• Transactions of the Korean Society of Mechanical Engineers B
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• v.34 no.2
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• pp.179-184
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• 2010

This experimental study investigated the effect of tip clearance and bypass flow on the cooling performance of a straight fin heat sink. Both the horizontal and vertical directions of the bypass flow were studied by using a mass flow controller and test sections. The thermal resistance of a heat sink was obtained to elucidate the response of the cooling performance to tip clearance and bypass flow. The thermal resistance of a straight fin heat sink gradually increases with increasing tip clearance. A flow guide unit was employed to reduce the bypass flow. An optimal distance from the leading edge of the heat sink to the flow guide unit was found for the fixed volume flow rate. The contribution of the flow guide unit to the thermal performance of a heat sink increases with increasing volume flow rate.

• Fire Science and Engineering
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• v.30 no.2
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• pp.106-113
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• 2016

Ultra-high pressure positive displacement pump can discharge high pressure water with mass volume, which depends on periodic changes in volume that made by rotation motor. Its high efficiency of discharge is one of the most strong point of positive displacement pump. Due to its simple system structure, it can be miniaturized and lightened. Positive displacement pump can discharge high pressure with stable flow rate, irrespective of pressure fluctuate. This is the reason that positive displacement pump was used instead of centrifugal pump. In this study, shutoff operating system was developed for positive displacement pump to secure safety of high pressure operate. This shutoff system contains controller system, electronic clutch, and relief valve, and each part is mutual supplementation. Speed test was carried out in order to check operation of controller program and electronic clutch and fluid flow, venting experiment of the relief valve. It was confirmed that segment system of ultra-high pressure positive displacement pump is operated.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.05a
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• pp.180-183
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• 2005

The engine mount of vehicle systems is role of support engine mass and isolate noise and vibration from engine disturbance forces. One of attractive candidates to achieve this goai is to utilize a semi-active ER engine mount. By applying this, we can effectively control damping force and hence the noise and vibration by just controlling the intensity of electric field. However, control performance of the engine mount may be very sensitive to temperature variation during engine operation. In this work, we Investigate dynamic performances of ER engine mount with respect to the temperature variation. In order to undertake this, a flow-mode type of ER engine mount is designed and manufactured. Displacement transmissibility is experimentally and numerically evaluated as a function of the electric field. The ER engine mount is then incorporated with full-vehicle model in order to investigate vibration control performance. After formulating the governing equation of motion, a semi-active controller is designed. The controller is implemented through a hardware-in-the-loop simulation (HILS), and control responses such as acceleration level at various engine speeds are evaluated in the frequency and time domains.

• Journal of the Korean Vacuum Society
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• v.6 no.4
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• pp.298-307
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• 1997

TDS(Thermal Desorption Spectroscopy)system, for diagnosis of CRT manufacturing process, was designed and constructed. Outgassings and thermal desorptions from the part or materials of CRT can be measured and analysed with this system at various temperatures. The system is consisted of 3 parts, vacuum chamber and pumping system with variable conductance, sample heating stages & their controller, and outgassing measurement devices, like as ion gauge or quadrupole mass spectrometer. The ultimate pressure of the system was under $1{\times}10^{-7}$ Pa. With the variable conductance system, the effective pumping speed of the chamber could be controlled from sub l/s to 100 l/s. The effective pumping speed values were determined by dynamic flow measurement principle. The temperatures and ramp rate of sample were controlled by tungsten heater and PID controller up to 600℃ within ±1℃ difference to setting value. Ion gauge & QMS were calibrated for quantitative measurements. Some examples of TDS measurement data and application on the CRT process analysis were shown.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.1196-1200
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• 2004

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. In this study, a bubble-powered micropump was fabricated and tested. The micropump consists of two-parallel micro line heaters, a pair of nozzle-diffuser flow controller and a 1 mm in diameter, 400 ${\mu}m$ in depth pumping chamber. The two-parallel micro line heaters with 20 ${\mu}m-width$ and 200 ${\mu}m-length$ were fabricated to be embedded in the silicon dioxide layer of a wafer which serves as a base plate for the micropump. The pumping chamber, the pair of nozzle-diffuser unit and microchannels including the liquid inlet and outlet port were fabricated by etching through another silicon wafer. A glass wafer (thickness of $525{\pm}15$ ${\mu}m$) having two holes of inlet and outlet ports of liquid serve as upper plate of the pump. Finally the silicon wafer of the base plate, the silicon wafer of pumping chamber and the glass wafer were aligned and bonded (Si-Si bonding and anodic bonding). A sequential photograph of bubble nucleation, growth and collapse was visualized by CCD camera. Clearly liquid flow through the nozzle during the period of bubble growth and slight back flow of liquid at the end of collapsing period can be seen. The mass flow rate was found to be dependent on the duty ratio and the operation frequency. As duty ratio increases, flow rate decreases gradually when the duty ratio exceeds 60%. Also as the operation frequency increases, the flow rate of the micropump decreases slightly.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.505-509
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• 2002

The looper control of hot strip finishing mill is one of the most important control item In hot strip rolling mill process. Loopers are placed between finishing mill stands and control the mass flow of the two stands. Another important action of the looper is to control the strip tension which influences on the width of the strip. So it is very important to control both the looper angle and the strip tension simultaneously but the looper angle and the strip tension are strongly interacted by each other. The gain scheduling is to break the control design process into two steps. First, one designs local linear controllers based on linerizations of the nonlinear system at several different operating conditions. Second, a global nonlinear controller for the nonlinear system is obtained by interpolating.

• Proceedings of the Acoustical Society of Korea Conference
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• autumn
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• pp.313-316
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• 2004

진공펌프의 상태를 미리 알고 대처하는 것은 수많은 진공펌프를 사용하는 반도체 회사에게는 경제적인 이익을 준다. 진공펌프의 상태를 파악하기 위해서는 실제 공정에서 많은 실험을 해야만 한다. 하지만 실제 공정에서 실험을 하기에는 많은 제약과 문제점들이 따른다. 이를 해결하기 위해 본 연구는 MFC(Mass Flow Controller)를 이용하여 실제 공정과 유사한 압력조건을 생성할 수 있는 시뮬레이션 시스템을 구축하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.255.1-255.1
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• 2014

태양전지 도핑공정은 대부분 퍼니스(furnace)도핑으로 제작된다. 퍼니스 도핑 공정은 고가의 장비와 유지 비용이 요구되며 국부적인 부분의 도핑은 제한적이다. 또한 도핑 시 온도와 공정 시간이 태양전지의 전기적 특성을 결정짓는 중요한 변수 이다. 그리하여 최근 많은 연구가 진행되는 대기압 플라즈마를 이용하여 도핑공정에 응용하고자 한다. 본 연구에서 대기압 방전 시 전원은 DC-AC 인버터를 사용하였다. 인버터의 최대 출력 전압은 최대 5kv, 주파수는 수십 KHz 이다. Ar 가스는 MFC(Mass Flow Controller)를 사용하여 조절하였다. 대기압 플라즈마를 이용한 태양전지 도핑 시 소스와 ground 거리에 따른 대기압 플라즈마의 방전을 열화상카메라(thermo-graphic camera, IR)로 온도의 변화 측정 및 광학적 발광분광법(Optical Emission Spectroscopy, OES)을 통해 불순물(질소, 산소)을 측정 하였다. 웨이퍼 도핑 후 생성된 웨이퍼를 측정 및 분석을 하였다.

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.245-245
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• 2000

후각기는 후각신경과 삼차신경의 기능을 객관적이고 정량적으로 검사할 수 있는 기기로, 객관적으로 인정받을 수 있는 후각기의 제작에는 많은 어려움이 있기 때문에, 현재까지 후각신경과 삼차신경의 기능을 정확하게 측정할 수 있는 방법이 없었다. 그러나, 산업이 발달하고 공해가 더욱 심해질수록 후각의 변화가 생기고, 비강 내 질환이나, 공해물질 등에 의해 삼차신경이 민감한 반응을 일으키므로, 앞으로는 이 신경들의 측정이 중요할 것으로 여겨진다. 또한 각종 산업분야에서 이제까지 사람의 미각이나 후각에 의존하여 제품을 생산해오던 방법을 변화시켜 객관적인 수치를 이용하여 제품을 생산할 수 있다. 따라서 이번 연구에서는 사람이나 동물에게 다양한 후각물질을 원하는 정확한 농도로 투여하는 기기로, 온도와 습도를 사람의 신체 조건과 동일한 공기와 혼할하여 원하는 정확한 농도(ppm)의 후각 자극을 만들어 mass flow controller와 solenoid valve를 이용하여 square-shape의 자극모양이 되도록 한 후, 피검자에게 자극하여 전기생리학적 반응을 얻는 기기를 개발하였다.

• Proceedings of the KAIS Fall Conference
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• 2005.05a
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• pp.132-135
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• 2005

본 연구에서는 반도체 제조 공정에 이용되는 가스의 흐름을 감지하고 제어하는 장치를 제안하였다 압력센서를 MFC(Mass Flow Controller)에 의해 제어되는 다음 단의 파이널밸브(Final Valve)와 챔버사이의 가스관에 부착시켜, 이 압력센서의 신호와 공압밸브의 동작 신호를 디지털 회로를 이용하여 실시간으로 제어하도록 하였다. 이로써 반도체 제조 공정 중에 발생할 수 있는 2차 소성물로 인한 가스의 흐름 제어와 관련된 시스템 고장을 LED를 통해 실시간으로 확인 가능하다. 또한 가스누출고장발생 시 반도체 제조 공정의 프로세스를 중단시켜 장비의 손상 및 안전사고를 예방하는 기능도 있다. 본 연구에서 개발된 모듈을 이용함으로써 가스밸브의 오동작에 의한 반도체/디스플레이 제조장비의 신뢰성 향상을 기할 수 있다.