• Title/Summary/Keyword: Measurement results

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Development of SFM System for Nano In-Process Profile Measurement (나노인프로세스 표면형상계측을 위한 SFM시스템의 개발)

  • Kweon, Hyun-Kyu;Choi, Seong-Dae;Hong, Sung-Wook
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.3 no.2
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    • pp.53-59
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    • 2004
  • In this paper, we propose a new multi-purpose Scanning Force Microscope (SFM) system. The system can be used for nano/micro-scratching, in-process profile measurement, and observation of potential surface defects which occur during the scratching in air or liquid. Experimental results of nano/micro-scratching show that the smallest scratching depth can be controlled to be 10nm, which corresponds to the stability of the SFM system. Profile measurements of nano/micro-scratching surfaces have also been performed by the method of on-machine measurement and in-process measurement. Two measurement results were in good agreement with each other. The maximum difference was approximately 10 nm, which was mainly caused by the sampling repeatability error that influences the measurement accuracy Also, micro-defects on the micro-scratching surface were successfully detected by the SFM system. It was confirmed that the number of micro-defects increases when the surface is subjected to a cyclic bending load. The maximum depth was less than 100nm.

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Bayesian smoothing under structural measurement error model with multiple covariates

  • Hwang, Jinseub;Kim, Dal Ho
    • Journal of the Korean Data and Information Science Society
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    • v.28 no.3
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    • pp.709-720
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    • 2017
  • In healthcare and medical research, many important variables have a measurement error such as body mass index and laboratory data. It is also not easy to collect samples of large size because of high cost and long time required to collect the target patient satisfied with inclusion and exclusion criteria. Beside, the demand for solving a complex scientific problem has highly increased so that a semiparametric regression approach could be of substantial value solving this problem. To address the issues of measurement error, small domain and a scientific complexity, we conduct a multivariable Bayesian smoothing under structural measurement error covariate in this article. Specifically we enhance our previous model by incorporating other useful auxiliary covariates free of measurement error. For the regression spline, we use a radial basis functions with fixed knots for the measurement error covariate. We organize a fully Bayesian approach to fit the model and estimate parameters using Markov chain Monte Carlo. Simulation results represent that the method performs well. We illustrate the results using a national survey data for application.

A Study on Science-related Affective Characteristic and Perception of Measurement of Elementary Students Who Participated in Citizen Science Activities (시민과학 활동에 참여한 초등학생들의 과학 관련 정의적 특성 및 측정에 대한 인식 분석)

  • Shin, Jung-Yun;Park, Sang-Woo
    • Journal of Korean Elementary Science Education
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    • v.39 no.2
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    • pp.168-182
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    • 2020
  • This study investigated how elementary students' science-related affective characteristics and their perception of measurement changed following participation in citizen science activities through a GLOBE program. Before and after the activities, test of positive experiences about science (PES) and perception of measurement were conducted with twelve fourth grade students. In addition, the teacher who participated in the GLOBE program with students observed and recorded the students' involvement, conversation and behavior to qualitatively analyze the value of the program and the students' perceptions of measurement. After the end of the program, an open questionnaire was conducted to fill any gaps in these observations. The results showed that citizen science activities had a positive impact on elementary students' science-related affective characteristics. In all areas of PES test, the post-test scores were higher than the pre-test results, and a statistically significant difference was seen in the 'science learning motivation' area. Furthermore, students' perception of the value and meaning of measurements was seen to deepen through ongoing global environmental data measurement activities. And their understanding of various units of measurement and numerous situations in which they might need to make measurements was also elaborated.

A Study on the Calibration of Shape Measurement System Using Digital moire (Digital moire 형상측정 시스템의 보정에 관한 연구)

  • 김도훈;유원재;박낙규;강영준
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2003.04a
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    • pp.255-259
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    • 2003
  • Moire topography method isa well-known non-contacting 3-D measurement method as afast non-contact test for three-dimension shape measuring method. Recently, it's important to study the automatic three-dimension measurement by moire topography because it is frequently applied to the reverse engineering , the medical , the entertainment fields. Three-dimension measurement using projection of moire topography is very attractive because of its high measuring speed and high sensitivity. In this paper, the classical moire method is computerized-so called digital moire when a virtual grating pattern is projected on a surface, the captured image by the CCD camera has three-dimension information of the objects. The moire image can be obtained through a simple image processing and a reference grating pattern. and it provides similar results without physical grating pattern. digital projection moire topography turn out to be very effective for the three-dimension measurement of objects. Using different N-bucket algorithm method of digital projection moire topography is tested to measuring object with the 2-ambiguity problem. Experimental results prove that the proposed scheme is capable of finding measurement errors that decreased more by using the four-three step algorithm method instead of the same step in the phase shifting of different pitch.

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The effect of noise and doppler for range measurement of low orbit satellite using tone method (톤 방식을 사용한 저궤도 위성 거리 측정에서의 잡음과 도플러 영향 분석)

  • 김영완;박동철
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.25 no.5A
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    • pp.641-650
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    • 2000
  • The effects of noise and doppler for low orbit satellite range measurement using tone method are represented in this paper. Also the optimal noise bandwidth of range signal detection circuit which is used for range measurement system of KOMPSAT is proposed. Based on the effects of satellite orbit parameters via the deduction of dynamic motion characteristics of low orbit satellite and signal to noise spectral density of range measurement signal, the effects of noise and doppler for range measurement system are analyzed. The effect of satellite link noise is decreased, but the effect for doppler is increased as the PLL noise bandwidth of range signal detection circuit is increased. The validation of analyzed effect is verified via comparison of measurement results of KOMPSAT's range measurement system and simulation results in environments of low orbit satellite.

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Analysis of Measurement Error for PM-2.5 Mass Concentration by Inter-Comparison Study (비교 실험을 통한 PM-2.5 질량농도의 측정오차 분석)

  • Jung, Chang-Hoon;Park, Jin-Hee;Hwang, S.M.
    • Journal of Environmental Impact Assessment
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    • v.19 no.4
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    • pp.431-441
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    • 2010
  • In this study, inter-comparison for PM-2.5 was undertaken. The PM-2.5 mass concentrations using the gravimetric and beta-attenuation methods were compared during the winter in 2007. Two different types of conventional filter-based measurements (Cyclone type and Impactor type) were also collocated and the measurement data was compared with each other. As a result, continuous PM-2.5 data using beta attenuation method show a comparable mass concentration with gravimetric measurement when the inlet of beta-gauge sampler is heated. The results also showed that the cyclone type shows a little high PM-2.5 concentration than Impactor type. In all the sampling cases, the correlations between measurement methods are high. Subsequently, this study suggests that highly correlated relationship between PM-2.5 measurement instruments can be obtained through the inter-comparison results based on filterb-ased gravimetric method and more intensive measurement and theoretical studies are needed in order to clarify the measurement errors for different sampler types.

An integrated visual-inertial technique for structural displacement and velocity measurement

  • Chang, C.C.;Xiao, X.H.
    • Smart Structures and Systems
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    • v.6 no.9
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    • pp.1025-1039
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    • 2010
  • Measuring displacement response for civil structures is very important for assessing their performance, safety and integrity. Recently, video-based techniques that utilize low-cost high-resolution digital cameras have been developed for such an application. These techniques however have relatively low sampling frequency and the results are usually contaminated with noises. In this study, an integrated visual-inertial measurement method that combines a monocular videogrammetric displacement measurement technique and a collocated accelerometer is proposed for displacement and velocity measurement of civil engineering structures. The monocular videogrammetric technique extracts three-dimensional translation and rotation of a planar target from an image sequence recorded by one camera. The obtained displacement is then fused with acceleration measured from a collocated accelerometer using a multi-rate Kalman filter with smoothing technique. This data fusion not only can improve the accuracy and the frequency bandwidth of displacement measurement but also provide estimate for velocity. The proposed measurement technique is illustrated by a shake table test and a pedestrian bridge test. Results show that the fusion of displacement and acceleration can mitigate their respective limitations and produce more accurate displacement and velocity responses with a broader frequency bandwidth.

Methods to Measure the Critical Dimension of the Bottoms of Through-Silicon Vias Using White-Light Scanning Interferometry

  • Hyun, Changhong;Kim, Seongryong;Pahk, Heuijae
    • Journal of the Optical Society of Korea
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    • v.18 no.5
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    • pp.531-537
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    • 2014
  • Through-silicon vias (TSVs) are fine, deep holes fabricated for connecting vertically stacked wafers during three-dimensional packaging of semiconductors. Measurement of the TSV geometry is very important because TSVs that are not manufactured as designed can cause many problems, and measuring the critical dimension (CD) of TSVs becomes more and more important, along with depth measurement. Applying white-light scanning interferometry to TSV measurement, especially the bottom CD measurement, is difficult due to the attenuation of light around the edge of the bottom of the hole when using a low numerical aperture. In this paper we propose and demonstrate four bottom CD measurement methods for TSVs: the cross section method, profile analysis method, tomographic image analysis method, and the two-dimensional Gaussian fitting method. To verify and demonstrate these methods, a practical TSV sample with a high aspect ratio of 11.2 is prepared and tested. The results from the proposed measurement methods using white-light scanning interferometry are compared to results from scanning electron microscope (SEM) measurements. The accuracy is highest for the cross section method, with an error of 3.5%, while a relative repeatability of 3.2% is achieved by the two-dimensional Gaussian fitting method.

Impedance Measurement and Matching Technique for Medium-Voltage Powerline Communication (고압전력선 통신을 위한 임피던스 측정 및 정합 방안 연구)

  • 이재조;유정훈;홍충선;이대영
    • The Transactions of the Korean Institute of Electrical Engineers D
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    • v.53 no.5
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    • pp.345-352
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    • 2004
  • Currently, high data rate PLC(Power Line Communications), up to 100 Mbps, which use frequency bandwidth between 2 MHz and 30 MHz is investigated very hard, and commercial PLC modem for low voltage powerline network (indoor) is coming soon into communication market. For the purpose of developing a fit communication system which has little distortion of signal and attenuation, it is surely necessary to know about channel environments of powerline. Especially, the impedance measurement of the powerline and impedance matching are very important. As is known, since medium-voltage powerline (22.9 ㎸) is still working, it is not so simple to measure the powerline impedance. In our study, a portable impedance measurement equipment is developed. It consists of coupling capacitor, a drain coil and impedance matching transformer. The equipment is easily connected to medium voltage line and impedance of power line is measured using a network analyzer. Also, measurement results are used for impedance matching of PLC signal. In fact, matching transformer with several different impedances are used. The matching transformer is connected between coupling capacitor and signal port. In this paper, the developed portable impedance measurement equipment and impedance measurement results are presented. Also impedance matching technique using matching transformers will be explained. We showed the result of the improved performance by the impedance matching.

MULTI-POINT MEASUREMENT OF STRUCTURAL VIBRATION USING PATTERN RECOGNITION FROM CAMERA IMAGE

  • Jeon, Hyeong-Seop;Choi, Young-Chul;Park, Jin-Ho;Park, Jong-Won
    • Nuclear Engineering and Technology
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    • v.42 no.6
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    • pp.704-711
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    • 2010
  • Modal testing requires measuring the vibration of many points, for which an accelerometer, a gab sensor and laser vibrometer are generally used. Conventional modal testing requires mounting of these sensors to all measurement points in order to acquire the signals. However, this can be disadvantageous because it requires considerable measurement time and effort when there are many measurement points. In this paper, we propose a method for modal testing using a camera image. A camera can measure the vibration of many points at the same time. However, this task requires that the measurement points be classified frame by frame. While it is possible to classify the measurement points one by one, this also requires much time. Therefore, we try to classify multiple points using pattern recognition. The feasibility of the proposed method is verified by a beam experiment. The experimental results demonstrate that we can obtain good results.