• 제목/요약/키워드: Magnetic Annealing

검색결과 483건 처리시간 0.02초

바이오센서용 거대자기저항-스핀밸브 박막이 등방성 자기저항 특성을 갖게 하는 후열처리 조건 연구 (Post Annealing Treatment Introducing an Isotropy Magnetorsistive Property of Giant Magnetoresistance-Spin Valve Film for Bio-sensor)

  • 카지드마;박광준;이상석
    • 한국자기학회지
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    • 제23권3호
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    • pp.98-103
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    • 2013
  • NiFe/Cu/NiFe/IrMn/NiFe/Cu/NiFe 이중 거대자기저항-스핀밸브(GMR-SV) 박막의 진공 후열처리 온도의존성을 조사하여 강자성층 자화용이축을 유도하였다. 자유층과 고정층의 자화용이축에 의존하는 이중 스핀밸브 박막의 자기저항곡선은 외부자기장 각도를 다르게 하면서 측정하였다. 열처리온도가 $105^{\circ}C$일 때, $0^{\circ}$$90^{\circ}$ 사이 임의 측정 각도에서 약 2.0 %/Oe인 자장감응도 특성을 얻었다. 이러한 결과는 면상 강자성층과 자유층을 면상에서 서로 직교한 자화방향 유도를 통하여 이중구조 GMR-SV 박막이 고감도 바이오센서로 사용할 가능성을 제시하였다.

열처리가 FeSiB 연자성 박막의 자기특성에 미치는 영향 (Effect of Heat Treatment on The Magnetic Properties of FeSiB Thin Film)

  • 홍종욱;장태석;박종완
    • 한국재료학회지
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    • 제12권11호
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    • pp.880-882
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    • 2002
  • We have prepared magnetic thin films of FeSiB by sputtering and examined microstructure and magnetic properties of the annealed films in order to investigate the feasibility of the films to microsensor application. Effects of vacuum annealing on the magnetic properties of $Fe_{84}$$Si_{6}$$B_{10}$ films have been examined as a function of temperature. The heating rate and the holding time were 10 K/min and 1 hour, respectively. Vacuum condition was held during cooling to prevent oxidation of the films. The coercivity did not show any noticeable change (~1500 A/m), although the grain size of the crystalline phase in the annealed films increased gradually up to about 16 nm until 673 K. However, both the grain size and the coercivity increased steeply when the annealing temperature increased over 723 K. Since the saturation magnetization is closely related to the phase evolution, the variation of the saturation magnetization of the annealed films was similar to that of the ribbon materials; the thin films were transformed from amorphous to crystalline with $\alpha$-(Fe,Si) phase by increasing annealing temperature.

Fe-B-Si 비정질 합금의 자장중 열처리 효과 (Magnetic Annealing of Amorphous Fe-B-Si Alloy)

  • 강원구;김운동;이언용;김기욱;이원재;민복기;송재성;홍진완;윤문수
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1990년도 하계학술대회 논문집
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    • pp.236-238
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    • 1990
  • For improving magnetic properties of the amorphous Fe-B-Si alloy, we annealed in a magnetic field oriented in the plane of the ribbon longitudinal to its long axis. By field annealing, coercive force and total core loss are reduced from 0.04 Oe to 0.02 Oe, and from 0.25 watt/kg to 0.15 watt/kg respectively comparing with non-field annealed specimen. These reductions were caused by the formation of $180^{\circ}$ domains parallel to the annealing field due to the induced anisotorpy.

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(Fe1-xCox)89Zr11 비정질 자성막에서의 자기표면탄성파 속도변화(II) (Velocity Change of Magneto Surface Acoustic Wave (MSAW) in (Fe1-xCox)89Zr11 Amorphous Films (II))

  • 김상원
    • 한국재료학회지
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    • 제12권4호
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    • pp.279-282
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    • 2002
  • The effect of field annealing on the velocity changes of magneto surface acoustic wave (MSAW) devices has been investigated for deposited $(Fe_{1-x}Co_x)_{89}Zr_{11}$ (x = 0~1.0) amorphous films. By means of two step field annealing at $195^{\circ}C$ for 10 minute in the magnetic field of 130 Oe, the MSAW device with x=0.4 film among the devices showed the superior velocity change of 0.1 %. This gigantic value was obtained in the DC bias field of 40 Oe at the exciting frequency of 8.7 MHz. It was confirmed that such behavior was due to the variation of differential permeability caused by an optimal stress within the magnetic film.

Size-controlled Growth of Fe Nanoparticles in Gas Flow Sputtering Process

  • Sakuma, H.;Aoshima, H.;Ishii, K.
    • Journal of Magnetics
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    • 제11권3호
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    • pp.103-107
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    • 2006
  • In grain oriented electrical steel process, hot band annealing has thought to be essential for obtaining good magnetic properties. New hot rolling method of heavy reduction in early hot rolling stage was applied to obtain good magnetic properties in GO process without hot band annealing. Hot rolling was carried out by varyinghot rolling reduction distribution along hot rolling pass. The heavy hot rolling reduction in rear stand improves the magnetic flux density in the case of no hot band annealing. The hot band specimens of the heavy reduction in front stand shows the elongated hot deformed microstructures in the center layer and strong {001}<110> texture.On the contrary, the heavily reduced specimens in rear stand shows the recrystallization in the center layer of hot band and strong {111}<112> and {110}<001> textures.

NiFe 박막의 표면형상과 자기특성 (Surface Morphology and Magnetic Properties of NiFe Thin Films)

  • 이원재;백성관;민복기;송재성;김현식;이동윤
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 하계학술대회 논문집
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    • pp.519-522
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    • 2000
  • The correlation of surface morphology and magnetic property of NiFe thin films on Si(001) deposited by RF-magnetron sputter has been investigated, using AFM, XRD and MR measurements. During short field annealing for 15 min, there was no significant change in XRD patterns of NiFe thin films. However, the degree of surface roughness was changed with increasing annealing temperature. With variation of surface roughness, there was significant difference in MR characteristics of NiFe thin films. In the case of as-deposited NiFe thin films(T$\_$G/ = 150$^{\circ}C$) and UFA400 (T$\_$A/ = 400$^{\circ}C$) having smooth surface, good linearity of MR Curve was observed.

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Fe 입자를 미세 분산 시킨 AlN 박막의 물리적 성질 (Physical Properties of Fe Particles Fine-dispersed in AlN Thin Films)

  • 한창석;김장우
    • 한국재료학회지
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    • 제21권1호
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    • pp.28-33
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    • 2011
  • This paper describes the fabrication of AlN thin films containing iron and iron nitride particles, and the magnetic and electrical properties of such films. Fe-N-Al alloy films were deposited in Ar and $N_2$ mixtures at ambient temperature using Fe/Al composite targets in a two-facing-target DC sputtering system. X-ray diffraction results showed that the Fe-N-Al films were amorphous, and after annealing for 5 h both AlN and bcc-Fe/bct-$FeN_x$ phases appeared. Structure changes in the $FeN_x$ phases were explained in terms of occupied nitrogen atoms. Electron diffraction and transmission electron microscopy observations revealed that iron and iron nitride particles were randomly dispersed in annealed AlN films. The grain size of magnetic particles ranged from 5 to 20 nm in diameter depending on annealing conditions. The saturation magnetization as a function of the annealing time for the $Fe_{55}N_{20}Al_{25}$ films when annealed at 573, 773 and 873 K. At these temperatures, the amount of iron/iron nitride particles increased with increasing annealing time. An increase in the saturation magnetization is explained qualitatively in terms of the amount of such magnetic particles in the film. The resistivity increased monotonously with decreasing Fe content, being consistent with randomly dispersed iron/iron nitride particles in the AlN film. The coercive force was evaluated to be larger than $6.4{\times}10^3Am^{-1}$ (80 Oe). This large value is ascribed to a residual stress restrained in the ferromagnetic particles, which is considered to be related to the present preparation process.

Fe-Hf-N 박막의 열처리 후 연차기특성 열화 (Degradation of Soft Magnetic Properties of Fe-Hf-N Films After Annealing)

  • 제해준;박재환;김영환;김병국
    • 한국결정학회지
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    • 제12권3호
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    • pp.182-187
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    • 2001
  • 고포화자속밀도 특성을 갖는 Fe-Hf-N 박막의 진공분위기 열처리 시 발생하는 연자기 특성 열화현상을 조사하였다. 열처리 온도는 450℃∼650℃이며, TEM 분석 및 전자회절빔 분석을 통하여 박막의 미세구조와 국부적 미세결정상을분석하였다 450℃에서 600℃까지 열처리한 박막의 연자기 특성은 미세화 되어있는 α-Fe 결정립이 성장함에 따라, 열처리 전에 비해 보자력 이 0.2 Oe 정도 증가하고 유효투자율이 1500 정도 감소하는 것으로 나타났다. 포화자속밀도는 600℃ 이하까지는 0.5 KG 정도 미량 증가하나 650℃에서는 모든 연자기 특성 이 급격하게 떨어졌다. 이러한 열화현상은 650℃ 열처리시 α-Fe격자 내에 존재하던 N이 HfN로 석출됨에 따라, α-Fe 결정립이 급격히 성장하여 박막의 미세구조가 초미세 결정구조를 벗어났기 때문인 것으로 나타났다.

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열처리에 따른 강자성 터널링 접합의 국소전도특성 (Effects of Annealing Temperature on the Local Current Conduction of Ferromagnetic Tunnel Junction)

  • 윤대식;;;이영;박범찬;김철기;김종오
    • 한국재료학회지
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    • 제13권4호
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    • pp.233-238
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    • 2003
  • Ferromagnetic tunnel junctions, Ta/Cu/Ta/NiFe/Cu/$Mn_{75}$ $Ir_{25}$ $Co_{70}$ $Fe_{30}$/Al-oxide, were fabricated by do magnetron sputtering and plasma oxidation process. The effect of annealing temperature on the local transport properties of the ferromagnetic tunnel junctions was studied using contact-mode Atomic Force Microscopy (AFM). The current images reflected the distribution of the barrier height determined by local I-V analysis. The contrast of the current image became more homogeneous and smooth after annealing at $280^{\circ}C$. And the average barrier height $\phi_{ave}$ increased and its standard deviation $\sigma_{\phi}$ X decreased. For the cases of the annealing temperature more than $300^{\circ}C$, the contrast of the current image became large again. And the average barrier height $\phi_{ave}$ decreased and its standard deviation $\sigma_{\phi}$ increased. Also, the current histogram had a long tail in the high current region and became asymmetric. This result means the generation of the leakage current that is resulted from the local generation of a low barrier height region. In order to obtain the high tunnel magnetoresistance(TMR) ratio, the increase of the average barrier height and the decrease of the barrier height fluctuation must be strictly controlled.led.