• 한국공작기계학회논문집
• /
• 제11권4호
• /
• pp.97-101
• /
• 2002

Recently, the need for transporting and manipulating minute amount of fluids in microscale channels (so-called micro-fluidics) has been increasing, especially in biotechnology and biochemical processing. This work demonstrates that the so-called mechano-chemical process which consists of mechanical abrasive action combined with chemical process can be used to f뮤ricate micro-fluidic channels more rapidly and cost effectively than other methods. In this work, capillary filling of fluids in micro-channels was investigated by theoretical approaches and experiments. From the experimental results, it is expected that a complex micro-fluidic system can be fabricated using the micro-fabrication technique and microsystem packaging method described in this work.

• 한국정밀공학회지
• /
• 제21권10호
• /
• pp.188-195
• /
• 2004

In this paper, we fabricated fluidic devices like micro-channel, pump, mixer and particular gas separator with the technology of stereolithouaphy using RP(rapid-prototyping). The fabricated fluidic devices are expected to be applied to develop Lab-on-a chip type liquid analyzer. Stereolithography technology seems effective for fabricating MEMS(Micro Electro Mechanical System) with complicated structure because it makes three dimensional fabrication possible but, exclusive devices are needed to be developed fur fabricating even more microscopic MEMS structure.

• 한국정밀공학회지
• /
• 제17권7호
• /
• pp.5-13
• /
• 2000

지금까지의 기계산업의 발달은 대규모의 플랜트 혹은 대형기계 개발 등 대형화를 추구해왔다. 그러나, 최근 에너지와 환경에 대한 인식과 정보 통신, 전자산업, 생명산업의 발달로 소형화와 미세화의 기술 개발이 요구되고 있다. 그 예로 크기가 micron혹은 sub-millimeter 단위인 초소형기계 (Micro Machine)이 등장하게 되었고, 이러한 부품 및 시스템을 제작하는 미세 가공 기술을 Micro Machining이라고 할 수 있다.(중략)

• 소성∙가공
• /
• 제13권3호
• /
• pp.216-224
• /
• 2004

In this study, we have developed a new UV$({\lambda}=355nm)$ laser micromachining technology by direct ablation method without masks. This technology allows that 3D micro parts can be fabricated rapidly and efficiently with a low price. And it has a benefit of reducing fabricating process simply. Due to micro parts' fabrication, such technologies need the control of XYZ stages with high precision, the design of optical devices to maintain micron spot sizes of laser beam and the control technology of laser focus. The developed laser manufacturing process for laser micromachining is that, after extracting coordinates of shape data from CAD model data, a beam path considering manufacturing features of laser beam is created by using genetic algorithm. This generated manufacturing process is sent to stage controller. In order to improve the surface quality of micro parts, we have carried out experiments on iteration manufacturing and beam step-over by using a minimum focus size. Moreover, we have fabricated a micro-channel through the developed laser micromachining technology and verified it through the results.

• 소성∙가공
• /
• 제20권1호
• /
• pp.60-63
• /
• 2011

BLU(back light unit) is one of kernel parts of LCD(liquid crystal display) unit. New 3-D micro-lens pattern for LGP(light guide plate), one of the most important parts of LCD-BLU, had been researched. Instead of dot pattern made by chemical etching or laser ablation, SCS(slanted curved surface) micro-lens pattern was designed with optical CAE simulation. This study introduce the method of design using optical CAE simulation for SCS micro-lens, the new fabrication method of micro-mold with SCS micro-lens pattern.

• 한국기계가공학회지
• /
• 제12권3호
• /
• pp.28-35
• /
• 2013

Micro electrical discharge machining (EDM) as a non-contact machining process is very effective for micromachining with a thin electrode because of its low machining reaction force. The micro-electrode machining device has the advantage of maintaining high precision through the whole processes and uses a feeding wire in the thin electrode tool manufacturing process. This study describes the design and evaluation of a micro-electrode machining device using optical photo-interrupter. The electrode was fabricated by reverse electrical discharge machining. The performance of designed system was evaluated to measure tension force according to feed speed of wire. This system for micro electrode fabrication proves the feasibility in the micro-EDM process of the micro holes and parts for industrial applications.

• 한국전기전자재료학회논문지
• /
• 제14권3호
• /
• pp.228-233
• /
• 2001

This paper presents the optimized design, fabrication and thermal characteristics of micro-heaters for thermal MEMS (micro elelctro mechanical system) applications usign SOI (Si-on-insulator) and trench structures. The micro-heater is based on a thermal measurement principle and contains for thermal isolation regions a 10㎛ thick Si membrane with oxide-filled trenches in the SOI membrane rim. The micro-heater was fabricated with Pt-RTD (resistance thermometer device) on the same substrate by suing MgO as medium layer. The thermal characteristics of the micro-heater wit the SOI membrane is 280$\^{C}$ at input power 0.9W; for the SOI membrane with 10 trenches, it is 580$\^{C}$ due to reduction of the external thermal loss. Therefore, the micro-heater with trenches in SOI membrane rim provides a powerful and versatile alternative technology for improving the performance of micro-thermal sensors and actuators.

• 한국소성가공학회:학술대회논문집
• /
• 한국소성가공학회 2006년도 제5회 박판성형 SYMPOSIUM
• /
• pp.40-44
• /
• 2006

Sandwich structures, which are composed of a thick core between two faces, are commonly used in many engineering applications because they combine high stiffness and strength with low weight. Accordingly, the usage of sandwich structure is very widely applied to the aircraft, the automobile and marine industry, etc., because of these advantages. In this paper, we have investigated the buckling protection of an inner structure plate and the useful corrugated configuration for contact, and the fabrication method of the inner structure plate for large area using the continuous molding process. Also, we have guaranteed the accuracy of the molding process through the micro corrugated mold fabrication and secured the accuracy and analyzed aspect properties of the inner structure plate fabricated for a large area using the partial mold process.

• 한국광학회:학술대회논문집
• /
• 한국광학회 2003년도 제14회 정기총회 및 03년 동계학술발표회
• /
• pp.4-4
• /
• 2003

Diffractive- and micro-optics technology Provides new degrees of freedom for the design and optimization of optical systems. In this talk emphasis will be placed on recent advances in the design and fabrication of precision, micro- structured optical elements and their applications in the optical telecommunication, vision-care, illumination and display markets. (omitted)

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1994년도 추계학술대회 논문집 학회본부
• /
• pp.422-424
• /
• 1994

A comb drive electrostatic micro gripper was designed and fabricated. We designed it analytically using electrostatic force and cantilever deflection equation. In fabrication, we used LIGA-like technology consisted of Ni electroplating through polyimide patterned by $O_2$ Plasma RIE and Al sacrificial layer. This micro gripper was designed to handle an optical fiber which is $125{\mu}m$ in diameter.