Submicro-displacement Measuring System with Moire Interferometer and Application to the Themal Deformation of PBGA Package (무아레 간섭계 초정밀 변위 측정장치의 설계 및 PBGA 패키지 열변형 측정에의 응용)
-
- Transactions of the Korean Society of Mechanical Engineers A
- /
- v.28 no.11
- /
- pp.1646-1655
- /
- 2004