Properties of high-k $TiO_2:SiO_2$ films grown by RF magnetron sputter
(RF magnetron sputter로 성장시킨 고유전 $TiO_2:SiO_2$ 박막의 특성)
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- Proceedings of the Materials Research Society of Korea Conference
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- 2006.05a
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- pp.23.2-23.2
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- 2006