• Title/Summary/Keyword: Mechanical phenomena

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CMP process monitoring system using AE sensor (AE를 이용한 CMP 공정 감시에 관한 연구)

  • Park, Sun-Joon;Kim, Sung-Ryul;Park, Boum-Young;Lee, Hyun-Seop;Jeong, Hea-Do
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.51-52
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    • 2007
  • This paper compared wired Acoustic Emission (AE) signals with wireless AE signals. According to the material and process condition, each process signal has distinguishable characteristic to show each removal phenomenon. Therefore, wired and wireless AE sensors having different bandwidth are complementary for CMP process monitoring. Especially, the AE sensor was used to investigate abrasive and molecular-scale phenomena during CMP process, which was compatible to acquire high level frequency. In experiment, wireless AE system was used to get signals in rotary system, using bluetooth. But, it is possible to acquire only RMS signals, which can not analyze abrasive and molecular-sale phenomena. Second, wired AE system was installed using mercury slip-ring, which is suitable not only for rotation equipment but also for acquiring original signals. The acquired signals were analyzed by FFT for understanding of abrasive and molecular revel phenomena in CMP process, finally, we verified that two types of AE sensor with different bandwidth were complementary for CMP process monitoring.

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A Study on Physically small Surface Fatigue Crack Growth Behavior in 7075-T651 Aluminum Alloy (7075-T651 AI 합금에 있어서 물리적 미소 표면 피로균열 성장거동에 관한 연구)

  • Sin, Yong-Seung;Seo, Seong-Won;Yu, Heon-Il
    • Journal of the Korean Society for Precision Engineering
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    • v.9 no.1
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    • pp.106-117
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    • 1992
  • In this study, the propagation behaviour and the closure phenomena of physically small surface cracks were investigated by the techinque of the Kikukawa-unloading elastic compliance method using a back face strain gage. The surface cracks initiated and propagated from notched specimens under constant amplitude bending load. The crack shape (aspect ratio) with approximately semi-circular at the early stage was changed to semi-elliptical as the cracks grew larger. The crack depth (a) could be expressed uniquenly by the crack length (c). The dependence of the crack propagation rate on the stress ratio R was strongly related in the lower ${\Delta}K$ range. The deceleration of the surface crack propagation rate was prominent in lower R during the crack length was small. When the propagation rate was rearranged with the effective stress intensity factor range ${\Delta}$K_{eff} the dependence of the crack propagation rate on the stress ratio R was found to be diminshed. These were caused by the crack closure phenomena that was most prominent at the lower propagation rate. The mechanism of crack closure phenomena was dominated by the plasticity-induced mechanism.

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Evaluation of energy release rate of composites laminated with finite element method

  • Achache, Habib;Boutabout, Benali;Benzerdjeb, Abdelouahab;Ouinas, Djamel
    • Structural Engineering and Mechanics
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    • v.55 no.1
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    • pp.191-204
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    • 2015
  • Control of the mechanical behavior of composite materials and structures under monotonic and dynamic loads for cracks and damage is a vast and complex area of research. The modeling of the different physical phenomena and behavior characteristics of a composite material during deformation play an important role in the structural design. Our study aims to analyze numerically the energy release rate parameter G of a composite laminated plate (glass or boron / epoxy) cross-ply [$+{\alpha}$, $-{\alpha}$] in the presence of a crack between two circular notches under the effect of several parameters such as fiber orientation ${\alpha}$, the crack orientation ${\beta}$, the orientation ${\gamma}$ of the two considered circular notches and the effect of mechanical properties. Our results show clearly that both notches orientation has more effect on G than the cracks and fibers orientations.

A Numerical Analysis of a Drop Impact on the Liquid Surface (액적의 액막 충돌에 대한 수치해석)

  • Lee, Sang-Hyuk;Hur, Nahm-Keon;Son, Gi-Hun
    • Proceedings of the KSME Conference
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    • 2008.11b
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    • pp.2568-2573
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    • 2008
  • A drop impact on the liquid film/pool generates several phenomena such as the drop floating, bouncing, formation of vortex ring, jetting, bubble entrapment and splashing. These phenomena depend on the impact velocity, the drop size, the drop properties and the liquid film/pool thickness. These parameters can be summarized by four main dimensionless parameters; Weber number, Ohnesorge number, Froude number and non-dimensional film/pool thickness. In the present study, the phenomena of the splashing and bubble entrapment due to the drop impact on the liquid film/pool were numerically investigated by using a Level Set method for the sharp interface tracking of two distinct phases. After the drop impact, the splashing phenomena with the crown formation and spreading were predicted. Under the specific conditions, the bubble entrapment at the base of the collapsing cavity due to the drop impact was also observed. The numerical results were compared to the available experimental data showing good agreements.

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CFD/CAE Analysis of QC/DC Bellows for LNG Bunkering (LNG 벙커링용 QC/DC 밸로즈의 유동/구조 해석)

  • Jang, Sung-Cheol;Eom, Jeong-Pil;Jung, Hyun-Cheol
    • Journal of the Korean Society of Industry Convergence
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    • v.21 no.5
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    • pp.191-195
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    • 2018
  • By using an ANSYS product suite (CFX, Ansys Multiphysics), which is a powerful tool for multiphysics analysis of complicated physical phenomena, we performed a structural stress analysis based on fluid flow and heat transfer phenomena within a quick connect/disconnect (QC/DC) bellows system. Considering the extremely low temperatures in the QC/DC environment, an approach to the problem based on complex multi-physics phenomena, where different phenomena interact with each other, is crucial. Therefore, we use a numerical analysis technique where fluid-thermal-structural interactions are combined. In conclusion, when low temperature fluids flow inside bellows, the expected service life is conspicuously reduced due to the thermal stress caused by heat transfer. Therefore, in future research, a structure with considerably reduced thermal stress by robust design optimization will be derived.

Aerodynamic Characteristics and Wing Tip Vortex Behavior of Three-Dimensional Symmetric Wing According to Heights (대칭단면을 갖는 3 차원 날개의 지면고도에 따른 공력특성과 끝단와 거동)

  • Yoo, Younghyun;Lee, Sanghwan;Lee, Juhee
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.36 no.12
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    • pp.1161-1169
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    • 2012
  • A numerical study has been conducted to investigate the aerodynamic characteristics and behavior of a wing-tip vortex around a three-dimensional symmetric wing (NACA0015) in the vicinity of the ground. The aerodynamic characteristics and the wing-tip vortex change as a wing approaches the ground as a result of two different phenomena: the ground effect and the Venturi effect. The ground effect increases lift and decreases drag whereas the Venturi effect generates negative lift and increases drag suddenly. A symmetric airfoil experiences both phenomena with respect to changes in the angle of attack. In the case of a NACA0015 airfoil, the Venturi effect is dominant at small angles of attack but the ground effect is dominant at large angles of attack. Interestingly, both phenomena can be observed at the 4 degree of angle of attack. The vortex core moves inside a wing when the wing experiences the Venturi effect, whereas the vortex core moves outward when the wing experiences the ground effect.

Effect of the Pocket Depth on the Hammering Behavior of an Air Bearing Stage (포켓의 깊이가 공기 베어링 스테이지의 햄머링 현상에 미치는 영향)

  • Lee, Chun Moo;Kim, Gyu Ha;Park, Sang Joon;Hwang, Gyu-Jin;Park, Sang-Shin
    • Tribology and Lubricants
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    • v.37 no.4
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    • pp.129-135
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    • 2021
  • An air-bearing stage uses externally pressurized air as the lubricant between the stage and the rail. The supporting force generated by the supplied air makes the stage rise and move smoothly with extremely low friction. Mechanical contacts rarely happen, the bearing surfaces do not produce wear particles, and dust is not generated. It also has the advantage of having low energy loss and high precision. Because of its advantages, an air-bearing stage is used in several types of machines that require high precision. In this article, the effect of the pocket depth on the hammering phenomena of the air bearing is studied. An analysis program is developed to calculate the dynamic behavior of the stage by solving the Reynolds equation between the stage and the guideway and the equations of motion on the stage. The acceleration, constant movement, and deceleration are applied to the stage. The stage is modeled as a five-degree-of-freedom system. In the course of the dynamic behavior, the hammering phenomena occur under some special conditions. The deeper the pocket, the more unstable the behavior of the stage, and air hammering occurs when it exceeds a certain depth. In addition, the higher the supply pressure, the more unstable the behavior of the stage. However, hammering occurs even with a shallow pocket depth. Other conditions that affect the hammering phenomena are calculated and discussed.

Analysis of Flow Phenomena in a Centrifugal Compressor Impeller Operating near Stall (스톨 근처에서 원심압축기 임펠러의 내부 유동현상에 관한 연구)

  • Eum, Hark-Jin;Kang, Shin-Hyoung
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.28 no.3
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    • pp.330-337
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    • 2004
  • Analysis of flow phenomena in a centrifugal compressor impeller has been carried out with numerical simulation to understand the physics of flow near stall. Near stall point, tip leakage flow spills ahead of the leading edge of adjacent blade and other leakage flow passes over the clearance of the adjacent blade instead of rolling up into vortex within the passage. The tip leakage flow at the mid chord of impeller blade impinges against the pressure surface of the adjacent blade and then rolls up into vortex within the passage, which blocks the flow passage and generates viscous loss. The spillage of leakage flow ahead of the adjacent blade generates the recirculation of flow entering the impeller, which causes the power transferred into the flow by the impeller to decrease and blocks the flow passage. Near diffuser hub wall, flow recirculation occurs. As operating point goes to stall point, the core of recirculation approaches the impeller exit The length rises to peak point and then drops with mass flow reduction, while the height steadily rises.

Pulsatile Flow Analyses of Newtonian Fluid and Non-Newtonian Pluid in Circular Tube (원관내 뉴턴유체와 비뉴턴유체의 맥동유동특성)

  • Cho, Min-Tae;Roh, Hyung-Woon;Suh, Sang-Ho;Kim, Jae-Soo
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.26 no.11
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    • pp.1585-1596
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    • 2002
  • The objectives of the present study are to numerically and experimentally investigate the steady and pulsatile flow phenomena in the circular tubes, to quantitatively compare the flow characteristics of Newtonian and non-Newtonian fluids, and to find meaningful hemodynamic information through the flow analysis in the human blood vessels. The particle image velocimetry is adopted to visualize the flow fields in the circular tube. and the results from the particle image velocimetry are used to validate the results of the numerical analysis. In order to investigate the blood flow phenomena in the circular tube. constitutive equations, which are suitable to describe the rheological properties of the non-Newtonian fluids. are determined, and the steady and pulsatile momentum equations are solved by the finite volume prediction. The velocity vectors of the steady and pulsatile flow in the circular tube obtained by the particle image velocimetry arc in good agreement with those by the numerical analysis. For the given mass flow rate. the axial velocity profiles of the Newtonian and the non-Newtonian fluids appear differently. The pulsatile flow phenomena of the Newtonian and the non-Newtonian fluids are quite different from those of the steady flow.