• Journal of the Semiconductor & Display Technology
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• v.8 no.4
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• pp.89-94
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• 2009

The influence on a stability of thermal plasma has been investigated in an electrode structure of non-transferred plasma torch. The variations of dynamic characteristic of the arc voltage was analyzed and compared in terms of voltage character and nozzle types for both the step-shaped nozzles and magnetic-approved cylindrical nozzle. From the experimental results, an electrode gap, flow rate of arc gas, and currents are considered as major operational parameters. As conclusion, it was assured that a torch with step-shaped nozzles of magnetic-approved type produce the stable plasma jet.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.171-172
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• 2009