• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 추계학술대회 논문집 전기물성,응용부문
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• pp.268-270
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• 2004

This paper reports a novel masking method with various mask materials for wet etching of glass. Various mask materials such as Cr/Au, Ti/Au, Polyimide and thick SU-8 photoresist were investigated for borosilicate glass (Borofloat33) etching in concentrated hydrofluoric acid (48% HF). Polyimide and thick SU-8 photoresist are not suitable as masking material due to its poor adhesion to glass surfaces. Titanium has good adhesion is suitable as the first layer to make multi-protective layers. The best protection was obtained with a combination of Ti/Au, polyimide and Ti/Au as masking material with etch depth of $350{\mu}m$ achieved.

• 대한기계학회논문집A
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• 제26권7호
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• pp.1280-1287
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• 2002

The old technique of sandblasting which has been used for decoration of glass surface has recently been developed into a powder blasting technique for brittle materials such as glass, silicon and ceramics, capable of producing micro structures larger than $100{\mu}$ m. This paper describes the performance of powder blasting technique in micro-line grooving of glass and the effect of the number of nozzle scanning on the depth and width of line groove. Experimental results showed that increasing the no. of nozzle scanning resulted in the increase of depth and width in grooves. Increase of width which may cause several problems in the precision machining results from wear of mask film. Therefore, well-controlled masking process is the most important factor for micro machining of glass with accuracy.

• 한국정밀공학회지
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• 제18권10호
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• pp.178-183
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• 2001

Abrasive jet machining(AJM) process is similar to the sand blasting and effectively removes hard and brittle materials. AJM has applied to rough working such as debarring and rough finishing. As the need for machining of ceramics, semiconductor, electronic devices and LCD are increasing, micro AJM is developed, and has become the inevitable technique to micromachining. This paper describes the performance of the micro AJM in micro grooving of glass. Diameter of hole and width of line in grooving is 80${\mu}{\textrm}{m}$. Experimental results showed good performance in micro grooving of glass, but the size of machined groove increased about 2~4${\mu}{\textrm}{m}$. With the fine tuning of masking process and compensation of film wear. this micro AJM could be effectively applied to the micro machining of semiconductor, electronic devices and LCD.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.628-631
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• 2003

This study describes a new mastless nano-fabrication technique of Pyrex 7740 glass using the combination of nanomachining by nano-indenter XP and HF wet etching. First, the surface of a Pyrex 7740 glass specimen was machined by using the nano-machining system, which utilizes the mechanism of the nano-indenter XP. Next, the specimen was etched by HF solution. After the etching process, the convex structure or deeper hole is made because of masking or promotion effect of the affected layer generated by nano-machining. On the basis of this interesting fact. some sample structures were fabricated.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2001년도 춘계학술대회 논문집(한국공작기계학회)
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• pp.294-299
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• 2001

The old technique of sandblasting which has been used for decoration of glass surface has recently been developed into a powder blasting technique for various materials, capable of producing micro structures larger than 100 m. This paper describes the performance of powder blasting technique in micro-line grooving of glass and the effect of the number of nozzle scanning on the depth and width of line groove. Experimental results showed that increasing the no. of nozzle scanning resulted in the increase of depth and width in grooves. Increase of width which may cause several problems in the precision machining results from wear of mask film.

• E2M - 전기 전자와 첨단 소재
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• 제9권5호
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• pp.490-497
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• 1996

RF마그네트론 스파터링에 의한 $sSnO_2$ 박막을 증착한 결과 작동조건에 따라 표면에서 막손상이 발생하였는데, 이는 target에서 생성된 높은 에너지의 고속입자가 기판에서 직접 충돌로 일어나며, 마그네트론의 자계분포와도 관계된다. 또한 기판의 위치에 따라 박막의 전기적, 구조적 특성이 급격히 변하는데 본 논문은 중심자석의 세기와 RF power, 가스압력, 그리고 기판온도 등의 스파터링 작동조건을 변화시키면서 박막의 비손상을 검토하였고, 물성특성을 평가하였다. 실험결과로 부터 기판의 외축부에서 제작된 박막은 전반적으로 막손상이 없었고, 특히 target의 중심자석을 Cobalt로 설치하고 15 mTorr의 가스압력과 50 W의 RF power로 한 경우 가장 우수한 특성을 가진 박막을 얻을 수 있었다. 추가로 막손상을 방지하고자, 환원형의 masking glass를 target위에 설치하였는데, 고에너지 입자의 직접 충돌을 확실히 차단할 수 있었으며, 비저항율도 target의 부식부위 (erosion)에 대응하는 부분에서 100배 정도로 개선하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.963-966
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• 2000

Abrasive jet machining(AJM) process is similar to the sand blasting, and effectively removes hard and brittle materials. AJM has applied to rough working such as deburring and rough finishing. As the needs for machining of ceramics, semiconductor, electronic devices and LCD are increasing, micro AJM was developed, and became the inevitable technique to micromachining. This paper describes the performance of the micro AJM in micro groove cutting of glass. Diameter of hole and width of line in this groove cutting is 80${\mu}{\textrm}{m}$. Experimental results showed good performance in micro groove cutting in glass, but the size of machined groove was increased about 2~4${\mu}{\textrm}{m}$. therefore, this micro AJM could be effectively applied to the micro machining of semiconductor, electronic devices and LCD parts.

• 한국전산구조공학회논문집
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• 제31권6호
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• pp.373-380
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• 2018

본 논문에서는 다중적층 유리의 고속 충돌체에 의한 충돌/침투 파괴 현상을 해석하기 위해 페리다이나믹 동적 해석 기법을 적용한다. 대부분의 다중적층 유리 구조물들은 다수의 주요 유리층들이 상대적으로 매우 얇은 탄성 필름으로 접착되어서 만들어진다. 따라서 다중적층 구조물의 수치해석 모델을 구성하는 것은 까다롭고 비용이 많이 든다. 본 연구에서는 실제 절점을 대신하여 가상의 절점들을 주요층들 사이에 위치시키고 상호작용시키는 비국부 가상 층간구조 모델링을 도입하여 보다 효율적으로 다중적층 구조를 모델링하였다. 또한 고속 충돌체와의 충돌 및 침투 현상을 해석하기 위해 페리다이나믹 비국부 접촉 모델이 고려되었다. 7개의 유리층과 하나의 탄성 백킹층이 폴리비닐부티랄 필름으로 부착된 다중적층 유리의 충돌 파괴 해석을 통해 제안된 해석 모델의 손상 파괴 적용 가능성을 확인하였다.

• 한국진공학회지
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• 제5권2호
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• pp.139-146
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• 1996

rf 마그네트론 스파터링법을 이용하여 투명 전도성 Sb-doped $SnO_2$ 박막을 증착하였으나 박막표면에서 막손상현상이 발생하였다. 특히 기판 중심부 및 타게트 부식부위에 대응하는 부분에서 발생된 막손상을 방지하고자 , 환원형의 마스크 유리가 타게트표면에서 1.5cm지점에 설치되었다. 또한 마그네트론 스파터링의 작동조건인 rf전력, 스파터링 가스압력 및 기판온도를 최적으로 조절하면서 박막의 균일성과 전기적 특성을 평가하였다. 작동조건을 이용한 실험결과에서 균일하고 막손상이 없는 박막을 증착하는 최적온도는 압력 변화에 따라 변하며, 비율은 50w의 rf전력에서 5mTorr당 약 $100^{\circ}C$정도였다. 유사하게 rf 전력？ md가에 대한 보상에서 최적온도는 적절한 비율로 내려간다.

• 대한치과보철학회지
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• 제43권5호
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• pp.587-598
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• 2005

Statement of problem: Ceramic restorations should be made of porcelain layers of different opacity, shade, and thickness in order to provide a natural appearance. Lithium disilicate glass-ceramic system has superior color reproducibility, because it uses the ceramic ingot which is similar to teeth shade and uses the staining technique and layering technique. However, staining technique has a fault of discoloration. Also, porcelain is divided core and dentin layer, it is not enough to study about the influence of porcelain layer thickness and shade on the shade of ceramic restorations. Purpose: The purpose of this study was to evaluate the influence of porcelain layer thickness and color on the final shade of ceramic restorations. Materials and method: The CIE $L^*a^*b^*$(CIELAB) values of 72 assembled specimens, each consisting of 3 discs (enamel porcelain 0.2 mm/dentin porcelain -1.2, 0.9, 0.7, 0.5 or 0.3 mm/ceramic core -0.3, 0.5, 0.7, 0.9 or 1.2 mm, diameter is 1.0 mm) were evaluated with a spectrophotometer (Model Chromaview 300, Spectron Tech Co, Korea) for the shade A1, A2, A3 and A4. Distilled water (refractive index: 1.7) was used to attain optical contact between the layers. White, white gray, and white brown backgrounds were used to assess the influence of the background on the final shade. And the mean color difference value$({\Delta}E)$ was calculated. Results and conclusion: The results obtained from this study were as follows. 1. There was a significant correlation between the thickness ratio of the ceramic core/dentin porcelain system and $L^*,\;a^*\;and\;b^*$ values when the total thickness of specimen combination was smaller than 1.4 mm(P<0.05). 2. The specimen which the ceramic core thickness was more than 0.7 mm had the best masking effect against background colors. 3. The mean color difference value$({\Delta}E)$ is smaller than 2 $({\Delta}E<2)$ when the ceramic core thickness was larger than 0.7 mm and the total thickness of specimen was more than 1.4 mm.