• 한국소음진동공학회논문집
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• 제15권3호
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• pp.290-296
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• 2005

This paper proposes the modeling scheme of the Miniature Universal Testing Machine (MUTM) composed of 36 thin-beam-type bimorph PZTs and the control algorithm to minimize the residual vibration of the MUTM in the dynamic testing of specimens. In the operation of the MUTM, hysteresis, residual displacement and vibration of it are major issues. From the analysis of the MUTM behaviors, the hysteresis is described by the curving fitting scheme with the function of an input voltage. The dynamic characteristics of the MUTM are identified by the frequency domain modeling technique based on the experimental data. The interested bandwidth is focused on 125-315HZ for effective modeling and control. For the robust vibration control of the MUTM, the sliding mode control and the Kalman filter as observer are proposed. The paper also proposes the best input signal type to operate the MUTM effectively. The feasibility of the proposed modeling scheme and control algorithm are tested and verified experimentally.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2004년도 추계학술대회논문집
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• pp.476-481
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• 2004

This paper proposes the modeling scheme of the Miniature Universal Testing Machine (MUTM) composed of 36 thin-beam-type bimorph PZTs and the control algorithm to minimize the residual vibration of the MUTM in the dynamic testing of specimens. In the operation of the MUTM, hysteresis, residual displacement and vibration of it are major issues. From the analysis of the MUTM behaviors, the hysteresis is described by the curving fitting scheme with the function of an input voltage. The dynamic characteristics of the MUTM are identified by the frequency domain modeling technique base on the experimental data. The interest bandwidth is focused on 125-315HZ for effective modeling and control. For the robust vibration control of the MUTM, the sliding mode control and the Kalman filter as observer are proposed. The paper also proposes the best input signal type to operate the MUTM effectively. The feasibility of the proposed modeling scheme and control algorithm are tested and verified experimentally.

• 한국기계가공학회지
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• 제5권1호
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• pp.45-50
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• 2006

This paper shows a new precision actuator of MUTM(miniature universal testing machine) for the testing of compression and tensile load on the MEMS materials and structures. The MUTM consists of a sample holder, an ultraprecision precision actuator(tranlation stage) and load sensor. The precision actuator has been developed for generating displacements with nanometer accuracy and a dynamic range of 1mm simultaneously. In this paper, it can be made by using the displacement property of bi-morph type PZT, which is able to extend the long range(stroke) according to cantilever size. However, it is not enough to be generated for compression and tensile load in miniature universal testing machine. Therefore, three dozen bi-morph type PZTs are used for generating the load. The load and displacement of the precision actuator are 35g and 0.4mm respectively.