• 제목/요약/키워드: Metalorganic chemical vapor deposition

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저압 유기 금속 화학 증착법으로 성장시킨 GaN박막의 캐소드루미네슨스에 대한 연구 (Catchodoluminescence Study of GaN Films Grown by Low-Pressure Metalorganic Chemical Vapor Deposition)

  • 홍창희
    • 전자공학회논문지D
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    • 제36D권5호
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    • pp.63-68
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    • 1999
  • 본 논문에서는 저압 유기 금속 화학증착법으로 성장시킨 GaN박막들을 실온 케소드루미네슨스 방법으로 광학적 특성을 측정하여 결정성장 메커니즘과 광학적 특성과의 관계를 규명하였다. 관측된 스펙트럼은 주로 364nm의 강한 band-edge emission 피크와 550nm의 깊은 준위 피크이었다. 빔 전류의 증가에 따라 364nm 스펙트럼의 세기가 깊은 준위 발광 스펙트럼보다 크게 증가시켰다. 이는 성장 초기 GaN박막의 결정 결함이 깊은 준위 발광 스펙트럼과 깊은 관계가 있음을 나타내 주고 있다. 또한 미세 결정 구조와 깊은 준위 발광 스펙프럼과의 관계 분석을 위해 주사형 전자현미경 사진과 캐소드루미네슨스 스펙트럼을 비교 검토하였다.

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Temperature Dependence of Excitonic Transitions in GaN Grown by MOCVD

  • Guangde Chen;Jingyu Lin;Hongxing Jiang;Kim, Jung-Hwan;Park, Sung-Eul
    • Journal of Photoscience
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    • 제7권1호
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    • pp.27-30
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    • 2000
  • The Photoluminescence (PL) measurement results of a very good quality GaN sample grown by metalorganic chemical vapor deposition (MOCVD) are reported. The temperature dependences of peak position, emission intensity, and the full width at half maximum (FWHM) of free-exciton (FX) A and B are presented. Our results show the fast thermal quenching of FX transition intensities and predominantly acoustic phonon scattering of emission line broadening. The transition-energy-shift following the Varshni's empirical equation, and by using it to fit the data, E$\_$A1/(T) = 3.4861 eV -6.046 $\times$ 10$\^$-4/T$^2$ (620.3+ T) eV, E$\_$B1/(T) = 3.4928 eV -4.777 $\times$ 10$\^$-4/T$^2$ / (408.2+ T) eV and E$\_$A2/ = 3.4991 eV -4.426 $\times$ 10$\^$-4/ T$^2$ / (430.6+ T) eV for A(n=1), B(n=1), and A(n=2) are obtained respectively.

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MOCVD방법으로 InP 기판 위에 성장시킨 InAs 박막에서의 부정합 전위 생성 연구 (A Study on Misfit Dislocation Generation in InAs Epilayers Grown on InP Substrates by Metalorganic Chemical-Vapor Deposition)

  • 김좌연;윤의중;박경순
    • Applied Microscopy
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    • 제27권4호
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    • pp.483-488
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    • 1997
  • A misfit dislocation generation in InAs epilayers grown on (001) InP substrates (oriented $2^{\circ}$ off (001) toward the [110] direction) using metalorganic chemical-vapor deposition was studied. The InAs film of 17 nm thickness grown at $405^{\circ}C$ showed the three different arrays of dislocations: a straight orthogonal array to the <110> direction, an array to the >100> direction, and an array tilted by a degree of $5\sim45^{\circ}$ from the [110] direction. All of the dislocations had a/2<101> Burgers vectors inclined $45^{\circ}$ to the interface. Upon annealing at $660^{\circ}C$ the InAs films with 60, 140 and 220 nm thicknesses, most of the misfit dislocations became the Lomer type $(\sim100%)$ oriented exactly along the >110> direction. These misfit dislocation spacings were decreased with increasing the InAs thickness up to 220 nm thickness. This phenomena was interpreted by the relationship between the dislocation interaction energy among parallel misfit dislocations and the opposite remnant InAs epilayer strain energy. The distance between misfit dislocations was measured by transmission electron microscopy.

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유기금속기상증착법에 의한 InGaN/GaN 양자점 구조의 성장거동 (Growth Behavior of InGaN/GaN Quantum Dots Structure Via Metal-organic Chemical Vapor Deposition)

  • 정우광;장재민;최승규;김진열
    • 한국재료학회지
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    • 제18권10호
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    • pp.535-541
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    • 2008
  • Growth behavior of InGaN/GaN self-assembled quantum dots (QDs) was investigated with respect to different growth parameters in low pressure metalorganic chemical vapor deposition. Locally formed examples of three dimensional InGaN islands were confirmed from the surface observation image with increasing indium source ratio and growth time. The InGaN/GaN QDs were formed in Stranski-Krastanow (SK) growth mode by the continuous supply of metalorganic (MO) sources, whereas they were formed in the Volmer-Weber (V-W) growth mode by the periodic interruption of the MO sources. High density InGaN QDs with $1{\sim}2nm$ height and $40{\sim}50nm$ diameter were formed by the S-K growth mode. Dome shape InGaN dots with $200{\sim}400nm$ diameter were formed by the V-W growth mode. InN content in InGaN QDs was estimated to be reduced with the increase of growth temperature. A strong peak between 420-460 nm (2.96-2.70 eV) was observed for the InGaN QDs grown by S-K growth mode in photoluminescence spectrum together with the GaN buffer layer peak at 362.2 nm (3.41 eV).