• 제목/요약/키워드: Materials engineering

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Dry etching of SiC in inductively coupled $SF_6/O_2$ Plasma

  • Yim, Jeong-Hyuk;Lee, Jong-Ho;Song, Ho-Keun;Moon, Jeong-Hyun;Seo, Han-Seok;Oh, Myeong-Sook;Lee, Jae-Bin;Kim, Hyeong-Joon
    • 한국결정학회:학술대회논문집
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    • 한국결정학회 2007년도 추계학술연구발표회 및 정기총회
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    • pp.47-47
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    • 2007
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