• Journal of Korean Ophthalmic Optics Society
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• v.11 no.2
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• pp.115-119
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• 2006

Electromagnetic shielding, transparent ITO coating layers have deposited on ocular lens substrate by magnetron sputtering. We investigated the effect induced by the substrate temperature on coating layer. The characteristics of the coating layers were analyzed using surface profiler, four-point probe, XRD, spectrophotometer and Auger Electron spectroscopy. As substrate temperature became higher, carrier concentration was increased and transmittance in the visible region was increased, too.