• 제목/요약/키워드: Mask effect

검색결과 335건 처리시간 0.023초

Refilled mask structure for Minimizing Shadowing Effect on EUV Lithography

  • Ahn, Jin-Ho;Shin, Hyun-Duck;Jeong, Chang-Young
    • 반도체디스플레이기술학회지
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    • 제9권4호
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    • pp.13-18
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    • 2010
  • Extreme ultraviolet (EUV) lithography using 13.5 nm wavelengths is expected to be adopted as a mass production technology for 32 nm half pitch and below. One of the new issues introduced by EUV lithography is the shadowing effect. Mask shadowing is a unique phenomenon caused by using mirror-based mask with an oblique incident angle of light. This results in a horizontal-vertical (H-V) biasing effect and ellipticity in the contact hole pattern. To minimize the shadowing effect, a refilled mask is an available option. The concept of refilled mask structure can be implemented by partial etching into the multilayer and then refilling the trench with an absorber material. The simulations were carried out to confirm the possibility of application of refilled mask in 32 nm line-and-space pattern under the condition of preproduction tool. The effect of sidewall angle in refilled mask is evaluated on image contrast and critical dimension (CD) on the wafer. We also simulated the effect of refilled absorber thickness on aerial image, H-V CD bias, and overlapping process window. Finally, we concluded that the refilled absorber thickness for minimizing shadowing effect should be thinner than etched depth.

전자기파 산란을 이용한 Submicron 광학 MASK의 특성 및 최적화 (The characteristics and optimization of submicron optical mask using electromagnetic scattering effect)

  • 최준규;박정보;김유석;이성묵
    • 한국광학회지
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    • 제8권4호
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    • pp.345-352
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    • 1997
  • 최신(4GDRAM)의 MASK design에서는 전자기파의 산란에 의한 효과를 고려해 주는 것이 매우 중요하다. 이를 위하여 시간 영역에서의 요한 차분법을 도입하여 직접 마스크 함수를 계산하였다. 새롭게 도입한 마스크 함수를 사용함으로써 마스크와 렌즈의 효과뿐만 아니라, submicron 노광용 위상 변이 마스크의 식각된 옆벽에서의 산란효과를 정확하게 설명할 수 있었다. 산란효과를 줄이기 위해 변형된 마스크의 형태에 따른 특성을 살펴보았고, dual etch back에 의한 마스크 변형이 가장 좋은 공정 여유도를 제공함을 확인하였다.

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탄소섬유 방제 마스크의 농약차단효과 및 흰쥐의 급성 흡입독성 예방효과 (Inhibitory Activity of Pesticide-preventing Active Carbon Fiber Mask on the Penetration of Pesticide and its Inhibitory Effect on Acute Inhalation Toxicity in Rats)

  • 김창종;최현호;심상수;신화우
    • 약학회지
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    • 제42권4호
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    • pp.447-458
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    • 1998
  • Inhibitory activity of pesticide-preventing active carbon fiber mask on the penetrations in pesticide spray and its inhibitory effect on acute inhalation toxicity in rats were s tudied. Pesticides were sprayed into box ($1.O{\times}1.2{\tmies}O.6\;m$) at a dose of 20ml/min of diazinon ($Diatone^{TM}$) suspension (340ppm) and 5g/min of BPMC powder (2.0%) for 4 hours, and then captured the penetrated pesticides into water via mask in box under 8l/sec suction. The pesticides were analysed by A.O.A.C. method and GC/MS. Pesticide-preventing active carbon fiber mask significantly inhibited the penetration of diazinon by 93.4% as compared with control, and cotton mask and pesticide-preventing mask did it by 74.2% and 83.7%,respectively. This result shows that pesticide-preventing active carbon fiber mask has the most prominent inhibitory effect in preventing the penetration of diazinone. In the penetration of BPMC, all of three masks, such as active carbon fiber mask, cotton mask and pesticide-preventing mask, have a similar inhibitory effect, which were 99.3%, 98.6% and 97.0%, respectively. The penetrated pesticides via pesticide-preventmg active carbon fiber mask did not exert acute inhalation toxicity.

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마스크 선택기준이 브랜드 인지와 패션 마스크 구매의도에 미치는 영향 (The Effects of Consumers' Mask Selection Criteria on Mask Brand Awareness and Purchase Intention for Fashion Masks)

  • 김민수;이하경;김한나
    • 한국의류학회지
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    • 제46권1호
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    • pp.116-131
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    • 2022
  • This study used text mining to analyze big data to understand consumers' demand for and perceptions of fashion masks. Based on the text-mining analysis results, a survey was conducted with those living in Korea to investigate the influence of consumers' mask selection criteria on mask brand awareness and purchase intention for fashion masks. "Fashion mask" and "functional mask" were used as the keywords in a text-mining analysis, and an online survey of 242 respondents was conducted. The analysis results were as follows: First, the text-mining analysis extracted commonly appearing words that had a high frequency and TF-IDF, such as "COVID-19," "fashion," "celebrity," "antibacterial," and "filter." This confirmed that during the COVID-19 pandemic, consumers have demanded masks that are both functional and fashionable. Second, among consumers' mask selection criteria, trend and design had positive effects on face-mask brand awareness. Third, face-mask brand awareness had a positive effect on the purchase intention for both brand and fashion masks, and the purchase intention for brand masks had a positive effect on the purchase intention for fashion masks.

EFFECT OF PLASTICIZERS ON THE PROPERTIES OF COSMETIC MASK USING POLYVINYL ALCOHOL(PVA) AS A FILM FORMER

  • Park, J.H.;Kyong, K.Y.;Kwak, T.J.;Yoon, M.S.;Kang, S.H.
    • 대한화장품학회지
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    • 제25권4호
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    • pp.51-55
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    • 1999
  • Cosmetic mask is one of the traditional cosmetic product and is used to keep skin healthy and beautiful through moisturizing effect, cleansing effect and acceleration effect on microcirculation. There are several types of cosmetic mask such as peel-off type, tissue-off type, wash-off type and cotton sheet type immersed in cosmetic water. It is important for cosmetic formulators to develop an adequate type of cosmetic mask that meets the needs of the target consumers because each type of cosmetic mask has benefits and problems in its usage and efficacy. Polyvinyl alcohol (PVA) is widely used as an active ingredient of peel-off type cosmetic mask and the physical property of the PVA film changes with the usage of other ingredients. We studied the change of physical properties of the film containing PVA by formulating peel-off type cosmetic mask with the variation of humectants. Methylguceth-20 and glycereth-26 reduce the interaction between skin surface and PVA film without serious weakening of tensile strength and they can alleviate irritation. Glycerin, urea and betaine help PVA film soften and they also have excellent efficacy as humectants.

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EFFECT OF PLASTICIZERS ON THE PROPERTIES OF COSMETIC MASK USING POLYVINYL ALCOHOL (PVA) AS A FILM FORMER

  • Park, J.H.;K.Y.Kyong;Kwak, T.J.;Yoon, M.S.;Kang, S.H.
    • 대한화장품학회:학술대회논문집
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    • 대한화장품학회 1999년도 IFSCC . ASCS 학술대회 발표 논문
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    • pp.51-55
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    • 1999
  • Cosmetic mask is one of the traditional cosmetic product and is used to keep skin healthy and beautiful through moisturizing effect, cleansing effect and acceleration effect on microcirculation. There are several types of cosmetic mask such as peel-off type, tissue-off type, wash-off type and cotton sheet type immersed in cosmetic water. It is important for cosmetic formulators to develop an adequate type of cosmetic mask that meets the needs of the target consumers because each type of cosmetic mask has benefits and problems in its usage and efficacy. Polyvinyl alcohol (PVA) is widely used as an active ingredient of peel-off type cosmetic mask and the physical property of the PVA film changes with the usage of other ingredients. We studied the change of physical properties of the film containing PVA by formulating peel-off type cosmetic mask with the variation of humectants. Methylguceth-20 and glycereth-26 reduce the interaction between skin surface and PVA film without serious weakening of tensile strength and they can alleviate irritation. Glycerin, urea and betaine help PVA film soften and they also have excellent efficacy as humectants.

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세도우 마스크 장력에 열공정이 미치는 영향 (Effect of Heat Treatment Process on the Shadow Mask Tension)

  • 현도익;문영훈;조종래
    • 소성∙가공
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    • 제12권5호
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    • pp.487-492
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    • 2003
  • Tension variations with heat treatment in shadow mask for flat braun tubes are investigated in this study. In CRT, landing shift of the electron beam due to thermal deformation of the tension mask made the color purity of screen worse. In order to get the final results of thermal deformation, the tensile force within the mask and the welding processes between the rail and the extended mask have to be analysed sequentially. In this study, the effect of heat treatment is studied in terms of tension variations of shadow mask during its manufacturing process.

In-situ SiN Mask를 이용하여 성장한 GaN 박막의 물성적, 광학적 특성 연구 (A Study of Physical and Optical Properties of GaN grown using In-situ SiN Mask by MOCVD)

  • 김덕규;정종엽;박춘배
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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    • pp.121-124
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    • 2004
  • We have grown GaN layers with in-situ SiN mask by metal organic chemical vapor deposition(MOCVD) and study the physical properties of the GaN layer. We have also investigate the effect of the SiN mask on its optical property. By inserting a SiN mask, (102) the full width at half maximum(FWHM) decreased from 480 arcsec to 409 arcsec. The PL intensity of GaN with SiN mask improved 2 times to that without SiN mask. We have thus shown that the SiN mask improved significantly the physical and optical properties of the GgN layer.

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Comparison of the Effect of Interpolation on the Mask R-CNN Model

  • Young-Pill, Ahn;Kwang Baek, Kim;Hyun-Jun, Park
    • Journal of information and communication convergence engineering
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    • 제21권1호
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    • pp.17-23
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    • 2023
  • Recently, several high-performance instance segmentation models have used the Mask R-CNN model as a baseline, which reached a historical peak in instance segmentation in 2017. There are numerous derived models using the Mask R-CNN model, and if the performance of Mask R-CNN is improved, the performance of the derived models is also anticipated to improve. The Mask R-CNN uses interpolation to adjust the image size, and the input differs depending on the interpolation method. Therefore, in this study, the performance change of Mask R-CNN was compared when various interpolation methods were applied to the transform layer to improve the performance of Mask R-CNN. To train and evaluate the models, this study utilized the PennFudan and Balloon datasets and the AP metric was used to evaluate model performance. As a result of the experiment, the derived Mask R-CNN model showed the best performance when bicubic interpolation was used in the transform layer.

Consumer awareness about mask repurchase intention during coronavirus: The case of Chinese sample

  • Cui, Yu Hua
    • 한국의상디자인학회지
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    • 제23권2호
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    • pp.93-104
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    • 2021
  • The worldwide coronavirus pandemic has brought to light the importance of having a reliable supply of masks for each person. This study aims to understand the effect of personal awareness (including community, others', and safety awareness) on consumption conformity and the repurchase intention of masks. The research method used the SPSS 22.0 and AMOS 22.0 statistical systems to analyze descriptive statistics in terms of reliability, validity, structural equation modeling, and moderated regression analysis. A total of 272 Chinese participants were recruited via an online survey website (www.sojump.com) from May 1 to May 14, 2020. Findings indicated that mask users' awareness can be categorized into three distinct types: community, others', and safety awareness. The more community and safety awareness is perceived, the higher the level of consumption conformity. In contrast, others' has no statistical effect on consumption conformity or repurchase intention. The positive influence of consumption conformity on the repurchase intention of masks is also weaker than price perception. However, another moderating variable, mask quality, has no moderating effect. The results of this study can help mask manufacturers and distributors retain their customers, resulting in reasonable protective measures while maintaining market order. Theoretical and managerial implications for mask suppliers are also provided.