• Journal of the Korean Magnetics Society
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• v.13 no.3
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• pp.115-120
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• 2003

We have developed laser micro-machining technology for fabrication of the micro thin-film inductors. After the thin layers of FM/M/FM films were coated to the silicon substrate by using the conventional sputtering method, the new laser machining was applied to the patterning process that used to be carried out by the semiconductor lithography procedure. A CW Nd:YAG laser operating in TEM$\sub$00/ mode was actively Q-switched to obtain the very short pulse of 200 ns. The laser micro-machining process with pulse energy and repetition rate have been optimized as 5 mJ/pulse and 5 kHz, respectively, to obtain the line resolution as fine as 20 $\mu\textrm{m}$.

• Journal of Sensor Science and Technology
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• v.11 no.4
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• pp.191-199
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• 2002

This paper presents the design concept, theoretical investigation, and fabrication of a six-degree of freedom (6-DOF) turbulent flow micro sensor utilizing the piezoresistive effect in silicon. Unlike other flow sensors, which typically measure just one component of wall shear stress, the proposed sensor can independently detect six components of force and moment on a test particle in a turbulent flow. By combining conventional and four-terminal piezoresistors in Si (111), and arranging them suitably on the sensing area, the total number of piezoresistors used in this sensing chip is only eighteen, much fewer than the forty eight piezoresistors of the prior art piezoresistive 6-DOF force sensor.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2008.05a
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• pp.277-280
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• 2008

Recently, a demand of nano/micro patterned polymer for display or biochip has been rising. Then many studies have been carried out. Nano/micro-embossing is a deformation process where the workpiece materials is heated to permit easier material flow and then forced over a planar patterned tool. In this work, the hot-emboss process is performed with different forming conditions; forming temperature, load, press hold time, to get the proper condition for linear pattern fabrication on plated-type polymers (PC). Replicated pattern depth increases in proportion to the forming temperature, load and time. Reduction of the workpiece thickness increases according to press hold time. In process of time, reduction ratio of workpiece thickness decreases because of surface area increment of the workpiece and pressure decline on it.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.8
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• pp.91-97
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• 2010

Micro-abrasive Jet Machining is one of the new technology which enables micro-scale machining on the surface of high brittle materials. In this technology it is very important to fabricate a mask that prevents excessive abrasives not to machine un-intend surface. Our previous work introduced the micro-stereolithography technology for the mask fabrication. And is good to not only planar material but also for non-planar materials. But the technology requires a 3 dimensional mask CAD model which is perfectly matched with the surface topology of parent material as an input. Therefore there is strong need to develop an automated modeling technology which produce adequate 3D mask CAD model in fast and simple way. This paper introduces a fast and simple mask modeling algorithm which represents geometry of models in voxel. Input of the modeling system is 2D pattern image, 3D CAD model of parent material and machining parameters for Micro-abrasive Jet Machining. And the output is CAD model of 3D mask which reflects machining parameters and geometry of the parent material. Finally the suggested algorithm is implemented as software and verified by some test cases.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.6
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• pp.71-75
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• 2006

The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its usage in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries. The target of this paper is the analysis of FIB sputtering process according to tilt angle, dwell time and overlap for application of 3D micro and pattern fabrication and to find the effective beam scanning conditions using Taguchi method. Therefore we make the conclusions that tilt angle is dominant parameter for sputtering yield. Burr size is reduced as tilt angle is higher.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.05a
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• pp.68-69
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• 2009

Heat Assisted Magnetic Recording (HAMR) is one of the most promising candidates for high density magnetic storages over 1 Tb/$in^2$ areal density. Since the precise light delivery to the head is a key factor to realize HAMR application, it is required to establish the light delivery using micro laser module and micro actuator. For the careful control of micro actuator, a laser module was designed including laser diode, optical fiber, collimating lens, and fabricated V-groove substrate. In addition, the basic aligning method between the laser module and HAMR head was studied by the detection of current change in photo diode due to the amount of reflected light from the head.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2006.05a
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• pp.243-246
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• 2006

In this paper, Experimental results on the measurement of mechanical properties of fine patterns in the MEMS structure are described. The mechanical properties of embossing patterns on metallic thin foil is measured using the nano indentation system, that is developed by Korea Institute of Industrial Technology(KITECH). These micro embossing patterns are fabricated using CIP(Cold Isostatic Press) process on micro metallic thin foils(Al-1100) that are made by rolling process. These embossing patterned metallic thin foils(Al-1100) are used in the reflecting plate of BLU(Back Light Unit) and electrical/mechanical MEMS components. If these mechanical properties of fine patterns are utilized in a design procedure, the optimal design can be achieved in aspects of reliability as well as economy.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2000.11a
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• pp.243-249
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• 2000

In case of the limitation of Deep RIE fabrication for Micro Gas Turbine, bearing aspect ratio is limited in very small value. The characteristics such as pressure distribution load capacity and non-linearity of a short bearing of L/D=0.083 and a conventional bearing of L/D=1.0 with coupled boundary effects are investigated far Micro Gas Tlubine bearings. The coupled efffect was analyzed by mass conservation at coupled end area. The results, increasing load capacity and non-linearity due to the coupled effect of thrust and journal bearing, are obtained and the selection of journal bearing type is discussed.

• Corrosion Science and Technology
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• v.8 no.5
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• pp.184-187
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• 2009

The trend of the microjoining technology by the laser-soldering process has been reviewed. Among the production technologies, joining technology plays an important role in the fabrication of electronic components. This has led to an increasing attention towards the use of modern microjoining technology such as micro-resistance spot joining, micro-soldering, micro-friction stir joining and laser-soldering, etc. This review covers the recent technical trends of laser-soldering collected from the COMPENDEX DB analysis of published papers, research subject and research institutes.

• Proceedings of the IEEK Conference
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• 1999.11a
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• pp.905-908
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• 1999

In this paper, we present a polysilicon actuator on silicon wafer using surface micromachining technology which employs an electrostatic stepwise driven Scratch Drive Actuator to generate a force that can move an external object. For optical applications, we propose wavelength selector using distributed feedback structures and this micro actuator.