• Title/Summary/Keyword: Mico Gas Sensor

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Temperature Compensation Algorithm of Nondispersive Infrared (NDIR) Gas Sensor (비분산 적외선 가스센서의 온도보상 알고리즘)

  • Park, Jong-Seon;Yi, Seung-Hwan
    • Journal of the Korean Institute of Gas
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    • v.15 no.4
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    • pp.51-55
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    • 2011
  • This paper describes the temperature compensation algorithm using thermopile detector for nondispersive infrared methane gas sensor. From the output voltage of thermistor that is attached onto the infrared detector, the ambient temperature was extracted. The effects of temperatures on the properties of sensor module (the characteristics of narrow bandpass filter, optical cavity and infrared lamp, and gas absorption coefficient times optical path length) have been introduced in order to implement the temperature compensation algorithm. Even though the measurement error of developed sensor module was in the range of $\pm$ 1,500 ppm, after programming the temperature compensation algorithm, the developed sensor module shows a high accuracy less than +180 ppm error within $20^{\circ}C$ temperature variation.

A Dual Micro Gas Sensor Array with Nano Sized $SnO_2$ Thin Film (나노 박막을 이용한 듀얼 $SnO_2$ 마이크로 가스센서 어레이)

  • Chung Wan-Young
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.10 no.9
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    • pp.1641-1647
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    • 2006
  • A dual micro gas sensor way for detecting reducing gas and bad order was fabricated using nano sized $SnO_2$ thin film fabrication method. To make nano-sized thin gas sensitive $SnO_2$ thin rilm, thin tin metal layer $2500{\AA}$ thick was oxidized between 600 and $800^{\circ}C$ by thermal oxidation. The gas sensing layers such as $SnO_2,\;SnO_2(+Pt)\;and\;SnO_2(+CuO)$ were patterned by metal shadow mask for simple fabrication process on the silicon substrate. The micro gas sensors with $SnO_2(Pt)$ and $SnO_2(+CuO)$ showed good selectivity to CO gas among reducing gases and good sensitivity to $H_2S$ that is main component of bad odor, separately.