• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.51-52
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• 2007

This paper compared wired Acoustic Emission (AE) signals with wireless AE signals. According to the material and process condition, each process signal has distinguishable characteristic to show each removal phenomenon. Therefore, wired and wireless AE sensors having different bandwidth are complementary for CMP process monitoring. Especially, the AE sensor was used to investigate abrasive and molecular-scale phenomena during CMP process, which was compatible to acquire high level frequency. In experiment, wireless AE system was used to get signals in rotary system, using bluetooth. But, it is possible to acquire only RMS signals, which can not analyze abrasive and molecular-sale phenomena. Second, wired AE system was installed using mercury slip-ring, which is suitable not only for rotation equipment but also for acquiring original signals. The acquired signals were analyzed by FFT for understanding of abrasive and molecular revel phenomena in CMP process, finally, we verified that two types of AE sensor with different bandwidth were complementary for CMP process monitoring.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.10b
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• pp.381-382
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• 2002

The Fluid film between the valve plate and the cylinder block was measured by use of a gap sensor and the mercury-cell slip ring unit under real working conditions. During the operating periods, experiments with discharge pressure, revolution speed, and valve geometry was carried out for the fluid film on the valve plate. To investigate the effect of the valve shape, we designed two valve plates each having a different shape; the first valve plate was a plane valve plate. while the second valve plate was a spherical valve plate. It was noted that these two valve plates observed different aspects of the fluid film characteristics between the cylinder block and the valve plate. The leakage flow rate and the shan torque were also investigated in order to clarify the difference between these two types of valve plates. From the results of this study. we found that the spherical valve plate estimated good fluid film patterns and performance more than the other valve plate in oil hydraulic axial piston pumps.

• Journal of Mechanical Science and Technology
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• v.19 no.2
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• pp.655-663
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• 2005

Tribological characteristics in the sliding parts of oil hydraulic piston pumps are very important in increasing overall efficiency. In this study, the fluid film between the valve plate and the cylinder block was measured by using a gap sensor and the mercury-cell slip ring unit under real working conditions. To investigate the effect of the valve shape, we designed three valve plates each having a different shape. One of the valve plates was without bearing pad, another valve plate had bearing pad and the last valve plate was a spherical valve plate. It was noted that these three valve plates observed different aspects of the fluid film characteristics between the cylinder block and the valve plate. The leakage flow rates and the shaft torque were also investigated in order to clarify the performance difference between these three types of valve plates. From the results of this study, we found that the spherical valve plate estimated good fluid film patterns and good performance more than the other valve plates in oil hydraulic axial piston pumps.