4.3{\times}3.6{\times}2.6mm$), and the smallest was V. teterasperma ($1.7{\times}1.7{\times}1.5mm$). V. chosenensis and V. hirsuta were separated from other Vicia species by having a shiny in seed finish. In hilum shape, 14 species have linear and V. sepium was distinguished by having a circumlinear. In testa texture, they developed papilae, only V. hirsuta has lophate in level type. Deposition of the sheet-like debris between the papilae was observed in V. chosenensis, V. cracca, and V. unijuga. Polymorphism information content (PIC) values of the 13 qualitative morphological characters (QMC) were in the range of 0.0950 to 8863 with an average of 0.4611. PIC value of seed shape, seed colour, hilum colour were 0.7403, 0.8177, 0.883 respectively. Cluster analysis based on QMC detected three main clades. V. cracca, V. amurensis, V. amoena were involved in Group 1 and V. unijuga f. minor, V. unijuga, V. unijuga f. angustifolia, V. sepium, V. hirticalycina, V. hirsuta, V. linearfolia, V. chosenensis, V. pseudorobus, V. venosa var. cuspidata were involved in Group 2. V. nipponica, V. japonica, V. villosa, V. dasicarpa, V. bungei, V. angustifolia, V. tetrasperma were clustered in Group 3. Our research suggests that morphological characteristic and testa texture of seeds could be used as definers for the identification of genus Vicia.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.154-155
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• 2012

The promise of nano-crystalites (nc) as a technological material, for applications including display backplane, and solar cells, may ultimately depend on tailoring their behavior through doping and crystallinity. Impurities can strongly modify electronic and optical properties of bulk and nc semiconductors. Highly doped dopant also effect structural properties (both grain size, crystal fraction) of nc-Si thin film. As discussed in several literatures, P atoms or radicals have the tendency to reside on the surface of nc. The P-radical segregation on the nano-grain surfaces that called self-purification may reduce the possibility of new nucleation because of the five-coordination of P. In addition, the P doping levels of ${\sim}2{\times}10^{21}\;at/cm^3$ is the solubility limitation of P in Si; the solubility of nc thin film should be smaller. Therefore, the non-activated P tends to segregate on the grain boundaries and the surface of nc. These mechanisms could prevent new nucleation on the existing grain surface. Therefore, most researches shown that highly doped nc-thin film by using conventional PECVD deposition system tended to have low crystallinity, where the formation energy of nucleation should be higher than the nc surface in the intrinsic materials. If the deposition technology that can make highly doped and simultaneously highly crystallized nc at low temperature, it can lead processes of next generation flexible devices. Recently, we are developing a novel CVD technology with a neutral particle beam (NPB) source, named as neutral beam assisted CVD (NBaCVD), which controls the energy of incident neutral particles in the range of 1~300eV in order to enhance the atomic activation and crystalline of thin films at low temperatures. During the formation of the nc-/pm-Si thin films by the NBaCVD with various process conditions, NPB energy directly controlled by the reflector bias and effectively increased crystal fraction (~80%) by uniformly distributed nc grains with 3~10 nm size. In the case of phosphorous doped Si thin films, the doping efficiency also increased as increasing the reflector bias (i.e. increasing NPB energy). At 330V of reflector bias, activation energy of the doped nc-Si thin film reduced as low as 0.001 eV. This means dopants are fully occupied as substitutional site, even though the Si thin film has nano-sized grain structure. And activated dopant concentration is recorded as high as up to 1020 #/$cm^3$ at very low process temperature (＜ $80^{\circ}C$) process without any post annealing. Theoretical solubility for the higher dopant concentration in Si thin film for order of 1020 #/$cm^3$ can be done only high temperature process or post annealing over $650^{\circ}C$. In general, as decreasing the grain size, the dopant binding energy increases as ratio of 1 of diameter of grain and the dopant hardly be activated. The highly doped nc-Si thin film by low-temperature NBaCVD process had smaller average grain size under 10 nm (measured by GIWAXS, GISAXS and TEM analysis), but achieved very higher activation of phosphorous dopant; NB energy sufficiently transports its energy to doping and crystallization even though without supplying additional thermal energy. TEM image shows that incubation layer does not formed between nc-Si film and SiO2 under later and highly crystallized nc-Si film is constructed with uniformly distributed nano-grains in polymorphous tissues. The nucleation should be start at the first layer on the SiO2 later, but it hardly growth to be cone-shaped micro-size grains. The nc-grain evenly embedded pm-Si thin film can be formatted by competition of the nucleation and the crystal growing, which depend on the NPB energies. In the evaluation of the light soaking degradation of photoconductivity, while conventional intrinsic and n-type doped a-Si thin films appeared typical degradation of photoconductivity, all of the nc-Si thin films processed by the NBaCVD show only a few % of degradation of it. From FTIR and RAMAN spectra, the energetic hydrogen NB atoms passivate nano-grain boundaries during the NBaCVD process because of the high diffusivity and chemical potential of hydrogen atoms.

• 동굴
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• 제68호
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• pp.23-73
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• 2005

Purpose of study; The purpose of this study is specifically classified as two parts. The one is to attempt the chronological annals of Quaternary topographic surface through the study over the formation process of alluvial surfaces in our country, setting forth the alluvial surfaces lower-parts of Han River area, as the basic deposit, and comparing it to the marginal landform surfaces. The other is to attempt the classification of micro morphology based on the and condition premising the land use as a link for the regional development in the lower-parts of Han river area. Reasons why selected the Lower-parts of Han river area as study objects: 1. The change of river course in this area is very serve both in vertical and horizontal sides. With a situation it is very easy to know about the old geography related to the formation process of topography. 2. The component materials of gravel, sand, silt and clay are deposited in this area. Making it the available data, it is possible to consider about not oかy the formation process of topography but alsoon the development history to some extent. 3. The earthen vessel, a fossil shell fish, bone, cnarcoal and sea-weed are included in the alluvial deposition in this area. These can be also valuable data related to the chronological annals. 4. The bottom set conglometate beds is also included in the alluvial deposits. This can be also valuable data related to the research of geomorphological development. 5. Around of this area the medium landform surface, lower landform surface, pediment and basin, are existed, and these enable the comparison between the erosion surfaces and the alluvial surfaces. Approach : 1. Referring to the change of river beds, I have calculated the vertical and horizontal differences comparing the topographic map published in 1916 with that published in 1966 and through the field work 2. In classifying the landform, I have applied the method of micro morphological classification in accordance with the synthetic index based upon the land conditions, and furthermore used the classification method comparing the topographic map published in 1916 and in that of 1966. 3. I have accorded this classification with the classification by mapping through appliying the method of classification in the development history for the field work making the component materials as the available data. 4. I have used the component materials, which were picked up form the outcrop of 10 places and bored at 5 places, as the available data. 5. I have referred to Hydrological survey data of the ministry of Construction (since 1916) on the overflow of Han-river, and used geologic map of Seoul metropolitan area. Survey Data, and general map published in 1916 by the Japanese Army Survbey Dept., and map published in 1966 by the Construction Research Laboratory and ROK Army Survey Dept., respectively. Conclusion: 1. Classification of Morphology: I have added the historical consideration for development, making the component materials and fossil as the data, to the typical consideration in accordance with the map of summit level, reliefe and slope distribution. In connection with the erosion surface, I have divided into three classification such as high, medium and low-,level landform surfaces which were classified as high and low level landform surfaces in past. furthermore I have divided the low level landform surface two parts, namely upper-parts(200-300m) and bellow-parts(${\pm}100m$). Accordingly, we can recognize the three-parts of erosion surface including the medium level landform surface (500-600m) in this area. (see table 22). In condition with the alluvial surfaces I have classified as two landform surfaces (old and new) which was regarded as one face in past. Meamwhile, under the premise of land use, the synthetic, micro morphological classification based upon the land condition is as per the draw No. 19-1. This is the quite new method of classification which was at first attempted in this country. 2. I have learned that the change of river was most severe at seeing the river meandering rate from Dangjung-ni to Nanjido. As you seee the table and the vertical and horizontal change of river beds is justly proportionable to the river meandering rate. 3. It can be learned at seeing the analysis of component materials of alluvial deposits that the component from each other by areas, however, in the deposits relationship upper stream, and between upper parts and below parts I couldn't always find out the regular ones. 4. Having earthern vessel, shell bone, fossil charcoal and and seaweeds includen in the component materials such as gravel, clay, sand and silt in Dukso and Songpa deposits area. I have become to attempt the compilation of chronicle as yon see in the table 22. 5. In according to hearing of basemen excavation, the bottom set conglomerate beds of Dukso beds of Dukso-beds is 7m and Songpa-beds is 10m. In according to information of dredger it is approx. 20m in the down stream. 6. Making these two beds as the standard beds, I have compared it to other beds. 7 The coarse sand beds which is covering the clay-beds of Dukso-beds and Nanjidobeds is shown the existence of so-called erosion period which formed the gap among the alluvial deposits of stratum. The former has been proved by the sorting, bedding and roundness which was supplied by the main stream and later by the branch stream, respectively. 8. If the clay-beds of Dukeo-bed and Songpa-bed is called as being transgressive overlap, by the Eustatic movement after glacial age, the bottom set conglomerate beds shall be called as being regressive overlap at the holocene. This has the closest relationship with the basin formation movement of Seoul besides the Eustatic movement. 9. The silt-beds which is the main component of deposits of flood plain, is regarded as being deposited at the Holocene in the comb ceramic and plain pottery ages. This has the closest relationship with the change of river course and river beds.

• 청정기술
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• 제21권1호
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• pp.68-75
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• 2015

본 연구에서는 높은 열전도성을 갖는 금속-세라믹 core-shell 구조의 CoAl₂O₄@Al 복합체를 Al 금속의 수열반응을 통하여 합성하고, 이를 Rh 촉매의 담지체로 적용하여 구조적, 촉매화학적 특성을 분석하였다. Rh/CoAl₂O₄@Al (3 wt% Rh) 촉매는 단순침적법(incipient wetness impregnation)으로 제조하였고, 특성의 비교평가를 위하여 공침법(co-precipitation)으로 합성한 CoAl₂O₄를 담지체로 하여 Rh/CoAl₂O₄ (3 wt% Rh) 촉매를 단순침적법으로 제조하였다. 이들 촉매들은 N₂ 흡착, XRD, 전자 주사현미경, temperature programmed reduction (TPR), CO 화학흡착 분석을 통해서 그 특성을 분석하였고, 글리세롤 수증기 개질 반응(550 ℃)을 통한 수소전환반응에 적용하여 촉매적 특성을 평가하고 분석하였다. 글리세롤 수증기 개질반응에 대하여 Rh/CoAl₂O₄@Al 촉매는 Rh/CoAl₂O₄ 촉매에 비하여 약 2.8배 높은 글리세롤 전환 turnover frequency (TOF)를 보여주었고, 이는 높은 열전도성을 갖는 금속-세라믹 복합체를 통한 원활한 반응열의 전달에 기인한 것으로 분석되었다. CoAl₂O₄@Al 및 CoAl₂O₄ 담지체에서도 환원에 의하여 노출된 일부 Co 금속에 의한 촉매적 활성이 관찰되었는데, Rh/CoAl₂O₄@Al과 Rh/CoAl₂O₄ 촉매에서와 마찬가지로 core-shell 구조체인 CoAl₂O₄@Al이 CoAl₂O₄ 보다 높은 촉매적 활성을 보였다. 그러나, 이들 촉매는 글리세롤 개질반응에서 비교적 높은 비활성화를 보여주었고 이는 촉매표면의 탄소침적(coking)에 기인한 것으로 판명되었다.