• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.105-105
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• 2009

$ZrO_2$ is one of the most attractive high dielectric constant (high-k) materials. As integrated circuit device dimensions continue to be scaled down, high-k materials have been studied more to resolve the problems for replacing the EY31conventional $SiO_2$. $ZrO_2$ has many favorable properties as a high dielectric constant (k= 20~25), wide band gap (5~7 eV) as well as a close thermal expansion coefficient with Si that results in good thermal stability of the $ZrO_2/Si$ structure. In order to get fine-line patterns, plasma etching has been studied more in the fabrication of ultra large-scale integrated circuits. The relation between the etch characteristics of high-k dielectric materials and plasma properties is required to be studied more to match standard processing procedure with low damaged removal process. Due to the easy control of ion energy and flux, low ownership and simple structure of the inductively coupled plasma (ICP), we chose it for high-density plasma in our study. And the $BCl_3$ included in the gas due to the effective extraction of oxygen in the form of $BCl_xO_y$ compound In this study, the surface kinetic properties of $ZrO_2$ thin film was investigated in function of Ch addition to $BCl_3/Ar$ gas mixture ratio, RF power and DC-bias power based on substrate temperature. The figure 1 showed the etch rate of $ZrO_2$ thin film as function of gas mixing ratio of $Cl_2/BCl_3/Ar$ dependent on temperature. The chemical state of film was investigated using x-ray photoelectron spectroscopy (XPS). The characteristics of the plasma were estimated using optical emission spectroscopy (OES). Auger electron spectroscopy (AES) was used for elemental analysis of etched surface.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.456-456
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• 2009

Boron doping on an n-type Si wafer is requisite process for IBC (Interdigitated Back Contact) solar cells. Fiber laser annealing is one of boron doping methods. For the boron doping, uniformly coated or deposited film is highly required. Plasma enhanced chemical vapor deposition (PECVD) method provides a uniform dopant film or layer which can facilitate doping. Because amorphous silicon layer absorption range for the wavelength of fiber laser does not match well for the direct annealing. In this study, to enhance thermal affection on the existing p-a-Si:H layer, a ${\mu}c$-Si:H intrinsic layer was deposited on the p-a-Si:H layer additionally by PECVD. To improve heat transfer rate to the amorphous silicon layer, and as heating both sides and protecting boron eliminating from the amorphous silicon layer. For p-a-Si:H layer with the ratio of $SiH_4$ : $B_2H_6$ : $H_2$ = 30 : 30 : 120, at $200^{\circ}C$, 50 W, 0.2 Torr for 30 minutes, and for ${\mu}c$-Si:H intrinsic layer, $SiH_4$ : $H_2$ = 10 : 300, at $200^{\circ}C$, 30 W, 0.5 Torr for 60 minutes, 2 cm $\times$ 2 cm size wafers were used. In consequence of comparing the results of lifetime measurement and sheet resistance relation, the laser condition set of 20 ~ 27 % of power, 150 ~ 160 kHz, 20 ~ 50 mm/s of marking speed, and $10\;{\sim}\;50 {\mu}m$ spacing with continuous wave mode of scanner lens showed the correlation between lifetime and sheet resistance as $100\;{\Omega}/sq$ and $11.8\;{\mu}s$ vs. $17\;{\Omega}/sq$ and $8.2\;{\mu}s$. Comparing to the singly deposited p-a-Si:H layer case, the additional ${\mu}c$-Si:H layer for doping resulted in no trade-offs, but showed slight improvement of both lifetime and sheet resistance, however sheet resistance might be confined by the additional intrinsic layer. This might come from the ineffective crystallization of amorphous silicon layer. For the additional layer case, lifetime and sheet resistance were measured as $84.8\;{\Omega}/sq$ and $11.09\;{\mu}s$ vs. $79.8\;{\Omega}/sq$ and $11.93\;{\mu}s$. The co-existence of $n^+$layeronthesamesurfaceandeliminating the laser damage should be taken into account for an IBC solar cell structure. Heavily doped uniform boron layer by fiber laser brings not only basic and essential conditions for the beginning step of IBC solar cell fabrication processes, but also the controllable doping concentration and depth that can be established according to the deposition conditions of layers.

• 대한후두음성언어의학회지
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• 제30권2호
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• pp.118-123
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• 2019

Background and Objectives Voice evaluation is classified into subjective tests such as auditory perception and self-measurement, and objective tests such as acoustic and aerodynamic analysis. When evaluating dysphonia, subjective and objective test results do not always match. The purpose of this study was to analyze the relationship between subjective and objective evaluation in patients with dysphonia and to identify meaningful parameters by disease. Materials and Method The total of 322 patients who visited voice clinic from May 2017 to May 2018 were included in this study. Laryngeal lesions were identified using stroboscopy. Pearson correlation test was performed to analyse correlation between subjective tests including GRBAS scale and voice handicap index, and objective tests including jitter, shimmer, noise to harmonic ratio (NHR), cepstral peak prominence (CPP), maximal phonation time (MPT), mean flow rate, and subglottic pressure. Results In vocal nodule and sulcus vocalis, among GRBAS system, grade and breathiness showed good correlation with CPP, and roughness showed good correlation with jitter or shimmer. In unilateral vocal cord paralysis (UVCP), grade and breathiness showed a very good correlation with CPP, and also good correlation with jitter, shimmer, NHR, and MPT. Also asthenia showed good correlation with CPP and MPT. Vocal polyp has a limited association with other diseases. Conclusion In patients with dysphonia, grade and breathiness showed good correlation with CPP, jitter, and shimmer, and reflect the state of voice change well especially in UVCP, CPP, and MPT.

• 한국지하수토양환경학회:학술대회논문집
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• 한국지하수토양환경학회 2002년도 총회 및 춘계학술발표회
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• pp.85-92
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• 2002

When the United Nation classified as Korea is the one of the water deficit country. The consensus was made that the water is the one of the precious national resources. Government increases their R/D budget trying to get more clean water bodies. For instances, 'Sustainable Water Resources Development' project is the one of major title in '21 Century Frontier Research project and there are several small research projects are undergoing by the Ministry of Agriculture and KARICO. However, when the environmental preservation issue has been get more emphasis, construction of the Surface Dam met the blockage from the environmentalists due to the problem of the their water buried area. Since the most fitting site for surface dam had been used in the past, some engineer move their focus on modification of the existing Dam's height to enlarge its capacity or dredging the bottom of the reservoir recently However dredging evoke water quality problem in return by accumulated materials at the bottom. Last year the Dong Gang Dam plan has been canceled by environmental problem in water buried area of the reservoir. With the point of this view, ground water gets more focus for the one of the useful alternative for clean water bodies. Underground dam technique which had widely applied once in the early nineteen eighties by the KARICO and attenuated due to engineering insufficiency. The technique is newly studied with the advanced engineering technique. Still groundwater usage rate in Korea is much lower comparing with the advanced countries and has many rooms to develop. Wells, under ground dam and radial collector wells are typical facilities up to now. There is little application in Korea for the Recharge Dam, which had been widely used in the advanced countries. The Recharge Dam is technique to conjunct surface water and groundwater body together, This technique had developed to increase groundwater recharge at the beginning This research is the result of the study on the possibility of the development of the new technology, Groundwater Reservoir' which was modified from Recharge Dam. Groundwater Reservoir is like a deep artificial lakes trenched in hard rock aquifer to get groundwater. The advantage of the Groundwater Reservoir is followings 1) It can be developed at the plains area, not in the deep valley 2) Huge water body can be developed without dam 3) Small buried area comparing surface water dam makes the least environmental effect. 4) Trenching cost can be substitute by the income of the selling rock debris 5) Outfit of the reservoir can be modified to match with the site prospect 6) Rock debris can be used as constructing materials 7) It can be used as groundwater recharge system when the heavy rains comes 8) The reservoir looks like scenery lake with huge clean water bodies.

• 한국지하수토양환경학회지:지하수토양환경
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• 제8권4호
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• pp.1-11
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• 2003

압축력의 변화에 따른 균열 간극변화 양상을 측정하고 간극변화와 수리전도도와의 관계를 파악하기 위해 이 연구에서는 다섯 단계의 수직 일축압축력을 균열면에 연속적으로 가하면서 고해상도의 공초점 레이저 스캔 현미경 (confocal laser scanning microscope; CLSM)을 이용하여 간극의 크기를 측정하고 디지털 이미지를 획득하였다. 기존의 연구들과는 달리 이 연구의 측정방법은 압력변화에 대한 동일시료 간극의 반응을 연속적으로 파악할 수 있는 점이 특징이다. 측정결과는 간극크기가 일정하지 않은 불평탄한 균열형태를 매우 잘 나타내었다. 균열 조도(roughness)로 인해 압력에 따른 간극 변화량은 일정하지 않고 부분마다 다름을 보였다. 각 압력단계에서 간극변화에 따른 투수성 변화양상을 파악하고자 실내투수시험을 병행하여 실시한 결과, 각 압력단계에서의 투수성 변화도 일정한 감소율을 나타내지 않고 간극 변화율이 크더라도 투수율은 오히려 작은 경우도 관찰되었다. 현미경을 통해 측정한 물리적 간극과 실제 유체유동 경로가 되는 수리간극의 크기 차이를 파악하기 위해 계산을 한 결과, 미미한 갈이지만 물리적 간극보다 작은 크기의 수리간극이 구해졌다. 또한, 실내투수시험 결과를 이용하여 구한 투수계수는 삼승법칙을 따르지 않는 것으로 드러났으며, 이러한 사실들은 균열 양쪽이 서로 평행하지 않고 불평탄한 양상을 가짐을 의미하는 것으로서, 현미경을 통해 직접 관찰한 간극양상과 잘 일치하는 것이다.

• Asian-Australasian Journal of Animal Sciences
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• 제19권5호
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• pp.661-671
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• 2006

Steers (n = 335) of known genetic backgrounds from four fundamentally different growth types were subjected to two production systems to study the main effects and possible interactive effects on carcass composition. Growth types were animals with genetic potential for large mature weight (LL), intermediate mature weight-late maturing (IL), intermediate mature weight-early maturing (IE), and small mature weight-early maturing (SE). Each year, in a nine year study, calves of each growth type were weaned and five steers of each growth type were developed on pasture or feedlot and harvested at approximately 20 and 14 mo of age, respectively. Data recorded were chilled carcass weight and percentages of forequarter, foreshank, chuck, rib, plate, brisket, hindquarter, round, rump, shortloin, sirloin, flank, lean, fat, bone, and retail cuts. The growth $type{\times}production$ system interaction was an important source of variation in chilled carcass weight (p = 0.0395) and percentage retail cuts (p = 0.001), lean (p = 0.001), fat (p = 0.001), rump (p = 0.0454), shortloin (p = 0.0487), and flank (p = 0.001). The ranking of the growth $type{\times}production$ system means for percentage lean was LL-pasture>IL-pasture = IE-pasture = SE-pasture>LL-feedlot, IL-feedlot>IE-feedlot = SE-feedlot. The growth $type{\times}production$ system interaction was non-significant (p>0.05) for forequarter, foreshank, chuck, rib, plate, brisket, hindquarter, round and bone. Growth types of IE and SE yielded greater (p<0.05) mean forequarter than did growth types of IL and LL ($51.6{\pm}0.3$ and $51.5{\pm}0.3$ vs. $51.1{\pm}0.3$ and $50.8{\pm}0.3%$). Mean bone was highest (p<0.05) for the LL growth type and lowest (p<0.05) for the SE growth type ($19.5{\pm}0.5$ vs. $16.8{\pm}0.5%$). Mean bone was greater (p<0.05) for the pastured steers than for the feedlot steers ($21.8{\pm}0.8$ vs. $14.5{\pm}0.6%$). These data indicate that growth type responded differently in the two production systems and that these results should be helpful in the match of genetics to production resources.

• 한국정보과학회논문지:정보통신
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• 제34권3호
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• pp.203-217
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• 2007

본 논문은 출력 버퍼를 장착한 크로스바 스위치로 구성된 다양한 네트워크들의 성능 예측 모형을 제안하고, 스위치에 장착된 버퍼의 개수 증가에 따른 성능 향상 추이를 분석하였다. 스위치 내부에 버퍼를 장착하는 기법은 네트워크 내부의 데이타 충돌 문제를 효과적으로 해결하고, 네트워크 성능 및 신뢰도를 높이는 방법으로 널리 알려져 있다. 또한, 크로스바 스위치를 이용하여 네트워크를 구성할 경우 네트워크 내부의 스위치들 간의 연결 형태 그리고, 각 스위치 내부의 데이타 이동 패턴에 따라 네트워크 특성이 결정된다. 본 논문에서는 크로스바 스위치로 구성된 세 가지 서로 다른 형태의 네트워크 : 다단 연결 망(MIN), Fat-tree 망, 그리고 일반 통신망 등의 성능 분석모형을 제안하였다. 제안한 분석 모형은 네트워크 내부 스위치에 장착된 버퍼의 개수와 무관하게 네트워크 성능 평가의 두 가지 주요 요소인 네트워크 정상상태 처리율(Normalized Throughput, NT)과 네트워크 지연시간을 예측한다. 제안한 수학적 성능 분석 연구의 실효성을 검증하기 위하여 병행된 시abf레이션 결과는 상호 미세한 오차 범위 내에서 모형의 예측 데이타와 일치하는 결과를 보여 분석 모형의 타당성을 입증하였다. 또한 분석 결과 네트워크 내부 스위치에 많은 버퍼를 장착 할수록 상대적으로 정상상태 처리율의 증가율은 감소하고, 네트워크 지연시간은 증가하는 것으로 나타났다.

• Journal of Korean Neurosurgical Society
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• 제63권2호
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• pp.237-247
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• 2020

Objective : Fixation of the C1-2 segment is challenging because of the complex anatomy in the region and the need for a high degree of accuracy to avoid complications. Preoperative 3D-computed tomography (CT) scans can help reduce the risk of complications in the vertebral artery, spinal cord, and nerve roots. However, the patient may be susceptible to injury if the patient's anatomy does not match the preoperative CT scans. The intraoperative 3D image-based navigation systems have reduced complications in instrument-assisted techniques due to greater accuracy. This study aimed to compare the radiologic outcomes of C1-2 fusion surgery between intraoperative CT image-guided operation and fluoroscopy-guided operation. Methods : We retrospectively reviewed the radiologic images of 34 patients who underwent C1-2 fusion spine surgery from January 2009 to November 2018 at our hospital. We assessed 17 cases each of degenerative cervical disease and trauma in a study population of 18 males and 16 females. The mean age was 54.8 years. A total of 139 screws were used and the surgical procedures included 68 screws in the C1 lateral mass, 58 screws in C2 pedicle, nine screws in C2 lamina and C2 pars screws, four lateral mass screws in sub-axial level. Of the 34 patients, 19 patients underwent screw insertion using intraoperative mobile CT. Other patients underwent atlantoaxial fusion with a standard fluoroscopy-guided device. Results : A total of 139 screws were correctly positioned. We analyzed the positions of 135 screws except for the four screws that performed the lateral mass screws in C3 vertebra. Minor screw penetration was observed in seven cases (5.2%), and major pedicle screw penetration was observed in three cases (2.2%). In one case, the malposition of a C2 pedicle screw was confirmed, which was subsequently corrected. There were no complications regarding vertebral artery injury or onset of new neurologic deficits. The screw malposition rate was lower (5.3%) in patients who underwent intraoperative CT-based navigation than that for fluoroscopy-guided cases (10.2%). And we confirmed that the operation time can be significantly reduced by surgery using intraoperative O-arm device. Conclusion : Spinal navigation using intraoperative cone-beam CT scans is reliable for posterior fixation in unstable C1-2 pathologies and can be reduced the operative time.

• 한국음향학회지
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• 제14권2호
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• pp.50-61
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• 1995

본 논문에서는 음성 신호가 가지고 있는 중요한 특성을 유지하면서 발음 속도만을 변화시키는 시간축 변환 방법을 범용 디지탈 신호 처리 프로세서를 이용하여 실시간으로 구현하였다. 음성 신호 시간축 변환은 음성 신호의 발음 속도만을 변화시키기 때문에, 입력 신호와 변환 신호간의 시간적 차이가 발생하여 실시간 처리가 불가능하다. 본 논문에서는 이러한 입력, 변환 신호간의 시간차를 해결하기 위해서, 카세트 테이프 레코더의 모터 회전 속도를 조절하는 것과 같은 물리적 시간축 변환으로, 입력 음성 신호를 느리게 또는 빠르게 변환시켜 그 신호를 실시간 시스템의 입력으로 사용하였다. 카세트 레코더의 주행 속도만을 조절하는 물리적 변환은 원 신호의 피치 정보를 왜곡시켜, 원 음성의 특성을 변화시키기 때문에, 본 연구에서는 FIR 필터를 이용한 피치 보정 기법으로 왜곡된 신호를 원신호로 복원한 후, SOLA 시간축 변환 방법을 이용하여, 복원된 신호를 카세트 레코더의 모터 속도에 맞추어 시간축으로 변환하는 시스템을 실시간으로 구현하였다. 구현된 알고리듬으로 음성 신호를 시간축으로 변환하는 실험에서, 16비트 해상도를 가진 ADSP2101 프로세서로 구현한 결과와 컴퓨터 시뮬레이션 결과를 비교할 때 평균 구간 신호 대 오차비가 대략 20dB로 두 결과가 거의 유사함을 알 수 있었다.

• 한국인터넷방송통신학회논문지
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• 제14권2호
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• pp.23-34
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• 2014

소프트웨어 프로젝트에 대해 12개의 다른 소프트웨어 생명주기 모델들이 제안되었지만 모든 소프트웨어의 특성을 만족시킬 수 있는 일반화된 모델이 없는 실정이다. 개발조직은 여러 모델들을 적절히 혼합하여 개발될 시스템과 능력에 맞도록 새로운 모델을 개발하여야만 한다. 본 논문에서는 다양한 소프트웨어 개발 상황에 보다 적합할 것으로 판단되는 중첩-동시개발 생명주기 모델을 제안하였다. 먼저, 개발 과정을 추상화와 구현으로 구분하여 추상화는 개념정립단계부터 상세설계단계 시작시점까지로, 구현은 상세설계단계부터 시스템 시험단계로 분류하였다. 다음으로, 추상화는 파레토 법칙을 적용하여 하나의 단계에서 개발될 기능이 20% 진행된 시점에서 다음 단계를 시작하는 중첩된 단계 개념을 도입하였다. 구현은 하나의 UC가 완료되면 바로 다음 단계 수행 팀에게 전달하여 여러 단계가 동시 수행되어 개발하는 형태를 도입하였다. 제안된 모델은 개발자원 활용의 비효율성을 크게 줄일 수 있는 장점이 있다. 제안된 모델을 적용시 보다 빠른 시간에 보다 저렴한 비용으로 보다 좋은 품질의 소프트웨어를 개발하여 고객에게 납품할 수 있어 고객을 만족도를 향상시킬 수 있으며, 더불어 소프트웨어 개발 성공률을 높이는데도 기여할 것으로 판단된다.