• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 추계학술대회논문집B
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• pp.597-602
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• 2000

In a MEMS(micro-electro mechanical system), the fluid may slip near the surface of a solid and have a discontinuous temperature profile. A numerical prediction in this slip flow region can provide a reasonable guide for the design and fabrication of micro devices. The compressible Navier-Stokes equation with Maxwell/smoluchowski boundary condition is solved for two simple systems; couette flow and pressure driven flow in a long channel. We found that the couette flow could be regarded as an incompressible system in low speed regions. For the pressure driven flow system, we observed nonlinear distribution of pressure in the long channel and numerical results showed a good agreement with the experimental results.