• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권2호
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• pp.140-148
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• 2000

In this paper, using surface micromachining technology with thick photoresist and aluminum, an SLM(Spatial Light Modulator), which is applied to the fields of adaptive optics and pattern recognition system, was fabricated and the electromechanical properties of the fabricated micro SLM are measured. In order to maximize fill-factor and remove mechanical coupling between micro SLM actuators, the micro SLM is composed of three aluminum layers so that spring structure and upper electrode are placed beneath the mirror plate, and $10\times10$ each mirror plate is individually actuated. Also, the micro SLM was designed to be able to modulate phase and amplitude of incoming light in order to have a continuity of phase modulation of incoming light. In the case of amplitude and phase modulation, maximum vertical displacement is 4$\mum$, and maximum angular displacement is $\pm4.6^{\corc}$ respectively. The height difference of the fabricated mirror plate was able to be reduced to 1100A with mirror plate planarization method using negative photoresist(AZ5214). The electromechanical properties of the fabricated micro SLM were measured with the optical measurement system using He-Ne laser and PSD(position sensitive device).

• 한국광학회:학술대회논문집
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• 한국광학회 1991년도 제6회 파동 및 레이저 학술발표회 Prodeedings of 6th Conference on Waves and Lasers
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• pp.88-89
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• 1991

For the micro-lithography using a KrF excimer laser beam(λ=0.248${\mu}{\textrm}{m}$) a mirror system consisting of four spherical surfaces with reduction magnification 5$\times$ is designed. Initially the aplanat condition of the mirror system is considered. And for the further improved performance of the system the distortion free condition and flat field condition within Seidel 3rd order aberrations are added to the above condition. During the process of designing the computer-aided optimization technique is extensively employed. The spherical aberration, coma, field curvature and distortion of the optimized four-spherical mirror system are removed to the diffraction limit, and residual astigmatism and off-axial vignetting are not corrected enough.

• 마이크로전자및패키징학회지
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• 제7권1호
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• pp.29-34
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• 2000

본 연구에서는 전극판에 깊은 홈을 가지고 전기적으로 구동 되는 마이크로미러에 대한 감쇠 특성을 고찰하였다. 유한요소법을 사용하여 마이크로미러의 공기막과 구조물 변위가 커플된 시뮬레이션이 본 연구에 적용되었다. 감쇠력은 구동 되는 미러판과 전극판 사이 공기막의 스퀴즈효과에 의해 발생한다. 전극판의 홈은 감쇠력을 감소시키며, 미러판을 낮은 전압dptj 고속 구동할 수 있도록 하여주며 정밀제어가 가능하도록 하여 준다.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2001년도 추계 기술심포지움
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• pp.222-225
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• 2001

Optical disk drives read information by replacing a laser beam on the disk track. As information has become larger, the more accurate position control of a laser beam is necessary. In this paper, we report the analysis and fabrication of the micro mirror for optical disk drivers. The mirror was fabricated by using MEMS technology and it's characteristics investigated. Also, electrode structure for reducing squeeze effect was discussed.

• 한국통신학회논문지
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• 제34권10B호
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• pp.1117-1123
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• 2009

DMD(Digital Micro-mirror Device)와 갈바노 스캐너를 이용한 두부 고정형 다초점 디스플레이 시스템은 초점조절이 가능하여 스테레오스코픽 디스플레이에서 발생하는 양안의 수렴작용과 단안의 초점조절 작용의 불일치에 의한 눈의 피로 문제를 해결할 수 있는 디스플레이 시스템이다. 이 시스템은 레이저 스캐닝 방법으로 각 시점에 대한 영상의 수렴점을 형성하여 관찰자 동공에 제공함으로 초점조절이 가능토록 한다. 본 논문에서는 이 다초점 디스플레이 시스템의 레이저 스캐닝 방법을 수학적으로 분석하였고, 이러한 분석에 기반 한 다초점 시스템을 제작하여 비디오카메라를 통하여 초점조절이 가능함을 보였고, 결과적으로 레이저 스캐닝 방법에 의한 다초점 시스템의 시점 형성원리가 검증되었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 추계학술대회 논문집 학회본부
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• pp.612-614
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• 1997

Silicon based micro mirror array is a highly efficient component for use in optical applications such as adaptive optical systems and optical correlators. A micro mirror array designed, fabricated and tested here is consisted of $5{\times}5$ single layer polysilicon, electrostatically driven actuators. In this paper, deflection characteristics and pull-in behavior of the actuators for analog control was studied and particularly, the influence of the residual stress in flexure beams for the restorative force of actuators was considered. The springs are modeled as a residual stress-free spring and a spring with residual stress. In calculation, a mirror with the residual stress-free springs has 30.3N/m spring constant and 31.1V pull-in voltage. On the other hand, a mirror with the stressed springs has 23.6N/m and 27.4V respectively. The experimental result, which is 20.5N/m and 25.5V, shows that the stressed springs ore well modeled.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.970-976
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• 1997

The ultra-precision machining is widely used for final machining process of precision parts, so in this study, mirror surface finishing systems using the micro abrasive film, one of ultra-precision machining method, have to examine mirror surface characteristics of the cylindrical workpiece(SM45) such as surface roughness, workpiece removal and evaluated under the condition varing film feed rate, applied pressure, grinding speed after fixing other condition. It was found that varrious machining condition have significant influences on workpiece removal, surface roughness.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1994년도 추계학술대회 논문집
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• pp.273-278
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• 1994

The surface finishing systems using the micro abrasive film were designed and manufactured to make the mirror surface of the cylindrical workpiece. An experimental study of surface finishing was carried out to investigate the performance of mirror surface finishing system. The surface roughness of stainless steel was about Rmax 0.2~0.25 .mu.m, Ra 0.02~0.04 .mu.m in abrasive grain size 12, 9 .mu.m. the surface roughness of chrome coated workpiece was about Rmax 0.07~ 0.11 .mu. m, Ra 0.01 in abrasive grain size 3 .mu. m. Also, to measure the mirror finishing time by mirror surface finishing system, the experiment was carried out on the chrome coated and ground roller of diameter 76mm and length 650mm. The finishing time and surface roughness were 40min and Rmax 0.1~0.13 .mu.m, Ra 0.01 .mu.m.

• Journal of the Optical Society of Korea
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• 제16권4호
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• pp.365-371
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• 2012

A three-dimensional integral-floating display with 360 degree horizontal viewing angle is proposed. A lens array integrates two-dimensional elemental images projected by a digital micro-mirror device, reconstructing three-dimensional images. The three-dimensional images are then relayed to a mirror via double floating lenses. The mirror rotates in synchronization with the digital micro-mirror device to direct the relayed three-dimensional images to corresponding horizontal directions. By combining integral imaging and the rotating mirror scheme, the proposed method displays full-parallax three-dimensional images with 360 degree horizontal viewing angle.

• 한국정밀공학회지
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• 제14권10호
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• pp.68-74
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• 1997

The surface finishing system using the micro abrasive film was designed and manufactured to make the mirror surface of the cylindrical workpices. An experimental study of srface finishing was carried out to investigate the performance of mirror surface finishing system. The surface roughness value of stainless steel was about 0.2 .approx. 0.25 .mu. m Rmax, 0.02 .approx. 0.04 .mu. m Ra, using abrasive grain size of 12, 9 .mu. m. The surface roughness value of chrome coated workpiece was about 0.07 .approx. 0.11 .mu. m Ra using abrasive grain size 3 .mu. m. In the same condition, the chrome coated workpiece has obtained better surface roughness charateristics than the one of stainless steel.