• Title/Summary/Keyword: Metal diffusion

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New Approaches for Overcoming Current Issues of Plasma Sputtering Process During Organic-electronics Device Fabrication: Plasma Damage Free and Room Temperature Process for High Quality Metal Oxide Thin Film

  • Hong, Mun-Pyo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.100-101
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    • 2012
  • The plasma damage free and room temperature processedthin film deposition technology is essential for realization of various next generation organic microelectronic devices such as flexible AMOLED display, flexible OLED lighting, and organic photovoltaic cells because characteristics of fragile organic materials in the plasma process and low glass transition temperatures (Tg) of polymer substrate. In case of directly deposition of metal oxide thin films (including transparent conductive oxide (TCO) and amorphous oxide semiconductor (AOS)) on the organic layers, plasma damages against to the organic materials is fatal. This damage is believed to be originated mainly from high energy energetic particles during the sputtering process such as negative oxygen ions, reflected neutrals by reflection of plasma background gas at the target surface, sputtered atoms, bulk plasma ions, and secondary electrons. To solve this problem, we developed the NBAS (Neutral Beam Assisted Sputtering) process as a plasma damage free and room temperature processed sputtering technology. As a result, electro-optical properties of NBAS processed ITO thin film showed resistivity of $4.0{\times}10^{-4}{\Omega}{\cdot}m$ and high transmittance (>90% at 550 nm) with nano- crystalline structure at room temperature process. Furthermore, in the experiment result of directly deposition of TCO top anode on the inverted structure OLED cell, it is verified that NBAS TCO deposition process does not damages to the underlying organic layers. In case of deposition of transparent conductive oxide (TCO) thin film on the plastic polymer substrate, the room temperature processed sputtering coating of high quality TCO thin film is required. During the sputtering process with higher density plasma, the energetic particles contribute self supplying of activation & crystallization energy without any additional heating and post-annealing and forminga high quality TCO thin film. However, negative oxygen ions which generated from sputteringtarget surface by electron attachment are accelerated to high energy by induced cathode self-bias. Thus the high energy negative oxygen ions can lead to critical physical bombardment damages to forming oxide thin film and this effect does not recover in room temperature process without post thermal annealing. To salve the inherent limitation of plasma sputtering, we have been developed the Magnetic Field Shielded Sputtering (MFSS) process as the high quality oxide thin film deposition process at room temperature. The MFSS process is effectively eliminate or suppress the negative oxygen ions bombardment damage by the plasma limiter which composed permanent magnet array. As a result, electro-optical properties of MFSS processed ITO thin film (resistivity $3.9{\times}10^{-4}{\Omega}{\cdot}cm$, transmittance 95% at 550 nm) have approachedthose of a high temperature DC magnetron sputtering (DMS) ITO thin film were. Also, AOS (a-IGZO) TFTs fabricated by MFSS process without higher temperature post annealing showed very comparable electrical performance with those by DMS process with $400^{\circ}C$ post annealing. They are important to note that the bombardment of a negative oxygen ion which is accelerated by dc self-bias during rf sputtering could degrade the electrical performance of ITO electrodes and a-IGZO TFTs. Finally, we found that reduction of damage from the high energy negative oxygen ions bombardment drives improvement of crystalline structure in the ITO thin film and suppression of the sub-gab states in a-IGZO semiconductor thin film. For realization of organic flexible electronic devices based on plastic substrates, gas barrier coatings are required to prevent the permeation of water and oxygen because organic materials are highly susceptible to water and oxygen. In particular, high efficiency flexible AMOLEDs needs an extremely low water vapor transition rate (WVTR) of $1{\times}10^{-6}gm^{-2}day^{-1}$. The key factor in high quality inorganic gas barrier formation for achieving the very low WVTR required (under ${\sim}10^{-6}gm^{-2}day^{-1}$) is the suppression of nano-sized defect sites and gas diffusion pathways among the grain boundaries. For formation of high quality single inorganic gas barrier layer, we developed high density nano-structured Al2O3 single gas barrier layer usinga NBAS process. The NBAS process can continuously change crystalline structures from an amorphous phase to a nano- crystalline phase with various grain sizes in a single inorganic thin film. As a result, the water vapor transmission rates (WVTR) of the NBAS processed $Al_2O_3$ gas barrier film have improved order of magnitude compared with that of conventional $Al_2O_3$ layers made by the RF magnetron sputteringprocess under the same sputtering conditions; the WVTR of the NBAS processed $Al_2O_3$ gas barrier film was about $5{\times}10^{-6}g/m^2/day$ by just single layer.

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Vertical Distribution and Contamination of Trace Metals in Sediments Within Hoidong Reservoir (회동저수지 호저퇴적물의 미량원소 오염 및 수직적 분산특성)

  • Lee, Pyeong-Koo;Kang, Min-Ju;Youm, Seung-Jun;Lee, Wook-Jong
    • Economic and Environmental Geology
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    • v.40 no.5
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    • pp.587-604
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    • 2007
  • In order to investigate the vertical variations and speciations of trace elements, and their correlations in Hoidong reservoir, sediment cores (21-41 cm below surface) and interstitial water samples were collected from five sampling locations. The total average concentrations of trace metals in sediment core samples were $232{\pm}30.8mg/kg$ for Zn, $119{\pm}272mg/kg$ for Cu, $58.4{\pm}4.1mg/kg$ for Pb, $15.7{\pm}3.3mg/kg$ for Ni and $1.6{\pm}0.3mg/kg$ for Cd. The total concentrations of trace metals in core sediments generally decreased toward the center of the Hoidong reservoir. The total concentrations of Mn, Pb and Zn decreased with depth for all the sample locations, while Cu and Fe concentrations increased. The trace metal concentrations of interstitial water sample were in the order of Fe>Mn>Cu>Zn, but Cd, Ni and Pb were not detected. The concentrations of Zn, Cu, Fe and Mn in the interstitial water samples showed a tendency of increasing toward the bottom of the core, suggesting a possible upward diffusion. This migration of trace metals may lead to their transfer to the sediment-water interface. These trace elements would be subsequently fixed onto amorphous Fe and Mn-oxides and carbonates in the topmost layer of sediment. Based on the $K_D$ values, the relative mobilities of the studied metals were in the order of Mn>Cu>Zn>Fe. Geochemical partitioning confirmed that surface enrichment by trace metals mainly resulted from a progressive increase of the concentrations in the fractions II and III. Copper, Fe, Mn and Zn concentrations of interstitial water were closely correlated with their exchangeable fractions of sediments.

Industrial restructuring and uneven regional development in the 1980s (산업구조조정과 지역불균등발전 : 1980년대)

  • ;Choi, Byung-Doo
    • Journal of the Korean Geographical Society
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    • v.29 no.2
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    • pp.137-165
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    • 1994
  • Structural adjustment of industry (or industrial restructuring) seems to be inherent in the process of capitalist economic development, which tends to be proceeded with shifts from one stage to another in order to overcome structural crises generated in each stage. The structural adjustment of industry is necessarily accompanied with regional restructuring, since it is not only projected on spece, but also mediated by space. Such a restructuring necessitates industrial and uneven regional devlopment through which capital can seek excessive profits over the rate of socio-spatial average. The industrial restructuring and uneven regional development in the 1980s in Korea can be seen as a process in which capital attempted with a strong support of the govenment to overcome the crises in the end of 1970s and hence to go on rapid economic growth. In this process, capital, especially monopoly capital concentrated into few conglomerates, pursued both extensive expansion and intensive development of industry simultaneously. In results, the Korean economy could eliminate some of peripheral characters and maturate the Fordist accumulation system. The extensive expansion of the Korean industry in the 1980s was stimulated mainly through the enlargement and adjustment of investment for equipment facilities which was planned to exclude or rationalize traditional light industries on some places, and to continue rapid growth of key heavy-chemical industries, especially of fabricated metal industry, on other places. In this process, keeping mainly the existing developmental axis which polarized the Seoul Metroplitan region and the Southeast region in Korea, the enhancing spatial mobiiity of capital and the further differentiating division of labour enforced a tendency of concentration of all types of industry in the Seoul Metropolitan region, and at the same time provoked the diffusion of some industries over Jeolla and Chungchong regions in a considerable extent. The intensive development of industriai structure in the 1980s was pursued through the strategic encouragement of subcontracting small firms mainly which produced assembling components, the technical enhancement and factory (semi-) automation, and the enrichment of service industries for estate management, finance, distribution and retailing which supported and complemented the production of goods. In this process, enabling capital to extend and elaborate its domination over space through the reorganization of regulating systems, the Fordist division of labour generated a socio-spatial hierarchy in the nation-wide scale that characterized: the Seoul Metropolitan region as an overmaturated (or overarching) Fordist region performing the conceptive functions of management, research and development, in which all types of industry (including service industries) tended to be reconcentrated; Kyungsang region as a maturated Fordist region with excutive branches of large conglomerates and with subcontracting firms around them which produced standardized products through the automized production processes in secialized Fordist industries or rationalized traditional industries; and Jeolla and Chungchong regions as newly devloping Fordist regions with newly migrated branches and some subcontracting small firms-in relatively older Fordist industries or partly rationalized traditional industries. From these analyses, it can be argued that the structural adjustment of the Korean industry in the 1980s, which had carried out both through the extensive expansion and the intensive deveiopment, strengthened further uneven regional development process, even though it appears to have reduced apparently the economic and regional disparity by balancing numerically large and small firms and by extending the Fordist industrial space nation-wideiy. And it seems more persuasive to see that the Korean industrial structure in the 1980s maturated the Fordist system of accumulation, but not yet transformed towards the post-Fordist (or the so-called flexible) accumulation system, even though the Korean economy in the 1990s seems to be under a pressure of restructuring towards the latter system.

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Case Study of Hydrochemical Contamination by Antimony Waste Disposal in Korea (국내 안티몬폐기물에 의한 수질화학적 오염 사례연구)

  • Jeong, Chan-Ho
    • The Journal of Engineering Geology
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    • v.18 no.4
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    • pp.471-482
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    • 2008
  • This study was carried out to investigate the contamination characteristics of surface water, soil water and groundwater around and in antimony waste landfill site in Wonsung-ri, Yeonki-kun, Chungnam. The waste disposed in the study was excavated and transported to the other site in several years ago. For this study, we collected 35 water samples including groundwater, soil water and surface in the study site and also collected 2 groundwater samples from a comparison site. The data of chemical analysis of soil water samples show the antimony concentration of $48.75{\sim}74.81\;ppb$, which is much higher than groundwater in a comparison site and is highly excess than regulation level for a drinking water of some advanced countries. A relatively high antimony concentration was detected in three stream water samples nearby landfill site and two groundwater samples. Fe and Mn contents in soil water and stream water were measured as maxium 6.5 mg/L and 7.3 mg/L, respectively. Although other heavy metals of water samples in the study site are higher concentration than water sample of comparison site, their absolute levels are lower than regulation level for a drinking water. The chemical data of water samples are plotted widely from Ca - $HCO_3$ type to Ca - ($Cl +SO_4+NO_3$) type. Some groundwater show high contents of potassium and nitrate, which would come from fertilizer and sewage. Conclusively, some heavy metals including antimony have been still remained under the soil surface of the landfill site in the past. These metals have leaked out into nearby stream and groundwater system, and threaten the ecology, crops and the health of residents in this site. Therefore, the government have to prepare the strategy to prevent the diffusion of heavy metals into aquatic environment and have to process the reclamation work for contaminated site. It is also necessary to make a regulation level of the antimony concentration for a drinking water and soil environment in Korea.

Type Classification and Material Properties by the Composition of Components in Gold Earrings Excavated from the Yeongnam Region (영남지역 출토 금제 귀걸이의 성분 조성에 따른 유형 분류와 금속 재료 특성)

  • Jeon, Ikhwan;Kang, Jungmoo;Lee, Jaesung
    • Korean Journal of Heritage: History & Science
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    • v.52 no.1
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    • pp.4-21
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    • 2019
  • In this paper, 23 Silla gold earrings from the sixth and seventhand centuries, excavated from the Yeongnam region, were analyzed. Based on the silver content of the gold plate, they were classified into three types. The classifications included type I(20-50wt%), type II(10-20wt%) and type III (less than 10wt%). In the analysis process, the composition and morphological differences were identified on the surface of the gold plate. In the case of type I and II earrings, it was observed that the fine holes were concentrated in a relatively higher part of the gold content. The causes of the difference in the surface composition of the gold plate were divided into four categories: 1) surface treatment, 2) thermal diffusivity in the manufacturing process, 3) differences in composition of alluvial gold, and 4) the refining method of gold. It is possible that depletion gilding was attempted to increase the gold content while intentionally removing the other metals from the surface of the gold alloy in the portion where the gold deposit is relatively concentrated on the surface of the gold plating. The highest copper content was detected in the earring with the highest gold content of the analyzed earrings, and it was assumed that thermal diffusion had occurred between the gold plate and the metal rod during the manufacturing process rather than intentional addition. Copper was detected only in the thin ring earring type, and copper was not detected in the thick ring earring type or pendant type. It also proves that this earring has a high degree of tightness at higher temperatures, as there was an invisible edge finish on other earrings and horizontal wrinkles on the gold plate surface. In terms of the material of the gold plate, we examined whether the silver content of the gold plate was natural gold or added by alloy through analyzing the alluvial gold collected in the region. As a result of the analysis, it was found that on average about 13wt% of silver is included. This suggests that type II is natural gold, type III is refined gold, and type I seems to have been alloyed with natural gold. Here, we investigated the refining method introduced in the ancient literature, both at home and abroad, about the possibility of alloying silver after the refining process of type III earrings and then making pure gold. It was found that from ancient refining methods, silver which had been present in the natural gold was removed by reacting and combining with silver chloride or silver sulfide, and long-term efforts and techniques were required to obtain pure gold through this method. Therefore, it was concluded that the possibility of adding a small amount of silver in order to increase strength after making pure gold through a refining process is low.