• Journal of the Korean Society for Precision Engineering
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• v.26 no.5
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• pp.48-56
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• 2009

In this paper, laser-assisted machining(LAM) has been employed to machine hot isostatically pressed (HIPed) Si3N4 work pieces. Due to little residual flaws and porosity, HIPed $Si_3N_4$ work pieces are more difficult to machine compared to normally sintered $Si_3N_4$ workpieces. In LAM, the intense energy of laser was used to enhance machinability by locally heating the workpiece and thus reducing yield strength. In experiments, the laser power ranges from 200W to 800W and the diameter of work pieces is 16mm. While machining, the surface temperature was kept nearly constant by laser heating except for a short period of rise time of max. 58 seconds. Results showed as feed rate increases the surface temperature of $Si_3N_4$ workpieces decreases slightly, whereas the effect of depth of cut is disregardable. With a laser power of 800W, achievable maximal depth of cut as 0.7mm and feed rate was 0.03mm/rev.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.1
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• pp.26-32
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• 2012

Polishing is one of the important methods in manufacturing of Si wafers and in thinning of completed device wafers. This study will report the characteristic of wafer according to processing time, machining speed and pressure which have major influence on the abrasion of Si wafer polishing. It is possible to evaluation of wafer abrasion by load cell and infrared temperature sensor. The characteristic of wafer surface according to processing condition is selected to use a result data that measure a pressure, machining speed, and the processing time. This result is appeared by the characteristic of wafer surface in machining condition. Through that, the study cans evaluation a wafer characteristic in variable machining condition. It is important to obtain optimal condition. Thus the optimum condition selection of ultra precision Si wafer polishing using load cell and infrared temperature sensor. To evaluate each machining factor, use a data through each sensor. That evaluation of abrasion according to variety condition is selected to use a result data that measure a pressure, machining speed, and the processing time. And optimum condition is selected by this result.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.2
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• pp.1-6
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• 2008

In recent years, developments in the semiconductor and electronic industries have brought a rapid increase in the use of large size silicon wafer. For further improvement of the ultra precision surface and flatness of Si wafer necessary to high density ULSI, it is known that polishing is very important. However, most of these investigation was experiment less than 300mm diameter. Polishing is one of the important methods in manufacturing of Si wafers and in thinning of completed device wafers. This study reports the machining variables that has major influence on the characteristic of wafer polishing. It was adapted to polishing pressure, machining speed, and the slurry mix ratio, the optimum condition is selected by ultra precision wafer polishing using load cell and infrared temperature sensor. The optimum machining condition is selected a result data that use a pressure and table speed data. By using optimum condition, it achieves a ultra precision mirror like surface.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.4
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• pp.27-35
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• 1998

Ni-based heat resisting alloys are commonly used for high temperature applications such as in aircraft engines and gas turbines. In this work, the machinability of Nimonic 263 alloy is investigated with respect to optimum tool type and cutting conditions for both continuous and discontinuous machining as well as weld region. Among the five types of tools tested, K25 tool experienced the least of damage in machining the weld region. Furthermore, despite their superior high temperature hardness, Si-Al-O-N and CBN tools peformed poorly in machining Nimonic 263.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.8 no.3
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• pp.74-81
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• 2009

At present, industries and researchers are looking for ways to reduce the use of lubricants because of ecological and economical reasons. Therefore, metal cutting is to move toward dry cutting or semi-dry cutting. One of the technologies is known as MQL machining. This paper presents an investigation into MQL machining with the objective of evaluating cylindricity and cooling effect for the turning process of SM45C. To reach this goal, cylindrical-outer-diameter turning experiments are carried out according to cutting conditions with fluid, MQL and dry machining methods. A cutting force, tool-shank temperature and cylindricity of workpiece are measured and analyzed. The correlation between cutting conditions and cylindricity are evaluated according to cooling lubricant environments.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.365-369
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• 2004

The Advantages of hot machining are the reduction of cutting forces, tool wear, and the increase of material removal rates. In this study, a hot-machining using gas flame heating characteristics of milling by CBN tip was analyzed, and the influence of the surface temperature and the depth of cut on the tool life were investigated. The results show that hot machining of tungsten carbide-alloyed is more effective than conventional machining. In addition, some advantages obtained from hot machining, such as decrease of tool wear and cutting force, high surface quality.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.44-48
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• 1996

This paper describes the effects of thermal deformation in electromagnetic chuck on the grinding accuracy. Gringing process is the last machining process and decisive in saving past other machining cost. The thermal deformation of grinding machine is unavoidable and affect seriously ginding accuracy. The thermaldeformation of electromagnetic chuck is one of important thermal problems. Heat generation of magnetic chuck is analyzed and measured. The temperature disturibution in chuck is elliptical form with high temperature in center of chuck. The thermal deformation form of chuck is changed with time to mountain form. The grinding experiment shows that the thermal deformation of magnetic chuck influence strongly machining accuracy as much as the headstock

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1996.03a
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• pp.41-46
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• 1996

In this study, unsintered and pre-sintered low purity alumina ceramics were machined with various tools to clarify the machinability, optimum tool materials and optimum cutting conditions. The main conclusions obtained were as follows. (1)In the case of dry cutting, the sintered diamond and natural diamond tools exhibit better performance in machining of the ceramic pre-sintered at lower temperature, and the tool lives of both tools in machining the ceramics pre-sintered at high temperature becomes extremely short. (2)The performance of CBN tool becomes better in dry machining of the ceramics pre-sintered at higher temperature. (3)When the pre-sintered ceramics were wet machined with sintered diamond, the tool life becomes considerably long, and higher cutting speed can be used than in the case of the CBN and ceramic tools, the tool lives becomes shorter at wet cutting than at dry cutting, especially exhibiting extremely short tool life in wet cutting with ceramic tool.

• Journal of the Korean Society of Industry Convergence
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• v.26 no.6_3
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• pp.1197-1204
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• 2023

Ti-alloy, a high-strength alloy material among the materials used in aircraft that are trending toward lighter weight, is classified as a difficult-to-cut material that requires a lot of energy for cutting. Cutting in a high-temperature environment is considered one means of making this possible, and various studies have been conducted on it. In particular, research on LAM (Laser Assisted Machining (LAM)), which utilizes laser heating of the cutting area, is being actively conducted. Before processing of the milling cutter begins, the temperature is raised locally by the laser irradiated through the laser head carrier, and the resistance during milling is reduced. Therefore, in this paper, in order to derive such conditions, we performed heat transfer analysis according to transfer conditions and compared it with actually applied test data to use it to establish appropriate processing conditions.

• Journal of Advanced Marine Engineering and Technology
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• v.33 no.2
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• pp.322-329
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• 2009

Machinability of LAM(Laser Assisted Machining) has been studied for ceramics such as $Al_2O_3$, $Si_3_N4$ and $ZrO_2$ by $CO_2$ laser. It was possible to remove ceramics by PCBN tool because material became softening and deterioration by local laser beam irradiation. The advantage of LAM is the ability to produce larger material removal rates and tool life. But, for cutting of $Al_2O_3$ and $ZrO_2$, stage of laser power control was needed owing to thermal shock with high temperature of workpiece by laser power. And when $Si_3N_4$ was machined by LAM, $N_2$ gas spouted from surface of one cause of high temperature. Characteristics of LAM were analyzed using pyrometer, dynamometer, SEM and EDS to measure temperature of workpiece surface, cutting force, variation of machining surface and structure of lattice respectively. As the result of this study, it was found that machinability of LAM for ceramics in $CO_2$ laser and mechanism of LAM was different according to the kind of ceramics because of properties of materials.