• KSTLE International Journal
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• v.9 no.1_2
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• pp.10-12
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• 2008

Silicon micro-patterns were fabricated on Si (100) wafers using photolithography and DRIE (Deep Reactive Ion Etching) fabrication techniques. The patterned shapes included micro-pillars and micro-channels. After the fabrication of the patterns, the patterned surfaces were chemically modified by coating Z-DOL (perfluoropolyether, PFPE) thin films. The surfaces were then evaluated for their micro-friction behavior in comparison with those of bare Si (100) flat, Z-DOL coated Si (100) flat and uncoated Si patterns. Experimental results showed that the chemically treated (Z-DOL coated) patterned surfaces exhibited the lowest values of coefficient of friction when compared to the rest of the test materials. The results indicate that a combination of both the topographical and chemical modification is very effective in reducing the friction property. Combined surface treatments such as these could be useful for tribological applications in miniaturized devices such as Micro/Nano-Electro-Mechanical-Systems (MEMS/NEMS).

• Journal of the Korean Society of Visualization
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• v.4 no.2
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• pp.32-36
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• 2006

Recently there are many researches about single flow and two-phase flow phenomena in the mini and microchannel. But from this result the principle in the microchannel was not explained clearly. In this paper two-phase flow pattern was visualized in the micro-multi-branched-channel using a high speed camera. Microchannel was fabricated with PDMS and glass slide. The velocity profile was obtained by a Micro PIV. Then flow boiling at the near inlet area was occurred and vapor was moved in the micro-multi-branched-channel.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.10
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• pp.128-139
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• 1998

In this paper, a finite element method for predicting the temperature and stress distributions in micro-machining is presented. The work material is oxygen-free-high-conductivity copper(OFHC copper) and its flow stress is taken as a function of strain, strain rate and temperature in order to reflect realistic behavior in machining process. From the simulation, a lot of information on the micro-machining process can be obtained; cutting force, cutting temperature, chip shape, distributions of temperature and stress, etc. The calculated cutting force was found to agree with the experiment result with the consideration of friction characteristics on chip-tool contact region. Because of considering the tool edge radius, this cutting model using the finite element method can analyze the micro-machining with the very small depth of cut, almost the same size of tool edge radius, and can observe the 'size effect' characteristic. Also the effects of temperature and friction on micro-machining were investigated.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09b
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• pp.778-779
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• 2006

Manufacturing technologies of micro parts were studied in nano grained Al-1.5mass%Mg alloy. During compressive test at $300^{\circ}C$, the Al alloy showed stain softening phenomenon by grain boundary sliding regardless of strain rate. Micro spur gear with ten teeth (height of $200{\mu}m$ and pitch of $250{\mu}m$) was fabricated with sound shape by micro forging. During micro forging, increase of applied stress induced by friction between material and die surface was effectively compensated by decrease of stress by strain softening behavior and as a result, flow stress increased only about 50 MPa more than that in compressive test

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1999.05a
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• pp.51-55
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• 1999

Recently, manufacturing work has been transformed to advanced technology intensive form from mass production with a little items required in the past. It was demanded that superior workpiece surface integrity. However, the study of ductile mode machining was proceeded actively.In this paper, it is developed Ultra-Micro Indentation Device using the PZT actuator. Experimentally, by using theUltra-Micro Indentation device, the micro fracture behavior of the silicon wafer was invesgated. It was possible that ductile-brittle transition point in ultimate surface of brittle material can be detected by adding an acoustic emission sensor system to the Ultra-Micro Indentation apparatus.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2000.06a
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• pp.19-23
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• 2000

Stiction is an undesirable phenomenon that can be encountered often in Micro-Electro Mechanical Systems (MEMS) applications, In order to minimize this effect, Self-Assembled Monolayers (SAM) are commonly used. In this work the frictional characteristics of SAM are investigated using both micro-tribotester and SPM. It was found that the performance of SAM is quite sensitive to coating condition. The experimental results show promise for SAM to be used in sliding applications of micro systems.

• Tribology and Lubricants
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• v.16 no.4
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• pp.253-258
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• 2000

Frictional behavior of wire electric discharge machined surfaces of spheroidized annealed STDll steel was investigated. The surfaces were produced with a various series of finish cuts where pulse energy was reduced with increase in the number of finish cuts. Roughness and micro-hardness of the surfaces were also measured. It is observed that the increase in the number of finish cuts produces the surface exhibiting lower frictional resistance followed by higher resistance after considerable wear. Effects of finish cuts on the friction characteristics are discussed with the aid of roughness and micro-hardness of the surfaces.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.32.5-32
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• 2001

There has been many teleoperation systems handling the micro object. However, the stability problem for these systems has not been mentioned yet. Historically, Lawrence[1] proposed the Transparency-Optimized Architecture and passivity theorem for stability analysis of bilateral teleoperation. He claimed that unless the task(or environment) impedance contains significance inertial behavior, Passivity condition for Transparency-optimized architecture is not satisfied. In this paper we propose one method which satisfies passivity condition for the micro-teleoperation system handling a insignificant inertial object and is based on the structure of Lawrence and Hashtrudi-Zaad[2] and velocity-force scaling.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.10a
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• pp.93-96
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• 2003

Recently, various bulk metallic glasses (BMG's) haying good mechanical and chemical properties were developed. BMG's can easily be deformed in the supercooled liquid region, via viscous flow mechanism. In our previous work, we evaluated the deformation behavior and some other basic properties of Z $r_{41.2}$ $Ti_{13.8}$C $u_{12.5}$N $i_{10}$B $e_{22.5}$ alloy. In this study, we investigated the micro forming of Z $r_{41.2}$ $Ti_{13.8}$C $u_{12.5}$N $i_{10}$B $e_{22.5}$ alloy. The process condition was chosen based on the viscosity data from TMA, and superalloy and Si wafer with micro patterns on the surface were used as forming die. The alloy showed good replication of the patterns. However, some stripe patterns, resembling scratches, appeared on the deformed alloy surface. These scratches can be reduced or eliminated by polishing before forming.ing.ore forming.ing.

• Korean Journal of Materials Research
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• v.20 no.11
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• pp.581-585
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• 2010

High strength sheet steels for automobile are seriously compromised by hydrogen embrittlement. This issue has been continuously studied, but the field of interest, which lies between microstructural characteristics and hydrogen behavior with hydrogen charging, has not yet been thoroughly investigated. This study was done to investigate the behavior of hydrogen according to the hydrogen volume fraction on 590MPa grade DP steels, which are developed under hydrogen charging conditions as high strength sheet steels for automobiles. The penetration depths and the mechanical properties, according to charging conditions, were investigated through the distribution of micro-hardness and the microstructural observation of the subsurface zone. It was found that the amount of hydrogen trapping in 590MPa DP steels was related to the austenite volume fraction. It was confirmed that the distribution of micro-hardnesses according to the depth of the subsurface zone under the free surface showed the relationship of the depth of the hydrogen saturation between the charging conditions.